Patents-Review.com
ClassID:

206321 ⎘

H01J2237/024 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Details Moving components not otherwise provided for

Sub-classes:
Recent Application in this class:
#1
20260148928
2026-05-28

MOBILE RADIATION DETECTOR SYSTEM FOR ION IMPLANTERS

 #2
20260031305
2026-01-29

MID-RING EROSION COMPENSATION IN SUBSTRATE PROCESSING SYSTEMS

 #3
20250364226
2025-11-27

PLASMA PROCESSING APPARATUS

 #4
20250357076
2025-11-20

METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING

 #5
20250232945
2025-07-17

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #6
20250210321
2025-06-26

SUBSTRATE PROCESSING APPARATUS

 #7
20250104980
2025-03-27

SUBSTRATE PROCESSING APPARATUS AND A METHOD OF PROCESSING A SUBSTRATE USING THE SAME

 #8
20250079111
2025-03-06

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED ALIGNMENT AND METHOD FOR ALIGNING THE MULTI-BEAM PARTICLE MICROSCOPE, AND COMPUTER PROGRAM PRODUCT

 #9
20240331979
2024-10-03

Apparatus and Methods for Plasma Processing

 #10
20240274401
2024-08-15

SUBSTRATE POSITION MONITORING DEVICES

 #11
20240194446
2024-06-13

CHAMBER IMPEDANCE MANAGEMENT IN A PROCESSING CHAMBER

 #12
20240128044
2024-04-18

Apparatus of plural charged-particle beams

 #13
20240047184
2024-02-08

PLASMA PROCESSING APPARATUS

 #14
20240038486
2024-02-01

METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING

 #15
20230386696
2023-11-30

Vacuum chamber arrangement for charged particle beam generator

 #16
20230369025
2023-11-16

HIGH PRECISION EDGE RING CENTERING FOR SUBSTRATE PROCESSING SYSTEMS

 #17
20230326723
2023-10-12

HYBRID CHAMBER

 #18
20230317436
2023-10-05

SUBSTRATE PROCESSING APPARATUS

 #19
20230317402
2023-10-05

ELECTRON-OPTICAL ASSEMBLY COMPRISING ELECTROMAGNETIC SHIELDING

 #20
20230282441
2023-09-07

Apparatus of plural charged-particle beams

 #21
20230282439
2023-09-07

Semiconductor wafer

 #22
20230260754
2023-08-17

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

 #23
20230245861
2023-08-03

Plasma generating device and process executing apparatus including the same

 #24
20230241650
2023-08-03

GAS SUPPLY DEVICE, SYSTEM HAVING A GAS SUPPLY DEVICE, AND PARTICLE BEAM APPARATUS HAVING A GAS DELIVERY DEVICE OR THE SYSTEM

 #25
20230230817
2023-07-20

DEPOSITION METHOD AND DEPOSITION APPARATUS

 #26
20230207282
2023-06-29

PLASMA PROCESSING APPARATUS

 #27
20230207249
2023-06-29

Electron gun, electron gun component, electron beam applicator, and alignment method

