Patents-Review.com
ClassID:

177248 ⎘

G03F9/00 - CPC Classification

Classification description:

Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Sub-classes:
Recent Application in this class:
#1
20220367224
2022-11-17

Measurement system, substrate processing system, and device manufacturing method

 #2
20220317581
2022-10-06

Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method

 #3
20220189735
2022-06-16

Method and apparatus for an imaging system

 #4
20220032532
2022-02-03

Imprinting device and imprinting method

 #5
20210354363
2021-11-18

Imprint apparatus and method of manufacturing article

 #6
20210272833
2021-09-02

Measurement system, substrate processing system, and device manufacturing method

 #7
20210070037
2021-03-11

Printing plate segment mounting system and method

 #8
20200310253
2020-10-01

Substrate processing apparatus, processing apparatus, and method for manufacturing device

 #9
20200270087
2020-08-27

PROCESSING SYSTEM AND DEVICE MANUFACTURING METHOD

 #10
20200266087
2020-08-20

Measurement system, substrate processing system, and device manufacturing method

 #11
20200264588
2020-08-20

Drawing apparatus and drawing method

 #12
20200264523
2020-08-20

Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method

 #13
20200257209
2020-08-13

Measurement device, lithography system and exposure apparatus, and device manufacturing method

 #14
20200225592
2020-07-16

MEASUREMENT DEVICE AND MEASUREMENT METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #15
20200124984
2020-04-23

Method and system for overlay control

 #16
20200089129
2020-03-19

Substrate processing apparatus, processing apparatus, and method for manufacturing device

 #17
20190384179
2019-12-19

Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method

 #18
20190332018
2019-10-31

Substrate processing apparatus, processing apparatus, and method for manufacturing device

 #19
20190310133
2019-10-10

Apparatus and method for measuring amplitude of scanning reflector

 #20
20190302582
2019-10-03

Focusing and leveling measurement device and method

 #21
20190287837
2019-09-19

Measurement system, substrate processing system, and device manufacturing method

 #22
20190285996
2019-09-19

Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing article

 #23
20190285995
2019-09-19

Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method

 #24
20190263031
2019-08-29

Imprint apparatus, imprint method, and article manufacturing method

 #25
20190177105
2019-06-13

Processing system and device manufacturing method

 #26
20190171121
2019-06-06

Mark detection apparatus, mark detection method, measurement apparatus, exposure apparatus, exposure method and device manufacturing method

 #27
20190146364
2019-05-16

Dual-layer alignment device and method

 #28
20190061338
2019-02-28

Printing plate segment mounting system and method

 #29
20190025713
2019-01-24

Substrate processing apparatus, processing apparatus, and method for manufacturing device

 #30
20180330911
2018-11-15

Method and apparatus for an imaging system

 #31
20180329313
2018-11-15

Method and system for overlay control

 #32
20180299769
2018-10-18

Carrying platform for carrying mask plate, mask plate and mask plate securing assembly

 #33
20180299713
2018-10-18

Correction system and method for alignment film printing plate

 #34
20180268858
2018-09-20

Method for manufacturing information recording medium

 #35
20180253020
2018-09-06

Relative position measurement based alignment system, double workpiece stage system and measurement system

 #36
20180143541
2018-05-24

Silicon wafer transportation system

 #37
20180129144
2018-05-10

Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method

 #38
20180039191
2018-02-08

Measurement device, lithography system and exposure apparatus, and device manufacturing method

 #39
20170253451
2017-09-07

Processing system and device manufacturing method

 #40
20170239850
2017-08-24

Transfer method and apparatus and computer program product

 #41
20170168403
2017-06-15

Environmental control of systems for photolithography process

 #42
20170076967
2017-03-16

Ebeam align on the fly

 #43
20160252753
2016-09-01

Alignment system

 #44
20160238941
2016-08-18

Maskless lithography for web based processing

 #45
20160231648
2016-08-11

Lithography apparatus, control method therefor, and method of manufacturing article

 #46
20160145744
2016-05-26

Image processing-based lithography system and method of coating target object

 #47
20150286155
2015-10-08

Steam injection process for preparing polyester latex and apparatus thereof

 #48
20150268564
2015-09-24

Method and system for overlay control

 #49
20150241778
2015-08-27

Substrate processing apparatus, processing apparatus, and method for manufacturing device

