Patents-Review.com
ClassID:

176898 ⎘

G03F1/32 - CPC Classification

Classification description:

Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof; Phase shift masks [PSM]; PSM blanks; Preparation thereof Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion,; Preparation thereof

Recent Application in this class:
#1
20250370328
2025-12-04

PHOTOMASK BLANK

 #2
20250322135
2025-10-16

SEMICONDUCTOR DEVICE

 #3
20250321477
2025-10-16

LITHOGRAPHY MASK AND METHODS

 #4
20250253153
2025-08-07

MANUFACTURING METHOD OF PHOTOMASK, AND PHOTOMASK BLANK

 #5
20250248125
2025-07-31

ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF, MASK AND DISPLAY PANEL

 #6
20250216765
2025-07-03

REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY, REFLECTIVE MASK FOR EUV LITHOGRAPHY, AND METHOD FOR MANUFACTURING SAME

 #7
20250147408
2025-05-08

PHASE SHIFT MASK AND METHOD FOR MANUFACTURING PHASE SHIFT MASK

 #8
20250130488
2025-04-24

PHOTOMASK BLANK, PHOTOMASK, AND METHOD FOR MANUFACTURING PHOTOMASK

 #9
20250044677
2025-02-06

MASK BLANK

 #10
20250036021
2025-01-30

EXTREME ULTRAVIOLET LITHOGRAPHY METHOD AND EUV PHOTOMASK

 #11
20240427229
2024-12-26

MANUFACTURING METHOD FOR PHOTOMASK, AND PHOTOMASK

 #12
20240393675
2024-11-28

REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #13
20240361683
2024-10-31

MASK BLANK AND PHASE SHIFT MASK

 #14
20240345468
2024-10-17

BLANK MASK AND PHOTOMASK USING THE SAME

 #15
20240329516
2024-10-03

PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY

 #16
20240248390
2024-07-25

APPARATUS FOR FABRICATING BLANK MASK AND METHOD OF FABRICATING THE SAME

 #17
20240248389
2024-07-25

APPARATUS FOR FABRICATING BLANK MASK AND METHOD OF FABRICATING THE SAME

 #18
20240210814
2024-06-27

Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same

 #19
20240184195
2024-06-06

METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS

 #20
20240184194
2024-06-06

MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

 #21
20240176224
2024-05-30

Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask

 #22
20240152045
2024-05-09

PHASE SHIFT MASK BLANK, PHASE SHIFT MASK, METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND METHOD FOR MODIFYING PHASE SHIFT MASK

 #23
20240134268
2024-04-25

LITHOGRAPHY MASK

 #24
20240094623
2024-03-21

ATTENUATED PHASE SHIFT MASK FOR TALBOT LITHOGRAPHY

 #25
20240069431
2024-02-29

METHOD OF MANUFACTURING PHOTO MASKS

 #26
20240061324
2024-02-22

BLANK MASK AND PHOTOMASK USING THE SAME

 #27
20240053672
2024-02-15

MASK BLANK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #28
20240045319
2024-02-08

Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof

 #29
20240036458
2024-02-01

Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device

 #30
20240036457
2024-02-01

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

 #31
20240027892
2024-01-25

METHOD OF MAKING A HARD DISK DRIVE WRITE POLE USING A TRI-TONE ATTENUATED PHASE SHIFT MASK

 #32
20230418150
2023-12-28

BLANK MASK AND PHOTOMASK USING THE SAME

 #33
20230393457
2023-12-07

MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

 #34
20230385508
2023-11-30

SEMICONDUCTOR DEVICE

 #35
20230367200
2023-11-16

BLANK MASK AND PHOTOMASK USING THE SAME

 #36
20230350285
2023-11-02

Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask

 #37
20230324785
2023-10-12

Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same

 #38
20230314929
2023-10-05

MASK BLANK, PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #39
20230259015
2023-08-17

MASK BLANK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #40
20230194973
2023-06-22

MASK BLANK, PHASE SHIFT MASK, METHOD OF MANUFACTURING PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #41
20230185185
2023-06-15

