Patents-Review.com
ClassID:

206354 ⎘

H01J2237/0492 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge; Focusing means Lens systems

Sub-classes:
Recent Application in this class:
#1
20260045438
2026-02-12

APPARATUS AND METHOD FOR IMPROVED ELECTRON MULTI-BEAM INSPECTION

 #2
20260018376
2026-01-15

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #3
20250266237
2025-08-21

REFLECTANCE CONFOCAL SCANNING ELECTRON MICROSCOPE AND OPERATING METHOD THEREOF

 #4
20250232945
2025-07-17

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #5
20250112016
2025-04-03

ABERRATION CORRECTION SYSTEMS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME

 #6
20240128044
2024-04-18

Apparatus of plural charged-particle beams

 #7
20240017301
2024-01-18

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

 #8
20240014003
2024-01-11

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #9
20230395349
2023-12-07

Creating multiple electron beams with a photocathode film

 #10
20230343549
2023-10-26

Charged Particle Beam Device and Specimen Observation Method

 #11
20230282442
2023-09-07

Gas reservoir, gas feed device having a gas reservoir, and particle beam apparatus having a gas feed device

 #12
20230282441
2023-09-07

Apparatus of plural charged-particle beams

 #13
20230230801
2023-07-20

Focused Ion Beam System and Method of Correcting Deviation of Field of View of Ion Beam

 #14
20230104558
2023-04-06

Bandpass charged particle energy filtering detector for charged particle tools

 #15
20220246395
2022-08-04

Apparatus for multiple charged-particle beams

 #16
20210384008
2021-12-09

Apparatus of plural charged-particle beams

 #17
20210366683
2021-11-25

Charged particle beam device and method for inspecting and/or imaging a sample

 #18
20210287887
2021-09-16

PLASMA MEASURING APPARATUS AND PLASMA MEASURING METHOD

 #19
20210237129
2021-08-05

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

 #20
20210233736
2021-07-29

Apparatus of plural charged-particle beams

 #21
20210125807
2021-04-29

System and method for alignment of cathodoluminescence optics

 #22
20210066021
2021-03-04

Multi-pole deflector for charged particle beam and charged particle beam imaging apparatus

 #23
20200373116
2020-11-26

Multi-beam particle microscope

 #24
20200230665
2020-07-23

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

 #25
20200152421
2020-05-14

Apparatus of plural charged-particle beams

 #26
20200152418
2020-05-14

Screening method and apparatus for detecting an object of interest

 #27
20200152412
2020-05-14

Apparatus of plural charged-particle beams

 #28
20200051779
2020-02-13

Apparatus for multiple charged-particle beams

 #29
20190096629
2019-03-28

A CORRECTOR STRUCTURE AND A METHOD FOR CORRECTING ABERRATION OF AN ANNULAR FOCUSED CHARGED-PARTICLE BEAM

 #30
20190088447
2019-03-21

Measurement method and electron microscope

 #31
20190080877
2019-03-14

Charged particle beam writing apparatus and method for diagnosing failure of blanking circuit

 #32
20190019648
2019-01-17

Plasmon-excited electron beam array for complementary patterning

 #33
20180366297
2018-12-20

Data processing method, charged particle beam writing apparatus, and charged particle beam writing system

 #34
20180358203
2018-12-13

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PARTICLE BEAM ADJUSTING METHOD

 #35
20180350555
2018-12-06

Apparatus of plural charged-particle beams

 #36
20180269030
2018-09-20

Scanning transmission electron microscope with an objective electromagnetic lens and a method of use thereof

 #37
20180236505
2018-08-23

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

 #38
20180226220
2018-08-09

CONTINUOUSLY VARIABLE APERTURE

 #39
20180158642
2018-06-07

Method for inspecting a specimen and charged particle multi-beam device

 #40
20180040454
2018-02-08

Particle beam system and method for operating a particle optical unit

 #41
20170271127
2017-09-21

Ion implantation apparatus and measurement device

 #42
20170200581
2017-07-13

Heat-spreading blanking system for high throughput electron beam apparatus

 #43
20170140898
2017-05-18

Ion generator and method of controlling ion generator

 #44
20170025243
2017-01-26

Apparatus of plural charged-particle beams

 #45
20170025241
2017-01-26

Apparatus of plural charged-particle beams

 #46
20160358743
2016-12-08

Plasmon-excited electron beam array for complementary patterning

 #47
20160307726
2016-10-20

Inspection device

 #48
20160225579
2016-08-04

Particle beam microscope and method for operating a particle beam microscope

 #49
20160155603
2016-06-02

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

 #50
20150380204
2015-12-31

Imaging and processing for plasma ion source

 #51
20150357157
2015-12-10

Particle beam system and method for operating a particle optical unit

 #52
20150340201
2015-11-26

Apparatus and method of applying small-angle electron scattering to characterize nanostructures on opaque substrate