 #50
20150109598
2015-04-23

Lithography system and method for processing a target, such as a wafer

 #51
20150067617
2015-03-05

Method and system for overlay control

 #52
20150049334
2015-02-19

Optical image capturing module, aligning method, and observing method

 #53
20140240705
2014-08-28

SEMICONDUCTOR DEVICE, RETICLE METHOD FOR CHECKING POSITION MISALIGNMENT AND METHOD FOR MANUFACTURING POSITION MISALIGNMENT CHECKING MARK

 #54
20140204397
2014-07-24

Metrology method and apparatus, and device manufacturing method

 #55
20140168648
2014-06-19

Alignment device for exposure device, and alignment mark

 #56
20140146299
2014-05-29

Alignment correction method for substrate to be exposed, and exposure apparatus

 #57
20140141535
2014-05-22

Method for aligning substrate and mask and method for preparing semiconductor device

 #58
20140118712
2014-05-01

Measuring system

 #59
20140096696
2014-04-10

OPEN LOOP CONTROL SYSTEM AND METHODS FOR COLOR PRINT REGISTRATION

 #60
20140055795
2014-02-27

Space imaging overlay inspection method and array substrate

 #61
20130335504
2013-12-19

Optical writer for flexible foils

 #62
20130329209
2013-12-12

Mask, exposure apparatus and device manufacturing method

 #63
20130258415
2013-10-03

Image editing apparatus, image editing method, and recording medium

 #64
20130235362
2013-09-12

Exposure apparatus

 #65
20130230799
2013-09-05

Film exposure method

 #66
20130075135
2013-03-28

PRINTED CIRCUIT BOARD AND MANUFACTURING METHOD THEREOF

 #67
20130044300
2013-02-21

Double-sided maskless exposure system and method

 #68
20120324711
2012-12-27

Method and a device for titling

 #69
20120244319
2012-09-27

Imprint lithography

 #70
20120242970
2012-09-27

Metrology method and apparatus, and device manufacturing method

 #71
20120242938
2012-09-27

METHODS FOR MANUFACTURING LCD SUBSTRATES AND LCDS

 #72
20120236278
2012-09-20

Image processing-based lithography system and method of coating target object

 #73
20120170011
2012-07-05

Alignment method, alignment apparatus, and exposure apparatus

 #74
20120163660
2012-06-28

Processing system

 #75
20120147343
2012-06-14

Alignment method, alignment apparatus, and exposure apparatus

 #76
20120113247
2012-05-10

Lighting Device For Alignment And Exposure Device Having The Same

 #77
20120100666
2012-04-26

PHOTOLUMINESCENCE IMAGE FOR ALIGNMENT OF SELECTIVE-EMITTER DIFFUSIONS

 #78
20120062862
2012-03-15

Apparatuses and methods for compensation of carrier distortions from measurement machines

 #79
20120032377
2012-02-09

Apparatus and method for aligning surfaces

 #80
20120015289
2012-01-19

Alignment method and method for manufacturing flat panel display

 #81
20110308411
2011-12-22

Non-printing registration marks on a printing plate

 #82
20110262869
2011-10-27

Method of aligning photomask with base material and method of manufacturing printed circuit board

 #83
20110262868
2011-10-27

Method of detecting alignment mark and method of manufacturing printed circuit board

 #84
20110228242
2011-09-22

Method and apparatus for performing alignment using reference board

 #85
20110206852
2011-08-25

IMPRINT APPARATUS, TEMPLATE OF IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

 #86
20110195850
2011-08-11

COMPACT NANOFABRICATION APPARATUS

 #87
20110181856
2011-07-28

Auto-focusing device and method for maskless exposure apparatus

 #88
20110157577
2011-06-30

Alignment system for various materials and material flows

 #89
20110157352
2011-06-30

Infrared direct illumination machine vision technique for semiconductor processing equipment