METHOD AND APPARATUS FOR FORMING A BLANK MASK AND A LAYER FOR A BLANK MASK

 #42
20230168575
2023-06-01

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

 #43
20230135037
2023-05-04

BLANK MASK AND PHOTOMASK USING THE SAME

 #44
20230110529
2023-04-13

BLANK MASK AND PHOTOMASK USING THE SAME

 #45
20230097280
2023-03-30

MASK BLANK, TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #46
20230087016
2023-03-23

Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device

 #47
20230083755
2023-03-16

BLANK MASK AND PHOTOMASK USING THE SAME

 #48
20230082514
2023-03-16

RESIST PATTERN FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

 #49
20230069092
2023-03-02

MASK BLANK AND METHOD OF MANUFACTURING PHOTOMASK

 #50
20220414310
2022-12-29

Semiconductor device with reduced power and method of manufacturing the same

 #51
20220397819
2022-12-15

BLANK MASK AND PHOTOMASK USING THE SAME

 #52
20220390827
2022-12-08

LITHOGRAPHY MASK AND METHODS

 #53
20220382141
2022-12-01

Blank mask and photomask using the same

 #54
20220366117
2022-11-17

Method of making semiconductor device and semiconductor device

 #55
20220365417
2022-11-17

Lithography mask

 #56
20220357647
2022-11-10

BLANK MASK AND PHOTOMASK USING THE SAME

 #57
20220350238
2022-11-03

PHOTOMASK BLANK, PHOTOMASK, AND MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT

 #58
20220350237
2022-11-03

PHOTOMASK BLANK AND PHOTOMASK USING THE SAME

 #59
20220342294
2022-10-27

MASK BLANK, PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #60
20220317555
2022-10-06

HALFTONE MASK, MANUFACTURING METHOD OF DISPLAY PANEL, AND ULTRAVIOLET MASK

 #61
20220252972
2022-08-11

MASK BLANK, PHASE SHIFT MASK AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

 #62
20220236638
2022-07-28

Phase shift mask blank, manufacturing method thereof, and phase shift mask

 #63
20220236635
2022-07-28

Phase shift blankmask and photomask for EUV lithography

 #64
20220231089
2022-07-21

Display device and photomask for defining opening in the display device

 #65
20220229358
2022-07-21

Photomask blank, method for producing photomask, and photomask

 #66
20220214610
2022-07-07

A PATTERNING DEVICE

 #67
20220214609
2022-07-07

BLANK MASK AND PHOTOMASK USING THE SAME

 #68
20220214608
2022-07-07

Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device

 #69
20220206380
2022-06-30

BLANK MASK AND PHOTOMASK USING THE SAME

 #70
20220179304
2022-06-09

MASK BLANK SUBSTRATE, SUBSTRATE WITH MULTI-LAYER REFLECTIVE COATING, REFLECTION-TYPE MASK BLANK, REFLECTION-TYPE MASK, TRANSMISSION-TYPE MASK BLANK, TRANSMISSION-TYPE MASK, AND SEMICONDUCTOR DEVICE PRODUCTION METHOD

 #71
20220179300
2022-06-09

MASK BLANK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #72
20220163881
2022-05-26

Phase-shift reticle for use in photolithography

 #73
20220137502
2022-05-05

Phase shift mask blank, manufacturing method of phase shift mask, and phase shift mask

 #74
20220131077
2022-04-28

Mask plate, display panel and display device

 #75
20220130870
2022-04-28

Array substrate and display panel having array substrate

 #76
20220128898
2022-04-28

Mask blank, phase shift mask, and method of manufacturing semiconductor device

 #77
20220121106
2022-04-21

METHODS OF FABRICATING PHASE SHIFT PHOTOMASKS

 #78
20220121105
2022-04-21

Patterning device and method of use thereof

 #79
20220121104
2022-04-21

MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #80
20220082929
2022-03-17

Phase shift mask blank, method for producing phase shift mask, and phase shift mask

 #81
20220075258
2022-03-10

BLANKMASK AND PHOTOMASK

 #82
20220050372
2022-02-17

MASK BLANK, TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #83
20220043335
2022-02-10