 #28
20230162953
2023-05-25

MID-RING EROSION COMPENSATION IN SUBSTRATE PROCESSING SYSTEMS

 #29
20230142778
2023-05-11

Storage Cassette for Replaceable Parts for Plasma Processing Apparatus

 #30
20230135026
2023-05-04

SUBSTRATE PROCESSING APPARATUS

 #31
20230129976
2023-04-27

IGNITION CONTROLLING METHOD, FILM FORMING METHOD, AND FILM FORMING APPARATUS

 #32
20230048299
2023-02-16

Ion milling device

 #33
20220165551
2022-05-26

Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring

 #34
20210383941
2021-12-09

Vacuum chamber arrangement for charged particle beam generator

 #35
20210375577
2021-12-02

Collision avoidance for particle beam instruments

 #36
20210296075
2021-09-23

Method and device for implanting ions in wafers

 #37
20210233736
2021-07-29

Apparatus of plural charged-particle beams

 #38
20210020416
2021-01-21

PLASMA PROCESSING APPARATUS

 #39
20200335297
2020-10-22

Multi charged particle beam writing apparatus

 #40
20200273677
2020-08-27

Closure mechanism vacuum chamber isolation device and sub-system

 #41
20200203121
2020-06-25

OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS

 #42
20200194141
2020-06-18

Vacuum chamber arrangement for charged particle beam generator

 #43
20200168429
2020-05-28

Collision avoidance for particle beam instruments

 #44
20200152412
2020-05-14

Apparatus of plural charged-particle beams

 #45
20190355557
2019-11-21

Method for driving member and processing apparatus

 #46
20190304740
2019-10-03

Charged particle beam apparatus

 #47
20190267209
2019-08-29

Method and device for implanting ions in wafers

 #48
20190214218
2019-07-11

Aperture array alignment method and multi charged particle beam writing apparatus

 #49
20190189391
2019-06-20

Retractable detector

 #50
20190051487
2019-02-14

Optical system adjustment method of image acquisition apparatus

 #51
20180358211
2018-12-13

SUBSTRATE TREATING APPARATUS

 #52
20180350552
2018-12-06

Multi charged particle beam drawing apparatus and multi charged particle beam drawing method

 #53
20180286632
2018-10-04

Object preparation device and particle beam device having an object preparation device and method for operating the particle beam device

 #54
20180261422
2018-09-13

Scanning electron microscope

 #55
20180240640
2018-08-23

Electron source architecture for a scanning electron microscopy system

 #56
20180218878
2018-08-02

Enhanced FIB-SEM systems for large-volume 3D imaging

 #57
20180166253
2018-06-14

Image capture assembly and method for electron back scatter diffraction

 #58
20180166247
2018-06-14

Method and apparatus for alignment of optical and charged-particle beams in an electron microscope

 #59
20180138010
2018-05-17

Charged particle beam apparatus

 #60
20180130634
2018-05-10

Electron microscope and image acquisition method

 #61
20180012728
2018-01-11

Retractable detector

 #62
20170316914
2017-11-02

Stage mechanism

 #63
20170250055
2017-08-31

High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella

 #64
20170221674
2017-08-03

Vacuum chamber arrangement for charged particle beam generator

 #65
20170110285
2017-04-20

Charged particle beam apparatus

 #66
20170025243
2017-01-26

Apparatus of plural charged-particle beams

 #67
20160314938
2016-10-27

Plasma generating device comprising a rotating body

 #68
20160104596
2016-04-14

Aligning a featureless thin film in a TEM

 #69
20150371857
2015-12-24

Lower dose rate ion implantation using a wider ion beam

 #70
20150321356
2015-11-12

Enclosure for a target processing machine

 #71
20150228454
2015-08-13

High-energy ion implanter, beam collimator, and beam collimation method

 #72
20150136995
2015-05-21

Multi-electrode electron optics

 #73
20150130353
2015-05-14

Arc chamber with multiple cathodes for an ion source

 #74
20150076364
2015-03-19

Adjustable cathodoluminescence detection system and microscope employing such a system

 #75
20140352890
2014-12-04

Substrate processing apparatus

 #76
20140306119
2014-10-16

Beam monitoring device, method, and system

 #77
20140272179
2014-09-18

Apparatus and techniques for energetic neutral beam processing

 #78
20130140459
2013-06-06

SYSTEM AND METHOD FOR SAMPLE ANALYSIS BY THREE DIMENSIONAL CATHODOLUMINESCENCE

 #79
20130108799
2013-05-02

High-throughput ion implanter

 #80
20130087706
2013-04-11

Cathodoluminescence detector including inner and outer tubes sealed from a vacuum chamber of an associated particle beam system

 #81
20130075624
2013-03-28

Beam monitoring device, method, and system

 #82
20130068966
2013-03-21

Adjustable cathodoluminescence detection system and microscope employing such a system

