206376 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Sources; Electron sources Arrangement of electrodes
APPARATUS AND METHOD FOR IMPROVED ELECTRON BEAM INSPECTION WITH A CHARGE TREATMENT ELECTRON SOURCE
#2STABILIZING A TIP WIRE OF AN ELECTRON SOURCE
#3SYSTEMS, DEVICES, AND METHODS FOR ION BEAM MODULATION
#4SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PARTICLE SYSTEMS
#5Charged Particle Gun and Charged Particle Beam Apparatus
#6Equipment and Method for Improved Edge Uniformity of Plasma Processing of Wafers
#7REMOTE SURFACE WAVE PROPAGATION FOR SEMICONDUCTOR CHAMBERS
#8METHOD OF NUCLEAR REPROGRAMMING
#9Electron gun, electron gun component, electron beam applicator, and alignment method
#10Charged Particle Gun and Charged Particle Beam System
#11PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM
#12Substrate processing apparatus and substrate processing method
#13Method and apparatus for detecting discharge site
#14Scanning electron microscope device and electron beam inspection apparatus
#15ION PRODUCTION SYSTEM WITH EFFICIENT ION COLLECTION
#16Corona/plasma treatment machine
#17Charged particle emission device, system, method, and program
#18Charged particle emission device, system, method, and program
#19PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
#20Substrate processing apparatus
#21Systems, devices, and methods for ion beam modulation
#22CHARGED PARTICLE SOURCE
#23Charged-particle source
#24Charged particle source
#25Space charge insensitive electron gun designs
#26Charged-particle source and method for cleaning a charged-particle source using back-sputtering
#27Cold cathode field-emission electron gun, adjustment method for cold cathode field-emission electron gun, sharpening method for emitter, and electron microscope
#28Charged particle source
#29Simplified particle emitter and method of operating thereof
#30Ion source
#31Ion Implanter
#32X-ray tube including hybrid electron emission source
#33Apparatus for impinging bulk material with accelerated electrons
#34Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun
#35ARC-PLASMA FILM FORMATION DEVICE
#36X-ray tube
#37Electron emitter device with integrated multi-pole electrode structure
#38Compact high-voltage electron gun
#39Indirectly heated cathode cartridge design
#40Electron beam source and method of manufacturing the same
#41SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF
#42Charged particle radiation device
#43ELECTRON BEAM GENERATOR HAVING ADJUSTABLE BEAM WIDTH
#44THERMAL FIELD EMISSION CATHODE
#45Electron gun used in particle beam device
#46Electron emitting source and manufacturing method of electron emitting source
#47Device for the field emission of particles and production method
#48Electron beam source and method of manufacturing the same
#49Electron gun minimizing sublimation of electron source and electron beam exposure apparatus using the same
#50Thermal field emission cathode
#51Electron beam emitter with slotted gun
#52Method for Changing Energy of Electron Beam in Electron Column
#53Integrated deflectors for beam alignment and blanking in charged particle columns
#54Electron Beam Etching Apparatus and Method for the same
#55Electron beam apparatus and an aberration correction optical apparatus
#56High brightness—multiple beamlets source for patterned X-ray production
#57Electron gun and electron beam apparatus field of invention
#58Polarized pulsed front-end beam source for electron microscope
#59Electron beam exposure system
#60Particle beam generator
#61Electron flood apparatus and ion implantation system
#62Integrated sub-nanometer-scale electron beam systems
#63Electron source devices, electron source assemblies, and methods for generating electrons
#64Extractor electrode for electron source