Patents-Review.com
ClassID:

206335 ⎘

H01J2237/043 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge Beam blanking

Sub-classes:
Recent Application in this class:
#1
20210175046
2021-06-10

Beam blanking device for a multi-beamlet charged particle beam apparatus

 #2
20210090846
2021-03-25

Pulsed CFE electron source with fast blanker for ultrafast TEM applications

 #3
20210043410
2021-02-11

Coating on dielectric insert of a resonant RF cavity

 #4
20200027687
2020-01-23

Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device

 #5
20190378688
2019-12-12

Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus

 #6
20190311882
2019-10-10

Studying dynamic specimens in a transmission charged particle microscope

 #7
20190096630
2019-03-28

DEVICE AND METHOD FOR GENERATING CHARGED PARTICLE BEAM PULSES

 #8
20190051490
2019-02-14

Charged particle beam device with distance setting between irradiation regions in a scan line

 #9
20190035603
2019-01-31

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #10
20190027338
2019-01-24

Sample holding mechanism, manufacturing method for same, and charged particle beam device

 #11
20180040453
2018-02-08

Multi charged particle beam writing apparatus and method of adjusting the same

 #12
20160343535
2016-11-24

Charged particle beam drawing apparatus and charged particle beam drawing method

 #13
20160336141
2016-11-17

Charged particle beam writing apparatus and charged particle beam writing method

 #14
20160314934
2016-10-27

Exposure apparatus and exposure method

 #15
20160225583
2016-08-04

Charged particle beam device and charged particle beam measurement method

 #16
20160189925
2016-06-30

Apparatus and method for processing substrate using ion beam

 #17
20160155600
2016-06-02

Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams

 #18
20160086768
2016-03-24

Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system

 #19
20160064179
2016-03-03

Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle

 #20
20160013019
2016-01-14

Compensation of imaging deviations in a particle-beam writer using a convolution kernel

 #21
20160012170
2016-01-14

Customizing a particle-beam writer using a convolution kernel

 #22
20160011110
2016-01-14

System for electron beam detection

 #23
20150380213
2015-12-31

Apparatus and method for calculating drawing speeds of a charged particle beam

 #24
20150340196
2015-11-26

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

 #25
20150318139
2015-11-05

TARGET DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

 #26
20150303026
2015-10-22

Electron beam writing apparatus, and method for adjusting convergence half angle of electron beam

 #27
20150303025
2015-10-22

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE

 #28
20150255249
2015-09-10

Multi charged particle beam writing apparatus

 #29
20150243481
2015-08-27

Proximity effect correction in a charged particle lithography system

 #30
20150144801
2015-05-28

PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME

 #31
20150129763
2015-05-14

Charged particle beam device

 #32
20150044615
2015-02-12

DRAWING DATA GENERATING METHOD, PROCESSING APPARATUS, STORAGE MEDIUM, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

 #33
20140147998
2014-05-29

Ion implantation at high temperature surface equilibrium conditions

 #34
20130300286
2013-11-14

Method and apparatus for generating electron beams

 #35
20130256553
2013-10-03

Automated ion beam idle

 #36
20130112890
2013-05-09

Charged particle energy filter

 #37
20130082188
2013-04-04

Particle beam system and method for operating the same

 #38
20130068959
2013-03-21

Charged particle beam drawing apparatus and method of manufacturing article

 #39
20120256085
2012-10-11

Method of protecting a radiation detector in a charged particle instrument

 #40
20120145535
2012-06-14

Apparatus and method for processing substrate using ion beam

 #41
20120126138
2012-05-24

Charged particle beam drawing apparatus and article manufacturing method using same

 #42
20110315876
2011-12-29

Blocking member for use in the diffraction plane of a TEM

 #43
20110226949
2011-09-22

Inspection system

 #44
20110139605
2011-06-16

Ion beam source

 #45
20100237261
2010-09-23

Charged particle beam writing apparatus

 #46
20100163727
2010-07-01

Methods of operating a nanoprober to electrically probe a device structure of an integrated circuit

 #47
20100102254
2010-04-29

ELECTRON BEAM APPARATUS

 #48
20100025579
2010-02-04

Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy

 #49
20090057577
2009-03-05

Optics for generation of high current density patterned charged particle beams

 #50
20090008579
2009-01-08

ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED BEAM-DEFINING APERTURE

 #51
20080272300
2008-11-06

Charged particle beam apparatus

 #52
20080122462
2008-05-29

Method of inspecting pattern and inspecting instrument

 #53
20080078955
2008-04-03

Methods for rapidly switching off an ion beam

 #54
20080067403
2008-03-20

Charged particle beam exposure apparatus

 #55
20080067402
2008-03-20

Charged particle beam exposure apparatus

 #56
20060163498
2006-07-27

Semiconductor device manufacturing method and ion implanter used therein

 #57
20060145097
2006-07-06

Optics for generation of high current density patterned charged particle beams

 #58
20060108542
2006-05-25

Electron beam exposure method and electron beam exposure apparatus

 #59
20060060783
2006-03-23

Scanning particle beam instrument

 #60
20060038137
2006-02-23

Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same

 #61
20050250224
2005-11-10

Method of inspecting pattern and inspecting instrument

 #62
16037815
2019-11-19

Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device