Patents-Review.com
ClassID:

206322 ⎘

H01J2237/0245 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Details; Moving components not otherwise provided for Moving whole optical system relatively to object

Recent Application in this class:
#1
20240186107
2024-06-06

METHOD AND APPARATUS FOR INSPECTION

 #2
20230282443
2023-09-07

TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNING SUCH A TRANSMISSION CHARGED PARTICLE BEAM APPARATUS

 #3
20220125970
2022-04-28

UV STERILIZATION OF CONTAINER, ROOM, SPACE OR DEFINED ENVIRONMENT

 #4
20210375581
2021-12-02

Method and apparatus for inspection

 #5
20200319452
2020-10-08

Mirror device, mirror drive method, light irradiation device, and image acquisition device

 #6
20200230273
2020-07-23

UV sterilization of container, room, space or defined environment

 #7
20200188545
2020-06-18

UV sterilization of container, room, space or defined environment

 #8
20190121125
2019-04-25

Mirror device, mirror drive method, light irradiation device, and image acquisition device

 #9
20190033237
2019-01-31

Radiation analysis apparatus

 #10
20190006147
2019-01-03

Method and apparatus for inspection

 #11
20180197713
2018-07-12

Integrated circuit analysis systems and methods with localized evacuated volume for e-beam operation

 #12
20180012730
2018-01-11

Charged-particle beam exposure method and charged-particle beam correction method

 #13
20170330724
2017-11-16

Charged particle beam device

 #14
20170304473
2017-10-26

UV sterilization of container, room, space or defined environment

 #15
20160064185
2016-03-03

Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical

 #16
20150359915
2015-12-17

Portable UV devices, systems and methods of use and manufacturing

 #17
20150255248
2015-09-10

Methods, apparatuses, systems and software for treatment of a specimen by ion-milling

 #18
20150221468
2015-08-06

Scanning electron microscope

 #19
20150129763
2015-05-14

Charged particle beam device

 #20
20140356229
2014-12-04

UV devices, systems and methods for UV sterilization

 #21
20120085939
2012-04-12

Ion beam sample preparation apparatus and methods

 #22
20110210247
2011-09-01

Vacuumed device and a scanning electron microscope

 #23
20100012860
2010-01-21

Electron beam processing device

 #24
20090321634
2009-12-31

Multi-beam ion/electron spectra-microscope

 #25
20090098306
2009-04-16

Method and apparatus for surface processing of a substrate using an energetic particle beam

 #26
20080315096
2008-12-25

Portable electron microscope using micro-column

 #27
20080210866
2008-09-04

Motioning Equipment for Electron Column

 #28
20080185517
2008-08-07

Method and apparatus for in-situ sample preparation

 #29
20060231773
2006-10-19

Charged particle beam apparatus

 #30
20050205809
2005-09-22

Electron beam exposure apparatus

 #31
20050118065
2005-06-02

Apparatus and method for preparing samples

 #32
15185920
2017-08-22

Multi-beam electron microscope for electron channeling contrast imaging of semiconductor material