206358 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge; Focusing means; Lens systems Telecentric systems
FIELD CURVATURE CORRECTOR FOR USE IN MULTI-ELECTRON-BEAM OPTICAL SYSTEM
#2APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#3MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF SECONDARY ELECTRON BEAMLETS ON A DETECTOR
#4APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#53D mapping of samples in charged particle microscopy
#6Apparatus of plural charged-particle beams
#7Charged particle beam lithography system
#8Apparatus of plural charged-particle beams
#9Multi-beam electron characterization tool with telecentric illumination
#10Apparatus of plural charged-particle beams
#11Apparatus of plural charged-particle beams
#12Multi-beam source
#13Projection imaging type electron microscope