 #53
20150340195
2015-11-26

Pillar-supported array of micro electron lenses

 #54
20150255249
2015-09-10

Multi charged particle beam writing apparatus

 #55
20150228455
2015-08-13

Charged particle beam writing apparatus, and charged particle beam writing method

 #56
20150136980
2015-05-21

Image acquisition method and transmission electron microscope

 #57
20150136979
2015-05-21

Charged particle beam device

 #58
20150136978
2015-05-21

Focused ion beam system and method of making focal adjustment of ion beam

 #59
20150008322
2015-01-08

Scanning electron microscope

 #60
20140145089
2014-05-29

Apparatus having a magnetic lens configured to diverge an electron beam

 #61
20140138542
2014-05-22

Scanning electron microscope and scanning transmission electron microscope

 #62
20130206987
2013-08-15

Transmission electron microscope

 #63
20120235036
2012-09-20

Inspection device

 #64
20120145916
2012-06-14

Projection lens arrangement

 #65
20120138791
2012-06-07

Electron beam column and methods of using same

 #66
20120126697
2012-05-24

Crossover point regulation method for electro-static focusing systems

 #67
20120091358
2012-04-19

Projection lens arrangement

 #68
20120091318
2012-04-19

Beamlet blanker arrangement

 #69
20120049062
2012-03-01

Phase contrast electron microscope

 #70
20110210249
2011-09-01

Transmission electron microscope

 #71
20110095182
2011-04-28

Electron microscope with electron spectrometer

 #72
20110089321
2011-04-21

Ion beam apparatus and method employing magnetic scanning

 #73
20110079730
2011-04-07

Imaging system

 #74
20110068675
2011-03-24

Multiple device shaping uniform distribution of current density in electro-static focusing systems

 #75
20110049361
2011-03-03

Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus

 #76
20100277053
2010-11-04

Multiple device shaping uniform distribution of current density in electro-static focusing systems

 #77
20100258738
2010-10-14

Device for deflecting or guiding in a particle beam

 #78
20100200766
2010-08-12

ELECTRON EMITTER HAVING NANO-STRUCTURE TIP AND ELECTRON COLUMN USING THE SAME

 #79
20100187433
2010-07-29

IMPROVED PARTICLE BEAM GENERATOR

 #80
20100181481
2010-07-22

Phase contrast electron microscope

 #81
20100148087
2010-06-17

Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns

 #82
20090321630
2009-12-31

Post-decel magnetic energy filter for ion implantation systems

 #83
20090261248
2009-10-22

Ion beam apparatus and method employing magnetic scanning

 #84
20090256081
2009-10-15

Focused ion beam apparatus

 #85
20090206272
2009-08-20

Variable-ratio double-deflection beam blanker

 #86
20090206270
2009-08-20

Ion beam apparatus and method for ion implantation

 #87
20090206256
2009-08-20

Electron beam device

 #88
20090166558
2009-07-02

Phase Contrast Electron Microscope Device

 #89
20090146074
2009-06-11

High resolution gas field ion column with reduced sample load

 #90
20090108200
2009-04-30

Method and system of performing three-dimensional imaging using an electron microscope

 #91
20090045340
2009-02-19

Electron microscope with electron spectrometer

 #92
20080210887
2008-09-04

Charged particle system

 #93
20080203881
2008-08-28

Micro-column with simple structure

 #94
20080203300
2008-08-28

Scanning Electron Microscope

 #95
20080149831
2008-06-26

Apparatus for detecting backscattered electrons in a beam apparatus

 #96
20080048117
2008-02-28

Scanning electron microscope

 #97
20080017797
2008-01-24

PATTERN INSPECTION AND MEASUREMENT APPARATUS

 #98
20070284528
2007-12-13

Phase contrast electron microscope

 #99
20070176122
2007-08-02

Architecture for ribbon ion beam ion implanter system

 #100
20060192120
2006-08-31

Charged-particle-beam mapping projection-optical systems and methods for adjusting same

 #101
20060145087
2006-07-06

Apparatus and method for inspection and testing of flat panel display substrates

 #102
20060131698
2006-06-22

Wafer-scale microcolumn array using low temperature co-fired ceramic substrate

 #103
20060113493
2006-06-01

Irradiation system ion beam and method to enhance accuracy of irradiation

 #104
20060113470
2006-06-01

High resolution atom probe

 #105
20060113466
2006-06-01

Irradiation system with ion beam

 #106
20060113465
2006-06-01

Method to increase low-energy beam current in irradiation system with ion beam

 #107
20060102838
2006-05-18

Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method

 #108
20060097167
2006-05-11

System and method for improving spatial resolution of electron holography

 #109
20060054817
2006-03-16

Dual detector optics for simultaneous collection of secondary and backscattered electrons

 #110
20050199822
2005-09-15

MEMS based charged particle deflector design

 #111
20050199821
2005-09-15

Compact microcolumn for automated assembly

 #112
20050161621
2005-07-28

Charged particle beamlet exposure system

 #113
20050051724
2005-03-10

Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method