 #90
20110116064
2011-05-19

Maskless exposure apparatus and method

 #91
20110097827
2011-04-28

Pattern formation method and a method for manufacturing a semiconductor device

 #92
20110076599
2011-03-31

Apparatus and method for aligning mask

 #93
20110075145
2011-03-31

Alignment system for optical lithography

 #94
20110048160
2011-03-03

Method and system to control movement of a body for nano-scale manufacturing

 #95
20110037488
2011-02-17

Flexural mechanism for passive angle alignment and locking

 #96
20110024930
2011-02-03

Method of manufacturing a semiconductor device

 #97
20110018168
2011-01-27

Imprint lithography template

 #98
20110008483
2011-01-13

Imprint lithography apparatus

 #99
20100308485
2010-12-09

PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD

 #100
20100297282
2010-11-25

Imprint lithography apparatus

 #101
20100194009
2010-08-05

Substrate holding platen with adjustable shims

 #102
20100173033
2010-07-08

Device for holding a template for use in imprint lithography

 #103
20100136154
2010-06-03

Stamper and method for making soft mold

 #104
20100134807
2010-06-03

Printing plate registration

 #105
20100129486
2010-05-27

Method and system for double-sided patterning of substrates

 #106
20100097462
2010-04-22

Web longitudinal position sensor

 #107
20100072664
2010-03-25

Imprint apparatus and method of manufacturing article

 #108
20100065986
2010-03-18

Nanoimprint method and apparatus

 #109
20100065757
2010-03-18

Direct illumination machine vision technique for processing semiconductor wafers

 #110
20100052217
2010-03-04

Imprinting apparatus and article manufacturing method

 #111
20100038827
2010-02-18

Interferometric analysis method for the manufacture of nano-scale devices

 #112
20090273793
2009-11-05

Drawing Position Measuring Method and Apparatus, and Drawing Method and Apparatus

 #113
20090214689
2009-08-27

Imprint Lithography Templates Having Alignment Marks

 #114
20090170014
2009-07-02

Mask, exposure apparatus and device manufacturing method

 #115
20090169662
2009-07-02

Enhanced multi channel alignment

 #116
20090108483
2009-04-30

Alignment method, imprint method, alignment apparatus, and position measurement method

 #117
20090101037
2009-04-23

GAP MEASURING METHOD, IMPRINT METHOD, AND IMPRINT APPARATUS

 #118
20090092288
2009-04-09

IMAGE POSITION MEASURING APPARATUS AND EXPOSURE APPARATUS

 #119
20090086207
2009-04-02

Alignment system for optical lithography

 #120
20090086009
2009-04-02

Laser direct imaging apparatus and imaging method

 #121
20090057149
2009-03-05

Method of Manufacturing a Diagnostic Test Strip

 #122
20090034860
2009-02-05

IMAGE-DRAWING METHOD, IMAGE-DRAWING DEVICE, IMAGE-DRAWING SYSTEM, AND CORRECTION METHOD

 #123
20090023607
2009-01-22

COMPACT NANOFABRICATION APPARATUS

 #124
20080276813
2008-11-13

Method and Apparatus for Printing a Patterned Layer on a Flatsubstate with a Flat-Type-Bed

 #125
20080250958
2008-10-16

Process for the Manufacture of Rollers for the Printing of Laminar Materials, Machine for Implementing the Process and Printing Support for Printing Rollers

 #126
20080201686
2008-08-21

Method and apparatus for performing target-image-based optical proximity correction

 #127
20080135784
2008-06-12

Patterning compositions, masks, and methods

 #128
20080095878
2008-04-24

Imprint Lithography Template Having a Feature Size Under 250 nm

 #129
20080056788
2008-03-06

Image Recording Device and Image Recording Method

 #130
20080052925
2008-03-06

Drawings device and drawing method

 #131
20080031640
2008-02-07

Method Of Calibrating Alignment Section, Image-Drawing Device With Calibrated Alignment Section, And Conveying Device

 #132
20080023885
2008-01-31

METHOD FOR FORMING A NANO-IMPRINT LITHOGRAPHY TEMPLATE HAVING VERY HIGH FEATURE COUNTS

 #133
20080003709
2008-01-03

Method of manufacturing a diagnostic test strip

 #134
20070283831
2007-12-13

Method and apparatus for registration of an imaged lithographic plate

 #135
20070266875
2007-11-22

Imprint lithographic apparatus, device manufacturing method and device manufactured thereby

