206325 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Details; Shields magnetic
MULTIPLE PARTICLE BEAM SYSTEM, IN PARTICULAR MULTI-BEAM PARTICLE MICROSCOPE, HAVING A FAST MAGNETIC LENS AND THE USE THEREOF
#2MAGNETIC SHIELDING OF THE PHOTOMULTIPLIER IN THE MAGNETIC IMMERSION FIELD
#3PROTECTING A DETECTOR WHILE DISCHARGING A REGION OF A SAMPLE
#4SAMPLE INSPECTION SYSTEM
#5A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE
#6APPARATUS AND METHOD FOR ANALYSING A SAMPLE BY MEANS OF ELECTRICALLY CHARGED PARTICLES
#7PLASMA UNIFORMITY CONTROL SYSTEM AND METHODS
#8ION MICROSCOPE
#9ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS
#10PLASMA PROCESSING APPARATUS
#11ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM
#12Magnetic-material shield around plasma chambers near pedestal
#13E-beam apparatus
#14ELECTRON BEAM INSPECTION TOOL AND METHOD FOR POSITIONING AN OBJECT TABLE
#15Electron beam inspection tool and method of controlling heat load
#16E-beam apparatus
#17Nozzle-type electron beam irradiation device, and electron beam sterilization equipment equipped with same
#18Aberration correction in charged particle system
#19High voltage shielding and cooling in a charged particle beam generator
#20Housing device for magnetic shielding, housing arrangement for magnetic shielding, charged particle beam device, and method of manufacturing a housing device
#21Nano-patterned system and magnetic-field applying device thereof
#22Conductive interface system between vacuum chambers in a charged particle beam device
#23Inspection apparatus
#24Top opening-closing mechanism and inspection apparatus
#25Modulation device and power supply arrangement
#26Charged particle lithography system and beam generator
#27Nano-patterned system and magnetic-field applying device thereof
#28DRIVING APPARATUS, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, METHOD OF MANUFACTURING DEVICE
#29Charged particle beam apparatus sample holder with magnetic field generating element and sample holding element
#30Inspection apparatus
#31System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope
#32Electron microscope
#33System for magnetic shielding
#34Vacuum deposition apparatus
#35Charged particle beam drawing apparatus and article manufacturing method
#36System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope
#37Linear motor, movable stage and electron microscope
#38Low-interference sensor head for a radiation detector, as well as a radiation detector which contains this low-interference sensor head
#39LINEAR MOTOR PAIR, MOVING STAGE AND ELECTRON MICROSCOPE
#40Charged particle filter
#41Support and positioning structure, semiconductor equipment system and method for positioning
#42CHARGED PARTICLE RADIATION APPARATUS
#43Electron beam apparatus and method for manufacturing semiconductor device
#44Focused ion beam apparatus and focused ion beam irradiation method