Patents-Review.com
ClassID:

206357 ⎘

H01J2237/04926 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge; Focusing means; Lens systems combined

Recent Application in this class:
#1
20260018376
2026-01-15

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #2
20250379024
2025-12-11

LENS ARRANGEMENT IN AN ELECTRON MICROSCOPY SYSTEM

 #3
20240347316
2024-10-17

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING THE NUMERICAL APERTURE, ASSOCIATED COMPUTER PROGRAM PRODUCT AND MULTIPLE PARTICLE BEAM SYSTEM

 #4
20240242921
2024-07-18

CHARGED PARTICLE APPARATUS AND METHOD

 #5
20240014003
2024-01-11

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #6
20230290609
2023-09-14

OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OPTICAL SYSTEM ARRAY, METHOD OF FOCUSING

 #7
20230154723
2023-05-18

Systems and methods for real time stereo imaging using multiple electron beams

 #8
20220139665
2022-05-05

Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams

 #9
20220130640
2022-04-28

Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system

 #10
20210384008
2021-12-09

Apparatus of plural charged-particle beams

 #11
20200251305
2020-08-06

CHARGED PARTICLE BEAM APPARATUS

 #12
20200243296
2020-07-30

Objective lens arrangement usable in particle-optical systems

 #13
20200211810
2020-07-02

APPARATUS FOR GENERATING A MULTIPLICITY OF PARTICLE BEAMS, AND MULTI-BEAM PARTICLE BEAM SYSTEMS

 #14
20200152421
2020-05-14

Apparatus of plural charged-particle beams

 #15
20190378676
2019-12-12

Deflector for multiple electron beams and multiple beam image acquiring apparatus

 #16
20190198292
2019-06-27

Ion beam quality control using a movable mass resolving device

 #17
20180350555
2018-12-06

Apparatus of plural charged-particle beams

 #18
20170294287
2017-10-12

Objective lens arrangement usable in particle-optical systems

 #19
20170025241
2017-01-26

Apparatus of plural charged-particle beams

 #20
20160240344
2016-08-18

Charged particle inspection method and charged particle system

 #21
20160181054
2016-06-23

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

 #22
20150371820
2015-12-24

Charged particle beam apparatus

 #23
20150340201
2015-11-26

Apparatus and method of applying small-angle electron scattering to characterize nanostructures on opaque substrate

 #24
20150155133
2015-06-04

Charged particle beam apparatus

 #25
20150083912
2015-03-26

Charged particle beam apparatus

 #26
20140291510
2014-10-02

Charged particle beam apparatus

 #27
20140097341
2014-04-10

In-column detector for particle-optical column

 #28
20130264477
2013-10-10

Particle-beam column corrected for both chromatic and spherical aberration

 #29
20120273677
2012-11-01

IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN

 #30
20120241606
2012-09-27

Multiple-beam system for high-speed electron-beam inspection

 #31
20090256075
2009-10-15

Charged Particle Inspection Method and Charged Particle System

 #32
20090159810
2009-06-25

Particle-Optical Component

 #33
20090114818
2009-05-07

Charged particle-optical systems, methods and components

 #34
20090057571
2009-03-05

Charged-particle beam lithography apparatus and device manufacturing method