Patents-Review.com
ClassID:

177254 ⎘

G03F9/7015 - CPC Classification

Classification description:

Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography; Alignment type or strategy, e.g. leveling, global alignment; Alignment other than original with workpiece Reference, i.e. alignment of original or workpiece with respect to a reference not on the original or workpiece

Recent Application in this class:
#1
20260133503
2026-05-14

MASKLESS EXPOSURE SYSTEM HAVING IMAGE PROCESSING FUNCTION FOR SUBSTRATE POSITIONING

 #2
20260110978
2026-04-23

EXPOSURE APPARATUS, ARTICLE MANUFACTURING METHOD, AND CONTROL METHOD

 #3
20250355377
2025-11-20

SUBSTRATE PROCESSING SYSTEM, COMPUTATION APPARATUS, EXPOSURE APPARATUS, COMPUTATION METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

 #4
20250348010
2025-11-13

PACKAGE IMAGING FOR DIE LOCATION CORRECTION IN DIGITAL LITHOGRAPHY

 #5
20240069455
2024-02-29

DETECTION DEVICE, DETECTION METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

 #6
20230288822
2023-09-14

PACKAGE IMAGING FOR DIE LOCATION CORRECTION IN DIGITAL LITHOGRAPHY

 #7
20230266678
2023-08-24

Lithographic apparatus

 #8
20230114246
2023-04-13

Lithography measurement machine and operating method thereof

 #9
20210325790
2021-10-21

Method, apparatus, and system for forming code

 #10
20210223703
2021-07-22

Lithographic apparatus

 #11
20200301293
2020-09-24

Alignment mark, imprinting method, manufacturing method of semiconductor device, and alignment device

 #12
20200174384
2020-06-04

Lithography apparatus, determination method, and method of manufacturing an article

 #13
20200159126
2020-05-21

Lithographic apparatus

 #14
20200018590
2020-01-16

Length measurement device

 #15
20190377266
2019-12-12

Lithographic apparatus

 #16
20190361364
2019-11-28

Angle adjustment tool, angle adjustment system for liquid crystal panel and line defect analysis method

 #17
20190279892
2019-09-12

Systems and methods for wafer alignment

 #18
20190204138
2019-07-04

Adjustable load transmitter

 #19
20190187566
2019-06-20

Lithographic apparatus

 #20
20190148202
2019-05-16

Systems and methods for wafer alignment

 #21
20190146364
2019-05-16

Dual-layer alignment device and method

 #22
20190122858
2019-04-25

Charged particle beam writing apparatus and charged particle beam writing method

 #23
20190113856
2019-04-18

Coaxial mask alignment device, photolithography apparatus and alignment method

 #24
20190017861
2019-01-17

Adjustable load transmitter

 #25
20180330976
2018-11-15

Systems and methods for wafer alignment

 #26
20180196352
2018-07-12

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

 #27
20170352563
2017-12-07

Systems and methods for wafer alignment

 #28
20170329241
2017-11-16

Alignment method and alignment system thereof

 #29
20170285491
2017-10-05

Lithography apparatus, control method therefor, and method of manufacturing article

 #30
20170133256
2017-05-11

Interconnection structure, fabricating method thereof, and exposure alignment system

 #31
20160216612
2016-07-28

Exposure apparatus and method for producing device

 #32
20150192515
2015-07-09

Imprint apparatus, imprint method and method of manufacturing an article

 #33
20140146299
2014-05-29

Alignment correction method for substrate to be exposed, and exposure apparatus

 #34
20130271750
2013-10-17

Backside alignment apparatus and method

 #35
20130155398
2013-06-20

Projection aligner

 #36
20130077075
2013-03-28

Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film

 #37
20130070228
2013-03-21

Exposure apparatus

 #38
20130050674
2013-02-28

LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE AND DEVICE MANUFACTURING METHOD

 #39
20120262691
2012-10-18

MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #40
20120258391
2012-10-11

Measurement apparatus, exposure apparatus, and device fabrication method

 #41
20120081682
2012-04-05

Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography

 #42
20120057141
2012-03-08

Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and device

 #43
20110199594
2011-08-18

Exposure apparatus and method for producing device

 #44
20110116064
2011-05-19

Maskless exposure apparatus and method

 #45
20110058151
2011-03-10

Exposure apparatus and device manufacturing method

 #46
20100208229
2010-08-19

Method and apparatus to adjust misalignment of the maskless exposure apparatus

 #47
20100208228
2010-08-19

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #48
20100099049
2010-04-22

Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and device

 #49
20100078840
2010-04-01

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

 #50
20100044594
2010-02-25

Apparatus for aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate

 #51
20090286172
2009-11-19

Surface shape measurement apparatus and exposure apparatus

 #52
20090268179
2009-10-29

Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film

 #53
20090237633
2009-09-24

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #54
20090190110
2009-07-30

Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method

 #55
20090115987
2009-05-07

Position measurement system and lithographic apparatus

 #56
20090097008
2009-04-16

Alignment Method and Apparatus, Lithographic Apparatus, Metrology Apparatus and Device Manufacturing Method

