206355 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge; Focusing means; Lens systems electromagnetic
ION STRIPPING APPARATUS WITH INTEGRATED QUADRUPOLES
#2ABERRATION CORRECTION IN CHARGED PARTICLE SPECTROSCOPY
#3MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND ADJUSTING METHOD THEREOF
#4ELECTRON BEAM DEVICE FOR SURFACE TREATMENT
#5MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM TUBE
#6DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING AND/OR IMAGING A SAMPLE
#7MINIATURE HYBRID ELECTRON BEAM COLUMN
#8Apparatus of charged-particle beam such as electron microscope comprising co-condensers for continuous image resolution tuning
#9DUAL BEAM BIFOCAL CHARGED PARTICLE MICROSCOPE
#10MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS OF OPERATING THE SAME
#11Method of controlling transmission electron microscope and transmission electron microscope
#12Objective lens arrangement usable in particle-optical systems
#13Interference optical system unit, charged particle beam interference apparatus, and method for observing charged particle beam interference image
#14Charged particle beam system, opto-electro simultaneous detection system and method
#15CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND METHOD FOR REDUCING ELECTRIFICATION OF SUBSTRATE
#16Charged particle beam writing method and charged particle beam writing apparatus
#17Objective lens and transmission electron microscope
#18Objective lens arrangement usable in particle-optical systems
#19Charged particle beam irradiation apparatus
#20SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND MEASUREMENT METHOD USING THE SAME
#21Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip
#22Charged particle inspection method and charged particle system
#23Charged particle beam device
#24Combined multipole magnet and dipole scanning magnet
#25Charged particle beam apparatus
#26Apparatus of plural charged particle beams with multi-axis magnetic lens
#27Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
#28Charged Particle Inspection Method and Charged Particle System
#29Particle-Optical Component
#30Charged particle-optical systems, methods and components
#31Ion implantation with a collimator magnet and a neutral filter magnet
#32Ion implantation apparatus and method for implanting ions by using the same
#33Scanning transmission electron microscope and electron energy loss spectroscopy