MASK BLANK, TRANSFER MASK, AND SEMICONDUCTOR-DEVICE MANUFACTURING METHOD

 #84
20220035235
2022-02-03

MASK BLANK, TRANSFER MASK, AND SEMICONDUCTOR-DEVICE MANUFACTURING METHOD

 #85
20220035234
2022-02-03

Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof

 #86
20220005844
2022-01-06

Array substrate and manufacturing method thereof

 #87
20210407803
2021-12-30

Manufacturing method of photomask, and photomask blank

 #88
20210364910
2021-11-25

Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device

 #89
20210364909
2021-11-25

Mask blank, phase shift mask, and method of manufacturing semiconductor device

 #90
20210364840
2021-11-25

PHOTOMASK FOR FABRICATING PADDED BLACK PHOTO SPACER AND LIQUID CRYSTAL DISPLAY PANEL

 #91
20210356856
2021-11-18

Phase shift mask and electronic component manufacturing method

 #92
20210286254
2021-09-16

MASK BLANK, TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #93
20210255538
2021-08-19

Mask blank, phase shift mask, and method for manufacturing semiconductor device

 #94
20210223681
2021-07-22

Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device

 #95
20210216007
2021-07-15

Method of accelerated hazing of mask assembly

 #96
20210208498
2021-07-08

Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method

 #97
20210173296
2021-06-10

Photomask blank, manufacturing method of photomask and photomask

 #98
20210149294
2021-05-20

Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

 #99
20210149293
2021-05-20

Mask blank, phase shift mask and method for manufacturing semiconductor device

 #100
20210132488
2021-05-06

MASK BLANK, PHASE-SHIFT MASK, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

 #101
20210124254
2021-04-29

Half-tone attenuated phase shift blankmask and photomask for EUV lithography

 #102
20210109436
2021-04-15

Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device

 #103
20210096455
2021-04-01

Halftone phase shift-type photomask blank, method of manufacturing thereof, and halftone phase shift-type photomask

 #104
20210088895
2021-03-25

Mask blank, phase shift mask, and method for manufacturing semiconductor device

 #105
20210048740
2021-02-18

Mask blank, phase shift mask, and method of manufacturing semiconductor device

 #106
20210048739
2021-02-18

Method for producing photomask, method for producing semiconductor device, method for forming pattern, and photomask

 #107
20210026235
2021-01-28

MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #108
20200409252
2020-12-31

Mask blank, phase shift mask, and method of manufacturing semiconductor device

 #109
20200379338
2020-12-03

MASK BLANK, PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #110
20200371425
2020-11-26

Method of manufacturing phase shift photo masks

 #111
20200350344
2020-11-05

Method of preparing thin film transistor substrate

 #112
20200310241
2020-10-01

Phase shift mask blank and phase shift mask

 #113
20200310240
2020-10-01

Phase shift mask blank, manufacturing method thereof, and phase shift mask

 #114
20200285144
2020-09-10

MASK BLANK, TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #115
20200272052
2020-08-27

Photopolymerizable resin composition, display device using same, and manufacturing method thereof

 #116
20200249561
2020-08-06

Halftone phase shift photomask blank, making method, and halftone phase shift photomask

 #117
20200209733
2020-07-02

Semiconductor device

 #118
20200203167
2020-06-25

Semiconductor device

 #119
20200176053
2020-06-04

Memory system having write assist circuit including memory-adapted transistors

 #120
20200150524
2020-05-14

MASK BLANK, TRANSFER MASK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #121
20200117077
2020-04-16

Mask blanks, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

 #122
20200105671
2020-04-02

Hybrid power rail structure

 #123
20200066766
2020-02-27

ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF

 #124
20200064727
2020-02-27

Mask blank, phase-shift mask, and method of manufacturing semiconductor device

 #125
20200033718
2020-01-30

Mask blank, phase shift mask, and method for manufacturing semiconductor device

 #126
20200026181
2020-01-23

Halftone phase shift mask blank and halftone phase shift mask

 #127
20200026180
2020-01-23

Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus

 #128
20200012185
2020-01-09

Photomask blank, photomask, and photomask manufacturing method

 #129
20190369485
2019-12-05

Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device

 #130
20190354004
2019-11-21

BLANK PHASE SHIFT PHOTOMASKS, PHASE SHIFT PHOTOMASKS FABRICATED USING BLANK PHASE SHIFT PHOTOMASKS, AND METHODS OF FABRICATING PHASE SHIFT PHOTOMASKS USING BLANK PHASE SHIFT PHOTOMASKS