 #136
20070264588
2007-11-15

Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks

 #137
20070261574
2007-11-15

Microcontact printing

 #138
20070257389
2007-11-08

Imprint Mask and Method for Defining a Structure on a Substrate

 #139
20070247608
2007-10-25

Tessellated patterns in imprint lithography

 #140
20070242272
2007-10-18

Pattern transfer apparatus, imprint apparatus, and pattern transfer method

 #141
20070231421
2007-10-04

Enhanced Multi Channel Alignment

 #142
20070202442
2007-08-30

Method and apparatus for merging a mask and a printing plate

 #143
20070132152
2007-06-14

Method and system for double-sided patterning of substrates

 #144
20070128549
2007-06-07

Method of fabricating nanoimprint mold

 #145
20070093079
2007-04-26

Imprinting method and imprinting apparatus

 #146
20070014920
2007-01-18

Micro-contact-printing engine

 #147
20060269645
2006-11-30

Transcript apparatus

 #148
20060266244
2006-11-30

Imprint lithography including alignment

 #149
20060210891
2006-09-21

Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same

 #150
20060183331
2006-08-17

Methods for patterning dielectric material, and methods for aligning semiconductor fabrication molds and semiconductor substrates

 #151
20060172229
2006-08-03

Alignment system used in nano-imprint lithography and nano imprint lithography method using the alignment system

 #152
20060158651
2006-07-20

Scatterometry alignment for imprint lithography

 #153
20060147820
2006-07-06

Phase contrast alignment method and apparatus for nano imprint lithography

 #154
20060145400
2006-07-06

Method and apparatus for direct referencing of top surface of workpiece during imprint lithography

 #155
20060132590
2006-06-22

Scanner system

 #156
20060126058
2006-06-15

Interferometric analysis for the manufacture of nano-scale devices

 #157
20060115753
2006-06-01

Method and apparatus for performing target-image-based optical proximity correction

 #158
20060114450
2006-06-01

Interferometric analysis method for the manufacture of nano-scale devices

 #159
20060113621
2006-06-01

Methods for aligning semiconductor fabrication molds and semiconductor substrates

 #160
20060038316
2006-02-23

Methods for forming molds

 #161
20060032070
2006-02-16

Micro tool alignment apparatus and method

 #162
20060006580
2006-01-12

Device for transferring a pattern to an object

 #163
20060005728
2006-01-12

Printing plate registration and optical alignment device including locating at least a part of a reference edge in at least one digital camera image

 #164
20050280390
2005-12-22

Electromagnetic alignment and scanning apparatus

 #165
20050274219
2005-12-15

Method and system to control movement of a body for nano-scale manufacturing

 #166
20050264132
2005-12-01

Apparatus to control displacement of a body spaced-apart from a surface

 #167
20050231696
2005-10-20

Exposure device

 #168
20050213806
2005-09-29

System and method for manufacturing printed circuit boards employing non-uniformly modified images

 #169
20050178230
2005-08-18

Positioning device, especially for offset plates

 #170
20050172847
2005-08-11

Alignment elements for an apparatus for handling printing plates

 #171
20050172256
2005-08-04

Mask set for measuring an overlapping error and method of measuring an overlapping error using the same

 #172
20050156122
2005-07-21

Method and apparatus for aligning a substrate on a stage

 #173
20050147900
2005-07-07

Aligning-assembling method for color wheel

 #174
20050124092
2005-06-09

Patterning method

 #175
20050118515
2005-06-02

Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same

 #176
20050089774
2005-04-28

Method to control the relative position between a body and a surface

 #177
20050088133
2005-04-28

Electromagnetic alignment and scanning apparatus

 #178
20050083006
2005-04-21

Electromagnetic alignment and scanning apparatus

 #179
20050067379
2005-03-31

Imprint lithography template having opaque alignment marks

 #180
20050064344
2005-03-24

Imprint lithography templates having alignment marks

 #181
20050064054
2005-03-24

Pattern forming apparatus

 #182
20050053844
2005-03-10

Gray scale all-glass photomasks

 #183
20050026438
2005-02-03

Semiconductor processing methods

 #184
20050002553
2005-01-06

Image pattern recording method

 #185
17002605
2023-04-11

Custom photolithography masking via precision dispense process