Sample Processing Apparatus and Sample Processing Method

METHOD AND APPARATUS FOR APPLYING PLASMA TO THE MID-FRAME OF AN ELECTRONIC DEVICE

SEMICONDUCTOR RADIOACTIVE WAFER DECAY SAFETY AND OPERATION SYSTEM

SEMICONDUCTOR ELECTRICAL INSULATOR WITH REDUCED ARCING

Shield for an Ion Implanter

RECOMBINATION CHANNELS FOR ANGLE CONTROL OF NEUTRAL REACTIVE SPECIES

ELECTRON-OPTICAL DEVICE

SHIELDED DETECTOR FOR CHARGED PARTICLE MICROSCOPY

Electronic Cleaning Device

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

Concentrated Solar Irradiation of Targets in Plasmas

PROCESSING KIT SHIELD

Apparatus for preventing contamination of self-plasma chamber

BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

Enhanced deposition rate by thermal isolation cover for GIS manipulator

BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

RECOMBINATION CHANNELS FOR ANGLE CONTROL OF NEUTRAL REACTIVE SPECIES

Ion Milling Device and Ion Milling Method

PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

PHOTOELECTRIC SURFACE ELECTRON SOURCE

Carrier with vertical grid for supporting substrates in coater

HOLDING DEVICE, AND USE OF THE HOLDING DEVICE

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

A DETECTOR SUBSTRATE FOR USE IN A CHARGED PARTICLE MULTI-BEAM ASSESSMENT TOOL

SYSTEM AND METHOD FOR ELECTRON CRYOMICROSCOPY

REPLACEABLE ELECTROSTATIC CHUCK OUTER RING FOR EDGE ARCING MITIGATION

To an inductively coupled plasma source

Method and apparatus for detecting discharge site

Specimen machining device and information provision method

Blanking aperture array unit

Carrier with vertical grid for supporting substrates in coater

PLASMA PROCESSING SYSTEM WITH FARADAY SHIELDING DEVICE

Sample holder, method for using sample holder, projection amount adjustment jig, projection amount adjustment method and charged particle beam device

Ion milling device and milling processing method using same

SINGLE-TURN AND LAMINATED-WALL INDUCTIVELY COUPLED PLASMA SOURCES

Electron detector

APPARATUS FOR OBTAINING OPTICAL MEASUREMENTS IN A CHARGED PARTICLE APPARATUS

GLASS PALLET FOR SPUTTERING SYSTEMS

Ion milling device and ion milling method

Ion milling device

Pulsed CFE electron source with fast blanker for ultrafast TEM applications

Aberration corrector and multiple electron beam irradiation apparatus

Carrier with vertical grid for supporting substrates in coater

Multi charged particle beam writing apparatus

PLASMA PROCESSING APPARATUS AND MAINTENANCE METHOD THEREOF

SINGLE-TURN AND LAMINATED-WALL INDUCTIVELY COUPLED PLASMA SOURCES

Apparatus for preventing contamination of self-plasma chamber

Feeding structure, upper electrode assembly, and physical vapor deposition chamber and device

Vacuum apparatus and recovery support method

Film-forming apparatus, film-forming system, and film-forming method

Plasma gun for treating tumors in vivo and use method thereof

METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGET LIFE

Accelerator system for mineral component analysis, system and method for mineral component analysis

Inductively coupled plasma source

Substrate processing apparatus

Sample holder, ion milling apparatus, sample processing method, sample observing method, and sample processing and observing method

High voltage power supply device and charged particle beam device

Ion milling apparatus and sample holder

High voltage shielding and cooling in a charged particle beam generator

Scanning electron microscope

Sputtering apparatus and processing apparatus

Temperature measuring mask and temperature measuring method

One-piece process kit shield for reducing the impact of an electric field near the substrate

At least partially balancing out thickness variations of a substrate

Light source apparatus

Anode Shield

Ion milling device

Glass pallet for sputtering systems

Methods and apparatus for maintaining low non-uniformity over target life

Apparatus with sidewall protection for features

Arc chamber with multiple cathodes for an ion source

Plasma processing apparatus for performing plasma process for target object

Method for manufacturing a TEM-lamella and assembly having a TEM-lamella protective structure

Internal split Faraday shield for a plasma source

Insulation structure and insulation method

Electron gun and charged particle beam device having an aperture with flare-suppressing coating

Internal Split Faraday Shield for an Inductively Coupled Plasma Source

Shielding member having a charge control electrode, and a charged particle beam apparatus

Plasma source for charged particle beam system

Ion beam sample preparation thermal management apparatus and methods

Ion beam sample preparation apparatus and methods

Specimen holder and specimen holder movement device

Apparatus and method for forming carbon protective layer

Systems And Methods For Scanning A Beam Of Charged Particles

Apparatus and method for multi-directionally scanning a beam of charged particles

Systems and methods for scanning a beam of charged particles

Thin film forming apparatus, thin film forming method, and shield component

ELECTRIC FIELD MODIFICATION ABOUT A CONDUCTIVE STRUCTURE

APPARATUS AND METHOD FOR FORMING CARBON PROTECTIVE LAYER

TECHNIQUES FOR TERMINAL INSULATION IN AN ION IMPLANTER

DETACHABLE INNER SHIELD

MOVING INTERLEAVED SPUTTER CHAMBER SHIELDS

Terminal structure of an ion implanter

Object-processing apparatus controlling production of particles in electric field or magnetic field

Ground shield with reentrant feature

Insulator system for a terminal structure of an ion implantation system

Specimen holding device and charged particle beam device

Charged beam dump and particle attractor

Particulate prevention in ion implantation

Beam stop and beam tuning methods

Ion beam system

Apparatus and method for investigating or modifying a surface with a beam of charged particles

Electron detection device and scanning electron microscope

Ion beam cutting calibration system and method

Three-dimensional (3D) imaging system and method for nanostructure