GAS CLUSTER ION BEAM APPARATUS

Gratings with variable depths formed using planarization for waveguide displays

MIXED GAS CLUSTER ION BEAM GENERATOR AND MASS SPECTROMETER INCLUDING THE SAME

INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS

Method and apparatus for forming substrate surfaces with exposed crystal lattice using accelerated neutral atom beam

Gratings with variable depths formed using planarization for waveguide displays

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Compensated location specific processing apparatus and method

Volume scanning electron microscopy of serial thick tissue sections with gas cluster milling

Device and method for generating organic molecular cluster ion beam

Gratings with variable depths formed using planarization for waveguide displays

Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby

MEDICAL DEVICE FOR BONE IMPLANT AND METHOD FOR PRODUCING SUCH A DEVICE

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Enhanced high aspect ratio etch performance using accelerated neutral beams derived from gas-cluster ion beams

Method for ultra-shallow etching using neutral beam processing based on gas cluster ion beam technology

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

Compensated location specific processing apparatus and method

Treatment method for inhibiting platelet attachment and articles treated thereby

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

PATTERN FORMING METHOD, GAS CLUSTER ION BEAM IRRADIATING DEVICE AND PATTERN FORMING APPARATUS

Treatment method for defect reduction in a substrate and substrates treated thereby

Method and apparatus for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

Drug delivery system and method of manufacturing thereof

Nanocluster production device

LIQUID DROPLET INJECTING APPARATUS AND ION SOURCE

Process gas enhancement for beam treatment of a substrate

GCIB nozzle assembly

Multi-step location specific process for substrate edge profile correction for GCIB system

Method and apparatus for beam deflection in a gas cluster ion beam system

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Ion source, ion gun, and analysis instrument

Molecular beam enhanced GCIB treatment

Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

Pre-aligned nozzle/skimmer

Virtual wireless multitrack recording system

Gas cluster ion beam process for opening conformal layer in a high aspect ratio contact via

Methods and apparatus for employing an accelerated neutral beam for improved surface analysis

Switchable gas cluster and atomic ion gun, and method of surface processing using the gun

Diagnostic method and apparatus for characterization of a neutral beam and for process control therewith

PRE-ALIGNED MULTI-BEAM NOZZLE/SKIMMER MODULE

Gas cluster ion beam etching process for metal-containing materials

METHOD AND SYSTEM FOR STERILIZING OBJECTS BY THE APPLICATION OF BEAM TECHNOLOGY

Method of manufacturing a drug delivery system using gas cluster ion beam irradiation

METHOD AND APPARATUS FOR PROVIDING BEAMS OF NANODROPLETS FOR HIGH SPUTTERING RATE OF INERT MATERIALS

Method to alter silicide properties using GCIB treatment

SYSTEM AND METHOD FOR GENERATING A BEAM OF PARTICLES

CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATING METHOD, AND SUBSTRATE PROCESSING METHOD

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Methods for improving the bioactivity characteristics of a surface and objects with surfaces improved thereby

METHOD AND APPARATUS FOR PROVIDING BEAMS OF NANODROPLETS FOR HIGH SPUTTERING RATE OF INERT MATERIALS

Method for finishing surface of preliminary polished glass substrate

Gas cluster ion beam system with rapid gas switching apparatus

Gas cluster ion beam system with cleaning apparatus

Method for modifying a material layer using gas cluster ion beam processing

HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM

Method for modifying an etch rate of a material layer using energetic charged particles

Drug delivery system and method of manufacturing thereof

Gas-cluster-jet generator and gas-cluster ion-beam apparatus utilizing an improved gas-cluster-jet generator

Method to alter silicide properties using GCIB treatment

Drug delivery system and method of manufacturing thereof

Method for finishing surface of preliminary polished glass substrate

Method for enhancing a substrate using gas cluster ion beam processing

Method for modifying a material layer using gas cluster ion beam processing

PRE-ALIGNED NOZZLE/SKIMMER

Methods of Fabricating Semiconductor Devices Having Conductive Wirings and Related Flash Memory Devices

Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus

METHODS FOR IMPROVING THE BIOACTIVITY CHARACTERISTICS OF A SURFACE AND OBJECTS WITH SURFACES IMPROVED THEREBY

Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby

Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby

Virtual wireless multitrack recording system

Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles

Multiple nozzle gas cluster ion beam system

Multiple nozzle gas cluster ion beam processing system and method of operating

Ion implantation ion source, system and method

Method and apparatus for extracting ions from an ion source for use in ion implantation

METHOD FOR REMOVING FOREIGN MATTER FROM GLASS SUBSTRATE SURFACE AND METHOD FOR PROCESSING GLASS SUBSTRATE SURFACE

Solid surface smoothing apparatus

Self-biasing active load circuit and related power supply for use in a charged particle beam processing system

Surface profile adjustment using gas cluster ion beam processing

Method of forming semiconductor devices containing metal cap layers

Method of forming semiconductor devices containing metal cap layers

Method for selectively etching areas of a substrate using a gas cluster ion beam

Method and system for sterilizing objects by the application of gas-cluster ion-beam technology

