Hybrid ion source for aluminum ion generation using organoaluminium compounds and a solid target

Method and Apparatus for Plasma Processing

APPARATUS AND METHOD FOR DEPOSITING HARD CARBON LAYERS

CHARGED PARTICLE SOURCE

Method of recording an image using a particle microscope

Height measuring device, charged particle beam apparatus, and height measuring method

Method and apparatus for examining a beam of charged particles

Integrated transmission electron microscope

Particle-optical apparatus and particle beam system

Charged particle source

Method and apparatus for plasma processing

Electron energy loss spectroscopy with adjustable energy resolution

Charged particle beam system and method

Electron-Beam Inspection Systems with optimized throughput

Charged particle source

Electron source for a free electron laser

Method for the in situ preparation of microscopic specimens

On-axis illumination and alignment for charge control during charged particle beam inspection

Generation and acceleration of charged particles using compact devices and systems

Particle-optical apparatus and particle beam system

Radiation Analyzing Apparatus

CONTINUOUSLY VARIABLE APERTURE

Method and apparatus for alignment of optical and charged-particle beams in an electron microscope

Charged particle beam device and control method of charged particle beam device

Low energy electron microscopy

Method and system for scanning an object

Multi-Stage/Multi-Chamber Electron-Beam Inspection System

Multi-stage/multi-chamber electron-beam inspection system

System for discharging an area that is scanned by an electron beam

Charged particle source

Charged particle source

Multi-beam dark field imaging

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANUFACTURING THE SAME

Charge dynamics effect for detection of voltage contrast defect and determination of shorting location

Systems and methods for particle pulse modulation

System for discharging an area that is scanned by an electron beam

Device, manufacturing method, and exposure apparatus

APPLICATION OF ELECTRON-BEAM INDUCED PLASMA PROBES TO INSPECTION, TEST, DEBUG AND SURFACE MODIFICATIONS

Electron beam lithography process with multiple columns

Method and system for reducing charging artifacts in scanning electron microscopy images

Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip

Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beam

Ion pump and charged particle beam device using the same

Method and device for characterizing an electron beam

Generation and acceleration of charged particles using compact devices and systems

Swing objective lens

Method for S/TEM sample analysis

Charged particle source

Method for generating writing data

Certified wafer inspection

Electrostatic lens having a dielectric semiconducting membrane

Systems and methods for particle pulse modulation

Hybrid electron microscope

Apparatus and method for calculating drawing speeds of a charged particle beam

High-resolution amplitude contrast imaging

Individually switched field emission arrays

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLES MANUFACTURING METHOD

Phase analyzer, phase analysis method, and surface analyzer

Method for soil treatment

Multi-beam particle microscope and method for operating same

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

Apparatus and method of applying small-angle electron scattering to characterize nanostructures on opaque substrate

Multipole lens, aberration corrector, and electron microscope

Defect sampling for electron beam review based on defect attributes from optical inspection and optical review

Method of inspecting a semiconductor substrate

LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN ARTICLE

Method for detecting an electrical defect of contact/via plugs

Method for creating S/TEM sample and sample structure

TARGET DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

Charged particle beam drawing apparatus

Exposure method using control of settling times and methods of manufacturing integrated circuit devices by using the same

Electron beam writing apparatus, and method for adjusting convergence half angle of electron beam

Focusing a charged particle system

Raman microscope and electron microscope analytical system

Imaging a Sample with Multiple Beams and Multiple Detectors

Method for correcting drift of charged particle beam, and charged particle beam writing apparatus

Transmission electron microscope and method of displaying TEM images

Charged particle beam device and sample preparation method

Method for manufacturing electron source

Bulk deposition for tilted mill protection

Charged particle beam writing apparatus, and charged particle beam writing method

Method for acquiring settling time

Charged particle beam apparatus having improved needle movement control

Charged particle beam apparatus having needle probe that tracks target position changes

Endpoint detection for photolithography mask repair

Electron microscope and electron beam detector

Method for S/TEM sample analysis

MEMBER FOR CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM DEVICE AND DIAPHRAGM MEMBER

Electron microscope and electron microscope sample retaining device

DRAWING APPARATUS, DRAWING METHOD AND MANUFACTURING METHOD OF ARTICLE

Charged particle beam apparatus

METHOD FOR MEASURING INCLINATION OF BEAM, DRAWING METHOD, DRAWING APPARATUS, AND METHOD OF MANUFACTURING OBJECT

Plasma source apparatus and methods for generating charged particle beams

PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME

Charged particle beam apparatus

Charged particle beam device

Charged particle beam device

Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof

INSPECTION APPARATUS

Adjustable cathodoluminescence detection system and microscope employing such a system

Charged particle beam apparatus

Scanning electron microscope

Scanning charged particle microscope, image acquisition method, and electron detection method

Electron beam data storage system and method for high volume manufacturing

Mass spectrometric ion storage device for different mass ranges

High brightness electron gun, system using the same, and method of operating thereof

Particle beam system and method for operating the same

Mass Spectrometric ion storage device for different mass ranges

Adjustable cathodoluminescence detection system and microscope employing such a system

Electron beam data storage system and method for high volume manufacturing

Method for creating S/TEM sample and sample structure

Electron beam column and methods of using same

Dual element switched electron gun

Method for S/TEM sample analysis

Method for creating S/TEM sample and sample structure

Method for creating S/tem sample and sample structure

Method and apparatus for producing large diameter superalloy ingots

Ion implantation ion source, system and method

Method and apparatus for producing large diameter superalloy ingots

Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam

ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD

Ion implantation ion source, system and method

Dual mode ion source for ion implantation

Data recording using carbon nanotube electron sources

Ion implantation ion source, system and method

Ion implantation ion source, system and method

Shaped sputter shields for improved ion column operation

Electron source devices, electron source assemblies, and methods for generating electrons

Array-based characterization tool

Alignment and registration targets for multiple-column charged particle beam lithography and inspection