Patents-Review.com
ClassID:

206380 ⎘

H01J2237/0653 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Sources; Source emittance characteristics Intensity

Recent Application in this class:
#1
20240290570
2024-08-29

REPELLER FOR ION GENERATING APPARATUS, ION GENERATING APPARATUS AND SEMICONDUCTOR WAFER ION IMPLANTATION APPARATUS

 #2
20240249911
2024-07-25

SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE

 #3
20240212967
2024-06-27

ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELECTRON BEAM

 #4
20230230794
2023-07-20

ELECTRON GUN, ELECTRON RAY APPLYING DEVICE, AND ELECTRON BEAM PROJECTING METHOD

 #5
20220068589
2022-03-03

CHARGED PARTICLE SOURCE

 #6
20200126753
2020-04-23

Charged particle source

 #7
20190304743
2019-10-03

Charged particle beam system and method

 #8
20190057833
2019-02-21

Charged particle source

 #9
20180294135
2018-10-11

Device for the Extraction of Electrical Charge Carriers from a Charge Carrier Generation Space and Method for Operating Such a Device

 #10
20180130635
2018-05-10

Electron microscope and method of operating same

 #11
20170154750
2017-06-01

Electron gun, control method and control program thereof, and three-dimensional shaping apparatus

 #12
20160336141
2016-11-17

Charged particle beam writing apparatus and charged particle beam writing method

 #13
20150008334
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

 #14
20150008333
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

 #15
20150008332
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

 #16
20140265827
2014-09-18

Current regulation method of multiple beams

 #17
20140239200
2014-08-28

Cathode operating temperature adjusting method, and writing apparatus

 #18
20130063029
2013-03-14

Charged particle beam apparatus, and method of controlling the same

 #19
20120068067
2012-03-22

Gas field ion microscopes having multiple operation modes

 #20
20110221360
2011-09-15

Feedback loop for emitter flashing

 #21
20110089336
2011-04-21

Charged particle beam apparatus, and method of controlling the same

 #22
20090218508
2009-09-03

COLD CATHODE FIELD EMISSION ELECTRON GUN AND ITS APPLICATION TO ELECTRON BEAM INSTRUMENTS

 #23
20070228292
2007-10-04

Adjusting device of an apparatus for generating a beam of charged particles

 #24
20060138353
2006-06-29

Ion-implanting apparatus, ion-implanting method, and device manufactured thereby

 #25
20060027765
2006-02-09

Device for controlling an apparatus generating a charged particle beam

 #26
20050212440
2005-09-29

Field emission gun and electron beam instruments