ION SOURCE AND OPERATING METHOD THEREOF

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CLEANING ELECTRODE ASSEMBLY

COMPACT 2D SCANNER MAGNET WITH TRAPEZOIDAL COILS

ION GENERATION DEVICE AND ION IMPLANTER

Structure for Particle Acceleration And Charged Particle Beam Apparatus

Repeller assembly for mounting into an arc chamber of an ion implanter and arc chamber containing the repeller assembly

Charged Particle Gun and Charged Particle Beam System

Charged particle source module

Variable thickness ion source extraction plate

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Apparatus of plural charged-particle beams

Thermally isolated captive features for ion implantation systems

Thermally isolated captive features for ion implantation systems

Method and apparatus for forming substrate surfaces with exposed crystal lattice using accelerated neutral atom beam

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Side inject designs for improved radical concentrations

Apparatus of plural charged-particle beams

Ion source with tailored extraction shape

Ion implantation processes and apparatus using gallium

Charged particle source module

Electron source and electron beam device using the same

Semiconductor manufacturing device with embedded fluid conduits

Side inject designs for improved radical concentrations

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Charged-particle beam apparatus, charged-particle beam writing apparatus, and charged-particle beam controlling method

Apparatus of plural charged-particle beams

Field ionization source, ion beam apparatus, and beam irradiation method

Lanthanated tungsten ion source and beamline components

Ion generator

Method for ultra-shallow etching using neutral beam processing based on gas cluster ion beam technology

Electron source architecture for a scanning electron microscopy system

Electron microscope electron gun for facilitating position adjustment and electron microscope including same

Collision ionization source

Electron beam emitters with ruthenium coating

Hollow cathode ion source

Method of adjusting the primary side of an X-ray diffractometer

Apparatus of plural charged-particle beams

Ribbon beam ion source of arbitrary length

Apparatus of plural charged-particle beams

Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun

Semiconductor manufacturing device with embedded fluid conduits

Inspection device

SiC coating in an ion implanter

Apparatus for GHz rate high duty cycle pulsing and manipulation of low and medium energy DC electron beams

Assemblies for ion and electron sources and methods of use

Plasma ion source and charged particle beam apparatus

Uniformity control using adjustable internal antennas

Control of ion angular distribution of ion beams with hidden deflection electrode

Electron gun supporting member and electron gun apparatus

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

GCIB nozzle assembly

Plasma-based material modification using a plasma source with magnetic confinement

Cathode arrangement, electron gun, and lithography system comprising such electron gun

Cathode arrangement, electron gun, and lithography system comprising such electron gun

Cold stripper for high energy ion implanter with tandem accelerator

Device for producing an electron beam

High voltage isolation of an inductively coupled plasma ion source with a liquid that is not actively pumped

SiC coating in an ion implanter

Methods of ion source fabrication

Ion beam device

Pre-aligned nozzle/skimmer

Excited gas injection for ion implant control

APPARATUS FOR GENERATING ELECTRON BEAMS, AND METHOD FOR MANUFACTURING SAME

Method of Anion Production from Atoms and Molecules

Encapsulation of electrodes in solid media

Ion sources, systems and methods

Inspection device

Ion sources and methods for generating an ion beam with controllable ion current density distribution

CLOSED DRIFT ION SOURCE WITH SYMMETRIC MAGNETIC FIELD

Charged particle source from a photoionized cold atom beam

Gas delivery system with voltage gradient for an ion microscope

GAS FIELD IONIZATION ION SOURCE APPARATUS AND SCANNING CHARGED PARTICLE MICROSCOPE EQUIPPED WITH SAME

Liquid metal ion gun

ION BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

Filament for electron source

Ion microscope

PLUME STEERING

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

Hall-current ion source with improved ion beam energy distribution

Ion source

Ion source apparatus

GAS ION SOURCE WITH HIGH MECHANICAL STABILITY

Charged particle source with integrated energy filter

Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation

Small form factor plasma source for high density wide ribbon ion beam generation

Ion source with independent power supplies

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

ELECTRON BEAM GENERATOR HAVING ADJUSTABLE BEAM WIDTH

Charged particle beam apparatus using an electrostatic lens gun

Cathode ion source

Ion beam device

Carbon nanotube electron gun

Charged particle extraction device and method of design there for

Assemblies for ion and electron sources and methods of use

INDIRECT HEATED CATHODE OF ION IMPLANTER

Method and apparatus for producing hyperthermal beams

Ion implantation apparatus and a method

Ion implantation apparatus

Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control

PRE-ALIGNED NOZZLE/SKIMMER

Electron source

Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles

Multiple nozzle gas cluster ion beam system

Apparatus for producing a charged particle beam

Directional gas injection for an ion source cathode assembly

Techniques for providing a multimode ion source

Cathode having electron production and focusing grooves, ion source and related method

Excited gas injection for ion implant control

Dual mode gas field ion source

Charged particle extraction device and method of design there for

Increasing current in charged particle sources and systems

PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS

Methods for implanting B22Hx and its ionized lower mass byproducts

Ion source for generating negatively charged ions

Ion source cleaning method and apparatus

Techniques for providing a multimode ion source

Gas delivery system for an ion source

Charged particle source with integrated energy filter

Ultra high precision measurement tool

Multi mode ion source

Ion source with adjustable aperture

PLASMA GENERATING APPARATUS, DEPOSITION APPARATUS, AND DEPOSITION METHOD

CAPILLARITRON ION BEAM SPUTTERING SYSTEM AND THIN FILM PRODUCTION METHOD

Electron beam generating apparatus

Dual mode gas field ion source

ION SOURCE GAS REACTOR

RF electron source for ionizing gas clusters

Techniques for providing a multimode ion source

Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method

PLASMA TREATMENT APPARATUS

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

Method and device for adjusting a beam property in a gas cluster ion beam system

Ion source, ion implantation apparatus, and ion implantation method

Gas ion source with high mechanical stability

Cathode having electron production and focusing grooves, ion source and related method

Arrangement and method for compensating emitter tip vibrations

Focused ion beam apparatus

Carbon nanotube electron gun

Ion source arc chamber seal

Ion beam apparatus having plasma sheath controller

Methods of operating an electromagnet of an ion source

Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam

Semiconductor apparatus using ion beam

Ion source with upstream inner magnetic pole piece

Multivalent ion generating source and charged particle beam apparatus using such ion generating source

Methods and apparatuses for directing an ion beam source

Ion source

Charged particle beam device with a gas field ion source and a gas supply system

Electron beam apparatus and an aberration correction optical apparatus

High brightness—multiple beamlets source for patterned X-ray production

Ion source including magnet and magnet yoke assembly

Electron gun assembly

Electron beam generator for multiple columns

Electron gun and electron beam apparatus field of invention

Ion sources and methods for generating an ion beam with a controllable ion current density distribution

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

Apparatus and method for controlling ion beam

Ion source and polishing system using the same

Charged particle beam extraction and formation apparatus

Irradiation system ion beam and method to enhance accuracy of irradiation

Irradiation system with ion beam

Method to increase low-energy beam current in irradiation system with ion beam

Ion source section for ion implantation equipment

Sample dimension measuring method and scanning electron microscope

Gas flow restricting cathode system for ion implanter and related method

Ion source with electrode kept at potential(s) other than ground by zener diode(s), thyristor(s) and/or the like

Kinematic ion implanter electrode mounting

Ion source head structure of semiconductor ion implanter

Cam actuated filament clamp