 #131
20190346727
2019-11-14

Display panel manufacturing method and display panel

 #132
20190339608
2019-11-07

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

 #133
20190332006
2019-10-31

Photomask and methods for manufacturing and correcting photomask

 #134
20190319222
2019-10-17

PHOTOMASK AND METHOD FOR MANUFACTURING DISPLAY DEVICE

 #135
20190258155
2019-08-22

Mask assembly and haze acceleration method

 #136
20190227428
2019-07-25

Method for manufacturing a mask blank substrate, method for manufacturing a mask blank, method for manufacturing a transfer mask, method for manufacturing a semiconductor device, a mask blank substrate, a mask blank, and a transfer mask

 #137
20190187551
2019-06-20

Mask blank, phase shift mask, method of manufacturing phase shift mask, and method of manufacturing semiconductor device

 #138
20190187550
2019-06-20

Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device

 #139
20190163047
2019-05-30

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

 #140
20190163011
2019-05-30

Color filter substrate and method of manufacturing the same

 #141
20190155138
2019-05-23

Mask for extreme-ultraviolet (extreme-UV) lithography and method for manufacturing the same

 #142
20190146327
2019-05-16

Mask blank, phase-shift mask, and method of manufacturing semiconductor device

 #143
20190146326
2019-05-16

Method of manufacturing phase shift photo masks

 #144
20190137862
2019-05-09

Masks and methods of forming the same

 #145
20190101818
2019-04-04

Lithography mask and method for manufacturing the same

 #146
20190096927
2019-03-28

MANUFACTURING METHOD OF THIN FILM TRANSISTOR AND MASK

 #147
20190079383
2019-03-14

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

 #148
20190064651
2019-02-28

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

 #149
20190064650
2019-02-28

Halftone phase shift photomask blank and making method

 #150
20190064649
2019-02-28

Mask blank

 #151
20190056626
2019-02-21

Method for fabricating array substrate, array substrate and display device

 #152
20190033703
2019-01-31

Photomask blank, photomask blank making method, and photomask making method

 #153
20190018312
2019-01-17

Mask blank, phase shift mask, and method for manufacturing semiconductor device

 #154
20190004420
2019-01-03

Photomask blank and photomask

 #155
20190004419
2019-01-03

Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device

 #156
20180373081
2018-12-27

Mask structure and manufacturing method for array substrate

 #157
20180356720
2018-12-13

Phase shift mask blank, phase shift mask, and blank preparing method

 #158
20180341172
2018-11-29

Method of fabricating phase shift mask and method of fabricating semiconductor device

 #159
20180340886
2018-11-29

Apparatus and methods for measuring phase and amplitude of light through a layer

 #160
20180335692
2018-11-22

PHASE-SHIFT BLANKMASK AND PHASE-SHIFT PHOTOMASK

 #161
20180329285
2018-11-15

Reflective mask blank, reflective mask and method of manufacturing semiconductor device

 #162
20180321582
2018-11-08

Photomask and methods for manufacturing and correcting photomask

 #163
20180301185
2018-10-18

Device having write assist circuit including memory-adapted transistors and method for making the same

 #164
20180299767
2018-10-18

Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

 #165
20180294434
2018-10-11

Substrate and method of producing the same with display apparatus and producing method thereof

 #166
20180267398
2018-09-20

Photomask blank, method for manufacturing photomask, and mask pattern formation method

 #167
20180259843
2018-09-13

Photomask blank

 #168
20180259842
2018-09-13

Halftone phase shift photomask blank

 #169
20180259841
2018-09-13

Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device

 #170
20180252995
2018-09-06

Mask blank, phase shift mask and method for manufacturing semiconductor device

 #171
20180224737
2018-08-09

Method for preparing photomask blank, photomask blank, method for preparing photomask, photomask, and metallic chromium target

 #172
20180210331
2018-07-26

Mask blank, phase shift mask, phase shift mask manufacturing method, and semiconductor device manufacturing method

