ClassID:

206355

H01J2237/04922 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge; Focusing means; Lens systems electromagnetic

Recent Application in this class:
#1
20260038763
2026-02-05

ION STRIPPING APPARATUS WITH INTEGRATED QUADRUPOLES

#2
20250391629
2025-12-25

ABERRATION CORRECTION IN CHARGED PARTICLE SPECTROSCOPY

#3
20250323010
2025-10-16

MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND ADJUSTING METHOD THEREOF

#4
20250323006
2025-10-16

ELECTRON BEAM DEVICE FOR SURFACE TREATMENT

#5
20250218719
2025-07-03

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM TUBE

#6
20250125118
2025-04-17

DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING AND/OR IMAGING A SAMPLE

#7
20230326704
2023-10-12

MINIATURE HYBRID ELECTRON BEAM COLUMN

#8
20220108865
2022-04-07

Apparatus of charged-particle beam such as electron microscope comprising co-condensers for continuous image resolution tuning

#9
20210305007
2021-09-30

DUAL BEAM BIFOCAL CHARGED PARTICLE MICROSCOPE

#10
20200381212
2020-12-03

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS OF OPERATING THE SAME

#11
20200312612
2020-10-01

Method of controlling transmission electron microscope and transmission electron microscope

#12
20200243296
2020-07-30

Objective lens arrangement usable in particle-optical systems

#13
20190295816
2019-09-26

Interference optical system unit, charged particle beam interference apparatus, and method for observing charged particle beam interference image

#14
20190287760
2019-09-19

Charged particle beam system, opto-electro simultaneous detection system and method

#15
20190096632
2019-03-28

CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND METHOD FOR REDUCING ELECTRIFICATION OF SUBSTRATE

#16
20180342366
2018-11-29

Charged particle beam writing method and charged particle beam writing apparatus

#17
20180130633
2018-05-10

Objective lens and transmission electron microscope

#18
20170294287
2017-10-12

Objective lens arrangement usable in particle-optical systems

#19
20170229281
2017-08-10

Charged particle beam irradiation apparatus

#20
20160268098
2016-09-15

SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND MEASUREMENT METHOD USING THE SAME

#21
20160247658
2016-08-25

Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip

#22
20160240344
2016-08-18

Charged particle inspection method and charged particle system

#23
20160217967
2016-07-28

Charged particle beam device

#24
20160189913
2016-06-30

Combined multipole magnet and dipole scanning magnet

#25
20150228443
2015-08-13

Charged particle beam apparatus

#26
20150060662
2015-03-05

Apparatus of plural charged particle beams with multi-axis magnetic lens

#27
20120037813
2012-02-16

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

#28
20090256075
2009-10-15

Charged Particle Inspection Method and Charged Particle System

#29
20090159810
2009-06-25

Particle-Optical Component

#30
20090114818
2009-05-07

Charged particle-optical systems, methods and components

#31
20080149845
2008-06-26

Ion implantation with a collimator magnet and a neutral filter magnet

#32
20060022149
2006-02-02

Ion implantation apparatus and method for implanting ions by using the same

#33
20050285037
2005-12-29

Scanning transmission electron microscope and electron energy loss spectroscopy