Method and system for growing a thin film using a gas cluster ion beam

METHOD FOR FORMING TRENCH ISOLATION

Method and system for directional growth using a gas cluster ion beam

Method of processing solid surface with gas cluster ion beam

Method for finishing surface of preliminary polished glass substrate

METHOD AND SYSTEM FOR DEPOSITING SILICON CARBIDE FILM USING A GAS CLUSTER ION BEAM

Apparatus and method for processing a wafer

Method and System for Improving Surgical Blades by the Application of Gas Cluster Ion Beam Technology and Improved Surgical Blades

Method for increasing the penetration depth of material infusion in a substrate using a gas cluster ion beam

Method of forming capping structures on one or more material layer surfaces

RF electron source for ionizing gas clusters

Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture

DUAL DAMASCENE INTEGRATION STRUCTURES AND METHOD OF FORMING IMPROVED DUAL DAMASCENE INTEGRATION STRUCTURES

Method and system for coating a surface of a medical device with a therapeutic agent and drug eluting medical devices made thereby

Method to improve a copper/dielectric interface in semiconductor devices

Method for directional deposition using a gas cluster ion beam

Method for depositing films using gas cluster ion beam processing

Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices

Electrical contacts for integrated circuits and methods of forming using gas cluster ion beam processing

Method and device for adjusting a beam property in a gas cluster ion beam system

Method and system for multi-pass correction of substrate defects

Method and system for adjusting beam dimension for high-gradient location specific processing

METHOD AND SYSTEM FOR MODIFYING THE WETTABILITY CHARACTERISTICS OF A SURFACE OF A MEDICAL DEVICE BY THE APPLICATION OF GAS CLUSTER ION BEAM TECHNOLOGY AND MEDICAL DEVICES MADE THEREBY

FILM DEPOSITION APPARATUS AND METHOD OF FILM DEPOSITION

Methods for modifying features of a workpiece using a gas cluster ion beam

Method and system for increasing throughput during location specific processing of a plurality of substrates

APPARATUS AND METHODS FOR TREATING A WORKPIECE USING A GAS CLUSTER ION BEAM

Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces

Method and apparatus for flattening solid surface

Reducing wire erosion during damascene processing

METHOD OF INTRODUCING MATERIAL INTO A SUBSTRATE BY GAS-CLUSTER ION BEAM IRRADIATION

Methods and processing systems for using a gas cluster ion beam to offset systematic non-uniformities in workpieces processed in a process tool

Apparatus and methods for systematic non-uniformity correction using a gas cluster ion beam

Apparatus and methods of forming a gas cluster ion beam using a low-pressure source

Gas cluster ion beam emitting apparatus and method for ionization of gas cluster

Techniques for providing a ribbon-shaped gas cluster ion beam

Charged particle-beam processing using a cluster source

Conductive Wiring for Semiconductor Devices

DENSIFYING SURFACE OF POROUS DIELECTRIC LAYER USING GAS CLUSTER ION BEAM

Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipment

Ion implantation ion source, system and method

Ultra precise polishing method and ultra precise polishing apparatus

GCIB Cluster Tool Apparatus and Method of Operation

Copper interconnect wiring and method and apparatus for forming thereof

Ion implantation system and control method

Ion implantation system and control method

Method and apparatus for extracting ions from an ion source for use in ion implantation

Dual mode ion source for ion implantation

Method of manufacturing a drug delivery system

Surface treatment method using ion beam and surface treating device

Replacement gate field effect transistor with germanium or SiGe channel and manufacturing method for same using gas-cluster ion irradiation

Method for smoothing a solid surface

Method and apparatus for extracting ions from an ion source for use in ion implantation

Method and apparatus for extracting ions from an ion source for use in ion implantation

Ion implantation system and control method

Method of fabricating a polarizing layer on an interface

Reducing wire erosion during damascene processing

Method of fabricating a manganese diffusion barrier

Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms

Gas cluster ion beam emitting apparatus and method for ionization of gas cluster

Copper interconnect wiring and method of forming thereof

Apparatus and method for polishing gemstones and the like

Ionizer and method for gas-cluster ion-beam formation

Method of engineering a property of an interface

Method and apparatus for arc suppression in scanned ion beam processing equipment

Gas cluster-ion irradiation apparatus

Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation

Dual damascene integration structure and method for forming improved dual damascene integration structure

Dual damascene integration structure and method for forming improved dual damascene integration structure

Ion implantation ion source, system and method

Method and apparatus for improved processing with a gas-cluster ion beam

Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system

Formation of ultra-shallow junctions by gas-cluster ion irradiation

Methods of forming doped and un-doped strained semiconductor materials and semiconductor films by gas-cluster-ion-beam irradiation and materials and film products

Dry etching method and photonic crystal device fabricated by use of the same

Ion implantation ion source, system and method

Gratings with variable etch heights for waveguide displays

Gratings with variable etch heights for waveguide displays