 #83
20120326032
2012-12-27

Particle beam microscope

 #84
20120326030
2012-12-27

Particle Beam Microscope

 #85
20120302011
2012-11-29

Charging-free electron beam cure of dielectric material

 #86
20120273691
2012-11-01

Electro-optical element for multiple beam alignment

 #87
20120273679
2012-11-01

X-RAY ANALYSER

 #88
20120257720
2012-10-11

Charged particle beam analyzer and analysis method

 #89
20120241640
2012-09-27

Ion sources, systems and methods

 #90
20120231616
2012-09-13

Semiconductor structure made using improved multiple ion implantation process

 #91
20120129324
2012-05-24

Semiconductor structure made using improved multiple ion implantation process

 #92
20120112062
2012-05-10

Environmental cell for charged particle beam system

 #93
20120104274
2012-05-03

ION BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

 #94
20120080308
2012-04-05

PLUME STEERING

 #95
20120080056
2012-04-05

SYSTEM AND METHOD FOR REMOVING ORGANIC RESIDUE FROM A CHARGED PARTICLE BEAM SYSTEM

 #96
20120048723
2012-03-01

SPUTTER TARGET FEED SYSTEM

 #97
20110297827
2011-12-08

Charged particle beam device

 #98
20110291007
2011-12-01

Movable detector for charged particle beam inspection or review

 #99
20110220812
2011-09-15

Cleaning of an extraction aperture of an ion source

 #100
20110220144
2011-09-15

Cleaning of an extraction aperture of an ion source

 #101
20110089342
2011-04-21

Techniques for processing a substrate using a mask

 #102
20110052455
2011-03-03

Mobile type electron accelerator

 #103
20110012034
2011-01-20

Manufacturing method of semiconductor device, method for controlling ion beam, and ion implantation apparatus

 #104
20100327156
2010-12-30

Self-aligning floating ion-optics components

 #105
20100320395
2010-12-23

External cathode ion source

 #106
20100308236
2010-12-09

Masking apparatus for an ion implanter

 #107
20100282709
2010-11-11

SUBSTRATE PLASMA-PROCESSING APPARATUS

 #108
20100243167
2010-09-30

Substrate processing apparatus

 #109
20100181470
2010-07-22

Ion beam angle calibration and emittance measurement system for ribbon beams

 #110
20100084569
2010-04-08

Ion deposition apparatus having rotatable carousel for supporting a plurality of targets

 #111
20100044579
2010-02-25

APPARATUS

 #112
20090314962
2009-12-24

Method and apparatus for controlling beam current uniformity in an ion implanter

 #113
20090314951
2009-12-24

Ion source cleaning method and apparatus

 #114
20090242757
2009-10-01

Charged particle beam apparatus and method adjusting axis of aperture

 #115
20090218507
2009-09-03

Charged particle beam device

 #116
20090181534
2009-07-16

Charging-free electron beam cure of dielectric material

 #117
20090152462
2009-06-18

Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method

 #118
20090121122
2009-05-14

TECHNIQUES FOR MEASURING AND CONTROLLING ION BEAM ANGLE AND DENSITY UNIFORMITY

 #119
20090057558
2009-03-05

SCANNING ELECTRON MICROSCOPE

 #120
20090045339
2009-02-19

Charged particle beam equipment

 #121
20090014667
2009-01-15

External cathode ion source

 #122
20080203299
2008-08-28

Charged Particle Beam Apparatus

 #123
20080149857
2008-06-26

System and method for two-dimensional beam scan across a workpiece of an ion implanter

 #124
20080149856
2008-06-26

Techniques for reducing contamination during ion implantation

 #125
20080073569
2008-03-27

Mask position detection

 #126
20080067435
2008-03-20

Beam tuning with automatic magnet pole rotation for ion implanters

 #127
20070215047
2007-09-20

Vacuum device where power supply mechanism is mounted and power supply method

 #128
20070125956
2007-06-07

Particle-optical projection system

 #129
20060138353
2006-06-29

Ion-implanting apparatus, ion-implanting method, and device manufactured thereby

 #130
20060124867
2006-06-15

Method and apparatus for ion beam profiling

 #131
20060113470
2006-06-01

High resolution atom probe

 #132
20050201246
2005-09-15

Particle-optical projection system

 #133
20050199827
2005-09-15

Charged particle beam apparatus, charged particle beam control method, substrate inspection method and method of manufacturing semiconductor device

 #134
14458021
2015-11-24

Stationary actively-cooled shadow ring for heat dissipation in plasma chamber