Patents-Review.com
ClassID:

206326 ⎘

H01J2237/0266 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Details; Shields electromagnetic

Recent Application in this class:
#1
20250385068
2025-12-18

BLACK BODY SURFACE GENERATION USING LASER MATERIAL PROCESSING

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20250266246
2025-08-21

PLASMA PROCESSING APPARATUS

 #3
20250226173
2025-07-10

A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE

 #4
20250079116
2025-03-06

In-Vacuum Rotatable RF Component

 #5
20240304426
2024-09-12

RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM

 #6
20240071730
2024-02-29

PLASMA PROCESSING APPARATUS

 #7
20230317402
2023-10-05

ELECTRON-OPTICAL ASSEMBLY COMPRISING ELECTROMAGNETIC SHIELDING

 #8
20230260764
2023-08-17

Radio frequency screen for an ultraviolet lamp system

 #9
20230109672
2023-04-13

APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING THE SAME, AND ARCING DIAGNOSIS METHOD

 #10
20230109124
2023-04-06

PARTICLE BEAM SYSTEM

 #11
20220110230
2022-04-07

Showerhead shroud

 #12
20220093372
2022-03-24

SHOWERHEAD SHROUD

 #13
20220020573
2022-01-20

Radio frequency screen for an ultraviolet lamp system

 #14
20220020571
2022-01-20

TEMPERATURE SENSOR AND PLASMA PROCESSING APPARATUS

 #15
20220001452
2022-01-06

Apparatus and method for forming a three-dimensional article

 #16
20210202213
2021-07-01

Substrate processing apparatus, method of manufacturing semiconductor device, and plasma generator

 #17
20210104384
2021-04-08

Integrated electrode and ground plane for a substrate support

 #18
20200321198
2020-10-08

Lower electrode mechanism and reaction chamber

 #19
20200203117
2020-06-25

Electron beam inspection tool and method of controlling heat load

 #20
20190341230
2019-11-07

CERAMIC LINER WITH INTEGRATED FARADAY SHIELDING

 #21
20190164729
2019-05-30

Ferrite cage RF isolator for power circuitry

 #22
20190148119
2019-05-16

PLASMA PROCESSING APPARATUS

 #23
20180261433
2018-09-13

Elementary device for producing a plasma, having a coaxial applicator

 #24
20180228009
2018-08-09

XRF analyzer with separate source and detector heat sinks

 #25
20180218885
2018-08-02

Wafer support

 #26
20170372878
2017-12-28

Plasma processing apparatus and operational method thereof

 #27
20170299529
2017-10-19

XRF analyzer with a hand shield

 #28
20160133433
2016-05-12

Conductive interface system between vacuum chambers in a charged particle beam device

 #29
20150308968
2015-10-29

XRF analyzer

 #30
20150021294
2015-01-22

Plasma processing apparatus and operational method thereof

 #31
20140367687
2014-12-18

Small-scale fabrication systems and methods

 #32
20140291554
2014-10-02

Source bushing shielding

 #33
20140210337
2014-07-31

ANTENNA FOR PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING DEVICE USING THE SAME

 #34
20140124667
2014-05-08

System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope

 #35
20130094008
2013-04-18

Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device

 #36
20130001419
2013-01-03

System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope

 #37
20120305763
2012-12-06

System and method for compensating for magnetic noise

 #38
20110240876
2011-10-06

Apparatus for controlling the temperature of an RF ion source window

 #39
20090139658
2009-06-04

PLASMA PROCESSING APPARATUS

 #40
20080308731
2008-12-18

Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder

 #41
20070085029
2007-04-19

DC only tool cell with a charged particle beam system