 #57
20080246938
2008-10-09

Exposure apparatus and device manufacturing method

 #58
20080231825
2008-09-25

Exposure Apparatus and method for producing device

 #59
20080225250
2008-09-18

Exposure apparatus and method for producing device

 #60
20080225249
2008-09-18

Exposure apparatus and method for producing device

 #61
20080094465
2008-04-24

Image Recording Device and Image Recording Method

 #62
20080055607
2008-03-06

Nanometer-level mix-and-match scanning tip and electron beam lithography using global backside position reference marks

 #63
20080031640
2008-02-07

Method Of Calibrating Alignment Section, Image-Drawing Device With Calibrated Alignment Section, And Conveying Device

 #64
20080030733
2008-02-07

Mark position measuring method and apparatus

 #65
20080030696
2008-02-07

Exposure apparatus and method for producing device

 #66
20080030695
2008-02-07

Exposure apparatus and method for producing device

 #67
20070247600
2007-10-25

Exposure apparatus and method for producing device

 #68
20070242272
2007-10-18

Pattern transfer apparatus, imprint apparatus, and pattern transfer method

 #69
20070234786
2007-10-11

Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography

 #70
20070222990
2007-09-27

Alignment tool for a lithographic apparatus

 #71
20070132968
2007-06-14

Exposure apparatus and method for producing device

 #72
20070109515
2007-05-17

Exposure apparatus and an exposure method

 #73
20070072099
2007-03-29

Method of aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate

 #74
20070064210
2007-03-22

Exposure apparatus and method for producing device

 #75
20070035711
2007-02-15

Exposure apparatus and method for producing device

 #76
20070017110
2007-01-25

Surface position measuring method, exposure apparatus, and device manufacturing method

 #77
20060274297
2006-12-07

Photo detector unit and exposure apparatus having the same

 #78
20060250596
2006-11-09

Exposure apparatus and method for producing device

 #79
20060158630
2006-07-20

Exposure apparatus, device manufacturing method, stage apparatus, and alignment method

 #80
20060152699
2006-07-13

Exposure apparatus and method for producing device

 #81
20060108541
2006-05-25

Alignment method, alignment substrate, production method for alignment substrate, exposure method, exposure system and mask producing method

 #82
20060077367
2006-04-13

Exposure apparatus and method for producing device

 #83
20060072096
2006-04-06

Reflective alignment grating

 #84
20060033055
2006-02-16

Surface position detection apparatus and method, and exposure apparatus and device manufacturing method using the exposure apparatus

 #85
20060023214
2006-02-02

Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus

 #86
20060007441
2006-01-12

Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool

 #87
20050286042
2005-12-29

Method of calibration, calibration substrate, and method of device manufacture

 #88
20050280795
2005-12-22

Lithographic apparatus and device manufacturing method

 #89
20050264781
2005-12-01

Position detection method and apparatus

 #90
20050248659
2005-11-10

Exposure apparatus, and method, device manufacturing method, pattern generator and maintenance method

 #91
20050243296
2005-11-03

Position detecting method and apparatus, exposure apparatus and device manufacturing method

 #92
20050231698
2005-10-20

Method of measuring alignment of a substrate with respect to a reference alignment mark

 #93
20050219489
2005-10-06

Exposure apparatus and method for producing device

 #94
20050211918
2005-09-29

Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices

 #95
20050185183
2005-08-25

Method for aligning wafer

 #96
20050179880
2005-08-18

Lithographic apparatus and device manufacturing method with feed-forward focus control

 #97
20050162626
2005-07-28

Lithographic alignment system

 #98
20050117140
2005-06-02

Position detector, position detecting method, and exposure apparatus having the same

 #99
20050105093
2005-05-19

Microprocessing apparatus, semiconductor device manufacturing apparatus, and device manufacturing method

 #100
20050053273
2005-03-10

PSM alignment method and device

 #101
20050046846
2005-03-03

Lithography alignment

 #102
20050046845
2005-03-03

System and method of measurement, system and method of alignment, lithographic apparatus and method

 #103
20050030537
2005-02-10

Mark position measuring method and apparatus

 #104
20050018167
2005-01-27

Method and apparatus for positioning a substrate on a substrate table

 #105
15858324
2018-09-25

Adjustable load transmitter

 #106
15795313
2018-12-04

Adjustable load transmitter

 #107
15170517
2017-08-29

Systems and methods for wafer alignment