Patents-Review.com
ClassID:

177275 ⎘

G03F9/7096 - CPC Classification

Classification description:

Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography Arrangement, mounting, housing, environment, cleaning or maintenance of apparatus

Recent Application in this class:
#1
20260050227
2026-02-19

ON TOOL METROLOGY SCHEME FOR ADVANCED PACKAGING

 #2
20260016762
2026-01-15

DESIGN FOR MULTIPLE OFF-AXIS ILLUMINATION BEAMS FOR WAFER ALIGNMENT SENSOR

 #3
20250362471
2025-11-27

HOLDING APPARATUS, APPARATUS FOR EXPOSING SUBSTRATE, MEASUREMENT APPARATUS, METHOD FOR MANUFACTURING OPTICAL DEVICE, AND METHOD FOR MANUFACTURING PRODUCT

 #4
20250277750
2025-09-04

CONTAMINATION MEASUREMENT

 #5
20240377767
2024-11-14

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

 #6
20240329549
2024-10-03

EXPOSURE APPARATUS

 #7
20240219850
2024-07-04

CLAMPING APPLIANCE OF RETICLE INNER POD

 #8
20240060168
2024-02-22

METHOD OF MANUFACTURING MASK, MASK AND METHOD OF MANUFACTURING MASK APPARATUS

 #9
20240053688
2024-02-15

Invariable magnification multilevel optical device with telecentric converter

 #10
20220260933
2022-08-18

METHOD OF DETERMINING A MARK MEASUREMENT SEQUENCE, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS

 #11
20220179330
2022-06-09

Lithographic apparatus, metrology apparatus, optical system and method

 #12
20210318626
2021-10-14

Detection apparatus, lithography apparatus, article manufacturing method, and detection method

 #13
20210173295
2021-06-10

Reticle processing system

 #14
20210149317
2021-05-20

Method of operating semiconductor apparatus and semiconductor apparatus

 #15
20210072654
2021-03-11

High stability collimator assembly, lithographic apparatus, and method

 #16
20200356014
2020-11-12

MASK TRANSFER SYSTEM AND TRANSFER METHOD

 #17
20200150550
2020-05-14

Methods and apparatus for removing contamination from lithographic tool

 #18
20200057390
2020-02-20

Height sensor, lithographic apparatus and method for manufacturing devices

 #19
20200041916
2020-02-06

Lithographic apparatus and method

 #20
20190219927
2019-07-18

Athermalization of an alignment system

 #21
20190189499
2019-06-20

Reticle processing system

 #22
20190187575
2019-06-20

Alignment control in nanoimprint lithography based on real-time system identification

 #23
20190101838
2019-04-04

Methods and apparatus for removing contamination from lithographic tool

 #24
20190041761
2019-02-07

Lithographic apparatus and device manufacturing method

 #25
20180364582
2018-12-20

Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate

 #26
20180196352
2018-07-12

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

 #27
20180004098
2018-01-04

Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method

 #28
20180004097
2018-01-04

EXPOSURE APPARATUS, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #29
20170261864
2017-09-14

