Patents-Review.com
ClassID:

206356 ⎘

H01J2237/04924 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge; Focusing means; Lens systems electrostatic

Recent Application in this class:
#1
20260038763
2026-02-05

ION STRIPPING APPARATUS WITH INTEGRATED QUADRUPOLES

 #2
20260018376
2026-01-15

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #3
20250125139
2025-04-17

APPARATUS FOR REMOVING STATIC ELECTRICITY OF SEMICONDUCTOR SUBSTRATE

 #4
20250112023
2025-04-03

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #5
20250112017
2025-04-03

IMAGING THOUSANDS OF ELECTRON BEAMS DURING WORKPIECE INSPECTION

 #6
20240014003
2024-01-11

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #7
20230298845
2023-09-21

Energy Filter, and Energy Analyzer and Charged Particle Beam Device Provided with Same

 #8
20230245849
2023-08-03

OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OPTICAL SYSTEM ARRAY, METHOD OF FOCUSING, OBJECTIVE LENS ARRANGEMENT

 #9
20230037583
2023-02-09

APERTURE ASSEMBLY, BEAM MANIPULATOR UNIT, METHOD OF MANIPULATING CHARGED PARTICLE BEAMS, AND CHARGED PARTICLE PROJECTION APPARATUS

 #10
20220223386
2022-07-14

CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS DEVICE

 #11
20220148851
2022-05-12

Apparatus of plural charged-particle beams

 #12
20210384008
2021-12-09

Apparatus of plural charged-particle beams

 #13
20210210303
2021-07-08

Particle beam system for adjusting the current of individual particle beams

 #14
20210118645
2021-04-22

Charged particle beam apparatus, composite charged particle beam apparatus, and control method for charged particle beam apparatus

 #15
20210005423
2021-01-07

Charged particle beam system and method

 #16
20210005421
2021-01-07

Conductive beam optic containing internal heating element

 #17
20200388464
2020-12-10

Apparatus of plural charged-particle beams

 #18
20200161098
2020-05-21

Circuits for edge ring control in shaped DC pulsed plasma process device

 #19
20200152421
2020-05-14

Apparatus of plural charged-particle beams

 #20
20190259573
2019-08-22

Apparatus of plural charged-particle beams

 #21
20190057837
2019-02-21

Apparatus of plural charged-particle beams

 #22
20180350555
2018-12-06

Apparatus of plural charged-particle beams

 #23
20180342366
2018-11-29

Charged particle beam writing method and charged particle beam writing apparatus

 #24
20170309449
2017-10-26

Apparatus of plural charged-particle beams

 #25
20170025241
2017-01-26

Apparatus of plural charged-particle beams

 #26
20160268096
2016-09-15

Apparatus of plural charged-particle beams

 #27
20160247659
2016-08-25

Electrostatic quadrupole deflector for microcolumn

 #28
20160247658
2016-08-25

Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip

 #29
20160240344
2016-08-18

Charged particle inspection method and charged particle system

 #30
20160042915
2016-02-11

Ion implanter, ion implantation method, and beam measurement apparatus

 #31
20150044615
2015-02-12

DRAWING DATA GENERATING METHOD, PROCESSING APPARATUS, STORAGE MEDIUM, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

 #32
20140151570
2014-06-05

Charged particle beam lens and exposure apparatus using the same

 #33
20130327952
2013-12-12

Focused charged particle column for operation at different beam energies at a target

 #34
20130248732
2013-09-26

Ion beam apparatus

 #35
20120305798
2012-12-06

Charged particle multi-beam apparatus including a manipulator device for manipulation of one or more charged particle beams

 #36
20120295203
2012-11-22

Drawing apparatus and method of manufacturing article

 #37
20120295202
2012-11-22

Drawing apparatus and method of manufacturing article

 #38
20120211677
2012-08-23

Multiple beam charged particle optical system

 #39
20120178025
2012-07-12

Charged particle beam drawing apparatus and article manufacturing method

 #40
20120001086
2012-01-05

Charged particle beam apparatus and sample processing method

 #41
20110297841
2011-12-08

Generalized Focusing And Deflection Utilizing Deformed Conducting Electrodes

 #42
20110216299
2011-09-08

Electrostatic lens structure

 #43
20110168910
2011-07-14

Multiple beam charged particle optical system

 #44
20110163244
2011-07-07

Multiple beam charged particle optical system

 #45
20110084220
2011-04-14

Enhanced integrity projection lens assembly

 #46
20110068276
2011-03-24

Multiple beam charged particle optical system

 #47
20100187436
2010-07-29

High resolution gas field ion column

 #48
20090256082
2009-10-15

Ion implanting apparatus

 #49
20090256075
2009-10-15

Charged Particle Inspection Method and Charged Particle System

 #50
20090114818
2009-05-07

Charged particle-optical systems, methods and components

 #51
20080315096
2008-12-25

Portable electron microscope using micro-column

 #52
20080210866
2008-09-04

Motioning Equipment for Electron Column

 #53
20080121820
2008-05-29

Projection electronic microscope for reducing geometric aberration and space charge effect

 #54
20080023643
2008-01-31

Multiple beam charged particle optical system

 #55
20080017797
2008-01-24

PATTERN INSPECTION AND MEASUREMENT APPARATUS

 #56
20070145267
2007-06-28

Portable scanning electron microscope

 #57
20070145266
2007-06-28

Electron microscope apparatus using CRT-type optics

 #58
20050279952
2005-12-22

Focused ion beam apparatus

 #59
20050045835
2005-03-03

Unipolar electrostatic quadrupole lens and switching methods for charged beam transport

 #60
17022078
2021-11-16

Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangement

 #61
15938732
2019-07-23

Beam combiner