ION BEAM GENERATING DEVICE INCLUDING LIQUID METAL ION SOURCE AND METHOD OF MANUFACTURING THE SAME

Ultra broad band continuously tunable electron beam pulser

Apparatus of plural charged-particle beams

Electrode for use in ion implantation apparatus and ion implantation apparatus

Electron gun, method of controlling same, and electron beam additive manufacturing machine

Method for determining a beamlet position and method for determining a distance between two beamlets in a multi-beamlet exposure apparatus

Electron beam apparatus

Inductive modulation of focusing voltage in charged beam system

Method of protecting a radiation detector in a charged particle instrument

Electron beam source and method of manufacturing the same

Electron gun

Small form factor plasma source for high density wide ribbon ion beam generation

ELECTRON BEAM GENERATOR HAVING ADJUSTABLE BEAM WIDTH

Electron gun with magnetic immersion double condenser lenses

Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control

Electron beam source and method of manufacturing the same

ELECTRON SOURCE

Electron gun minimizing sublimation of electron source and electron beam exposure apparatus using the same

Charged particle beam device

Systems and methods for a gas field ionization source

Electron gun and electron beam apparatus field of invention

Method for manufacturing an electron emitter

Ion implanter and method of manufacturing semiconductor device

Control circuit for controlling an electron-emitting device