Lithographic apparatus and device manufacturing method

 #30
20170255108
2017-09-07

Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method

 #31
20160334713
2016-11-17

Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate

 #32
20160216612
2016-07-28

Exposure apparatus and method for producing device

 #33
20160161869
2016-06-09

System and method for attaching a mask to a mask holder

 #34
20160161868
2016-06-09

Coating apparatus, imprint apparatus, and method of manufacturing article

 #35
20160091801
2016-03-31

Exposure apparatus and device manufacturing method

 #36
20150321356
2015-11-12

Enclosure for a target processing machine

 #37
20150212435
2015-07-30

Lithographic apparatus and device manufacturing method

 #38
20150098073
2015-04-09

Lithography apparatus and device manufacturing method

 #39
20150025668
2015-01-22

Computational process control

 #40
20140362356
2014-12-11

Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method

 #41
20140293251
2014-10-02

Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method

 #42
20140096614
2014-04-10

Gas gauge compatible with vacuum environments

 #43
20140092374
2014-04-03

Exposure apparatus, exposure method, and method of manufacturing device

 #44
20130229638
2013-09-05

System and method for lithography patterning

 #45
20130128253
2013-05-23

Exposure apparatus using microlens array and optical member

 #46
20130082193
2013-04-04

Charged particle beam writing apparatus and charged particle beam writing method

 #47
20130057839
2013-03-07

Lithography system and manufacturing method of commodities

 #48
20120303151
2012-11-29

Computational process control

 #49
20120287412
2012-11-15

Exposure apparatus and device fabrication method

 #50
20120287411
2012-11-15

Lithography system for processing at least a part of a target

 #51
20120156504
2012-06-21

COATING MATERIAL COMPOSITION FOR LIQUID IMMERSION EXPOSURE APPARATUS, LAMINATE, METHOD FOR FORMING LAMINATE, AND LIQUID IMMERSION EXPOSURE APPARATUS

 #52
20110273686
2011-11-10

Exposure apparatus, exposure method, and method of manufacturing device

 #53
20110269077
2011-11-03

Method and apparatus for measurement and control of photomask to substrate alignment

 #54
20110263122
2011-10-27

Method for making a laminated chip and method for aligning a lithographic mask

 #55
20110222044
2011-09-15

Lithographic apparatus and device manufacturing method

 #56
20110205549
2011-08-25

Device and method for measuring lithography masks

 #57
20110199594
2011-08-18

Exposure apparatus and method for producing device

 #58
20110102754
2011-05-05

Exposure apparatus and device manufacturing method

 #59
20110058148
2011-03-10

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

 #60
20110013187
2011-01-20

Method and apparatus for measurement and control of photomask to substrate alignment

 #61
20110008719
2011-01-13

Method and apparatus for measurement and control of photomask to substrate alignment

 #62
20100309445
2010-12-09

Gas gauge compatible with vacuum environments

 #63
20100290022
2010-11-18

Enhancing alignment in lithographic apparatus device manufacture

 #64
20100176304
2010-07-15

INCIDENCE SURFACES AND OPTICAL WINDOWS THAT ARE SOLVOPHOBIC TO IMMERSION LIQUIDS

 #65
20100060869
2010-03-11

LITHOGRAPHIC APPARATUS AND ALIGNMENT METHOD

 #66
20100002208
2010-01-07

EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #67
20090311631
2009-12-17

Near-field exposure apparatus and near-field exposure method

 #68
20090268178
2009-10-29

Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method

 #69
20090237633
2009-09-24

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #70
20090123874
2009-05-14

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE

 #71
20090081813
2009-03-26

Method and apparatus for measurement and control of photomask to substrate alignment

 #72
20090061331
2009-03-05

Exposure method and apparatus, maintenance method, and device manufacturing method