 #173
20180196348
2018-07-12

Phase shift mask

 #174
20180180987
2018-06-28

Mask blank, phase-shift mask and method for manufacturing semiconductor device

 #175
20180180986
2018-06-28

Photomask blank, and preparation method thereof

 #176
20180180946
2018-06-28

Apparatus for improving optical alignment of panels manufactured on a same mother substrate

 #177
20180180931
2018-06-28

Black matrix mask, method for manufacturing black matrix, and application thereof

 #178
20180164675
2018-06-14

Photomask and fabrication method therefor

 #179
20180164169
2018-06-14

Stress measurement method and system for optical materials

 #180
20180149961
2018-05-31

Mask blank, phase shift mask, and method for manufacturing semiconductor device

 #181
20180143528
2018-05-24

Mask blank, phase shift mask, and method for manufacturing semiconductor device

 #182
20180129130
2018-05-10

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

 #183
20180120601
2018-05-03

OPTIMIZATION METHOD OF THICKNESS UNIFORMITY OF ALIGNMENT FILM AND LIQUID CRYSTAL DISPLAY PANEL

 #184
20180101092
2018-04-12

Manufacturing method of a mask plate and a color filter substrate

 #185
20180088457
2018-03-29

Halftone phase shift mask blank and halftone phase shift mask

 #186
20180088456
2018-03-29

Halftone phase shift photomask blank, making method, and halftone phase shift photomask

 #187
20180059532
2018-03-01

Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus

 #188
20180052387
2018-02-22

Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device

 #189
20180033612
2018-02-01

Mask blank and phase shift mask using same

 #190
20180031963
2018-02-01

Mask blanks, phase shift mask, and method for manufacturing semiconductor device

 #191
20170371238
2017-12-28

Mask for photolithography, method of manufacturing the same and method of manufacturing substrate using the same

 #192
20170285458
2017-10-05

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

 #193
20170212417
2017-07-27

Halftone phase shift photomask blank and making method

 #194
20170184968
2017-06-29

Compound for forming organic film, composition for forming organic film, method for forming organic film, and patterning process

 #195
20170176848
2017-06-22

Mask blank, phase-shift mask, method of manufacturing mask blank, method of manufacturing phase-shift mask and method of manufacturing semiconductor device

 #196
20170168384
2017-06-15

Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device

 #197
20170139316
2017-05-18

Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device

 #198
20170123306
2017-05-04

Method of manufacturing photomask blank and photomask blank

 #199
20170123305
2017-05-04

Mask blank, phase shift mask, and production method thereof

 #200
20170075213
2017-03-16

Photomask and methods for manufacturing and correcting photomask

 #201
20170075210
2017-03-16

Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device

 #202
20170068156
2017-03-09

Photomask blank

 #203
20170059983
2017-03-02

Halftone phase shift photomask blank, making method, and halftone phase shift photomask

 #204
20170023855
2017-01-26

Photomask blank and method for manufacturing photomask blank

 #205
20170010526
2017-01-12

Mask blank, and transfer mask

 #206
20170003583
2017-01-05

Mask blank and transfer mask

 #207
20160377975
2016-12-29

Mask blank, phase-shift mask and method for manufacturing semiconductor device

 #208
20160343746
2016-11-24

DOPING METHOD AND DOPING APPARATUS OF ARRAY SUBSTRATE

 #209
20160315199
2016-10-27

PHOTO MASK, THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR

 #210
20160291456
2016-10-06

Halftone phase shift mask blank, halftone phase shift mask, and pattern exposure method

 #211
20160291455
2016-10-06

Method for preparing halftone phase shift photomask blank

 #212
20160291454
2016-10-06

Method for preparing halftone phase shift photomask blank

 #213
20160291453
2016-10-06

Phase shift mask blank, phase shift mask, and blank preparing method

 #214
20160291452
2016-10-06

Halftone phase shift mask blank and halftone phase shift mask

 #215
20160274402
2016-09-22

Display device having a furrow structure on a light blocking member

 #216
20160258901
2016-09-08

Producing a separation medium using grayscale mask

 #217
20160202603
2016-07-14

Mask blank, transfer mask, and method for manufacturing transfer mask

 #218
20160202602
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