 #73
20090051934
2009-02-26

Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus

 #74
20090040489
2009-02-12

Position sensor

 #75
20090002651
2009-01-01

Exposure apparatus and method

 #76
20080319569
2008-12-25

Lithographic projection apparatus and method for controlling a support structure

 #77
20080316460
2008-12-25

Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product

 #78
20080278703
2008-11-13

Immersion exposure apparatus and method of manufacturing a semiconductor device

 #79
20080246938
2008-10-09

Exposure apparatus and device manufacturing method

 #80
20080239256
2008-10-02

Exposure apparatus, exposing method, and device fabricating method

 #81
20080231825
2008-09-25

Exposure Apparatus and method for producing device

 #82
20080225250
2008-09-18

Exposure apparatus and method for producing device

 #83
20080225249
2008-09-18

Exposure apparatus and method for producing device

 #84
20080218711
2008-09-11

Lithographic apparatus and device manufacturing method

 #85
20080212047
2008-09-04

Exposure apparatus, exposing method, and device fabricating method

 #86
20080094641
2008-04-24

Position sensor

 #87
20080090312
2008-04-17

LITHOGRAPHY ALIGNMENT SYSTEM AND METHOD USING nDSE-BASED FEEDBACK CONTROL

 #88
20080084547
2008-04-10

Exposure apparatus and device manufacturing method

 #89
20080030733
2008-02-07

Mark position measuring method and apparatus

 #90
20080030696
2008-02-07

Exposure apparatus and method for producing device

 #91
20080030695
2008-02-07

Exposure apparatus and method for producing device

 #92
20080020303
2008-01-24

Alignment for contact lithography

 #93
20070247609
2007-10-25

Assembly of a reticle holder and a reticle

 #94
20070247600
2007-10-25

Exposure apparatus and method for producing device

 #95
20070229957
2007-10-04

Incidence surfaces and optical windows that are solvophobic to immersion liquids

 #96
20070188728
2007-08-16

Exposure apparatus

 #97
20070182948
2007-08-09

SEMICONDUCTOR EXPOSURE METHOD AND METHOD OF CONTROLLING SEMICONDUCTOR EXPOSURE APPARATUS

 #98
20070132968
2007-06-14

Exposure apparatus and method for producing device

 #99
20070076197
2007-04-05

EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #100
20070064210
2007-03-22

Exposure apparatus and method for producing device

 #101
20070035711
2007-02-15

Exposure apparatus and method for producing device

 #102
20070035708
2007-02-15

Exposure apparatus

 #103
20070030467
2007-02-08

Exposure apparatus, exposure method, and device fabricating method

 #104
20070007471
2007-01-11

Imaging optical system and exposure apparatus

 #105
20060250596
2006-11-09

Exposure apparatus and method for producing device

 #106
20060221319
2006-10-05

Exposure system and exposure method

 #107
20060214518
2006-09-28

Alignment stage apparatus

 #108
20060176459
2006-08-10

Off-axis levelling in lithographic projection apparatus

 #109
20060152699
2006-07-13

Exposure apparatus and method for producing device

 #110
20060139591
2006-06-29

Scanner apparatus with twin substrate stage, semiconductor photo equipment with the apparatus and method of manufacturing a semiconductor device using the equipment

 #111
20060077367
2006-04-13

Exposure apparatus and method for producing device

 #112
20060061746
2006-03-23

Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus

 #113
20060058972
2006-03-16

Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program

 #114
20060044538
2006-03-02

Alignment apparatus, exposure apparatus and device fabrication method

 #115
20060012893
2006-01-19

Objective, in particular a projection objective in microlithography

 #116
20060007416
2006-01-12

Exposure apparatus

 #117
20050264791
2005-12-01

Wafer handling method for use in lithography patterning

 #118
20050219489
2005-10-06

Exposure apparatus and method for producing device

 #119
20050219483
2005-10-06

Lithographic apparatus and device manufacturing method

 #120
20050219482
2005-10-06

Lithographic apparatus, device manufacturing method and device manufactured thereby

 #121
20050162626
2005-07-28

Lithographic alignment system

 #122
20050157281
2005-07-21

Off-axis levelling in lithographic projection apparatus

 #123
20050150862
2005-07-14

Workpiece alignment assembly

 #124
20050146693
2005-07-07

Exposure apparatus

 #125
20050140960
2005-06-30

Method and device for alignment of a substrate

 #126
20050093378
2005-05-05

Alignment stage apparatus

 #127
20050088638
2005-04-28

Off-axis leveling in lithographic projection apparatus

 #128
20050046845
2005-03-03

System and method of measurement, system and method of alignment, lithographic apparatus and method

 #129
20050030537
2005-02-10

Mark position measuring method and apparatus

 #130
16655164
2020-01-14

Methods and apparatus for removing contamination from lithographic tool