METHOD OF ASSEMBLING DRIFT TUBE ASSEMBLIES IN ION IMPLANTORS

SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRIC OR ASYMMETRIC APPLICATION OF FORCE

Hybrid ion source for aluminum ion generation using a target holder and a solid target

HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER AND ORGANOALUMINIUM COMPOUNDS

DEPOSITION TOOL AND METHOD FOR FILLING DEEP TRENCHES

Gratings with variable depths formed using planarization for waveguide displays

Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam

Method for structuring a decorative of technical pattern in an object made of an at least partially transparent amorphous, semi-crystalline or crystalline material

Method and device for the surface treatment of substrates

Ion generator and ion implanter

Particle-optical apparatus and particle beam system

Gratings with variable depths formed using planarization for waveguide displays

Repeller, cathode, chamber wall and slit member for ion implanter and ion generating devices including the same

CARBON MATERIALS FOR CARBON IMPLANTATION

Method for structuring a decorative of technical pattern in an object made of an at least partially transparent amorphous, semi-crystalline or crystalline material

Endpointing for focused ion beam processing

SYSTEMS AND METHODS FOR PROVIDING AN ION BEAM

Planarization, densification, and exfoliation of porous materials by high-energy ion beams

Method for the in situ preparation of microscopic specimens

Hydrogen co-gas when using aluminum iodide as an ion source material

Gun lens design in a charged particle microscope

Particle-optical apparatus and particle beam system

Repeller, cathode, chamber wall and slit member for ion implanter and ion generating devices including the same

Method and device for the surface treatment of substrates

Tomography sample preparation systems and methods with improved speed, automation, and reliability

Ion source

Ion Implanter

Ion milling apparatus and ion milling method

In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source

Composite charged particle beam device

Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

Method for producing patterns by ion implantation

Plasma source enhanced with booster chamber and low cost plasma strength sensor

Sample holder and focused ion beam apparatus

Ion milling device and ion milling method

Charged particle beam-induced etching

Ion implantation apparatus

Ion beam etching method and ion beam etching apparatus

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANUFACTURING THE SAME

Carbon materials for carbon implantation

Method and device for the surface treatment of substrates

Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation

METHODS, SYSTEMS AND APPARATUS FOR ACCELERATING LARGE PARTICLE BEAM CURRENTS

Plasma source enhanced with booster chamber and low cost plasma strength sensor

Method for rapid switching between a high current mode and a low current mode in a charged particle beam system

Silicon implantation in substrates and provision of silicon precursor compositions therefor

Differential imaging with pattern recognition for process automation of cross sectioning applications

Laser-Induced Borane Production for Ion Implantation

REMOTE DELIVERY OF CHEMICAL REAGENTS

Apparatus and method to control an ion beam

Boron implanting using a co-gas

Ion milling device and processing method using the ion milling device

High energy ion implanter, beam current adjuster, and beam current adjustment method

Endpointing for focused ion beam processing

Ion milling device

Plasma ion source for use with a focused ion beam column with selectable ions

Gas cooled plasma spraying device

Isotopically-enriched boron-containing compounds, and methods of making and using same

Ion implantation compositions, systems, and methods

Imaging and processing for plasma ion source

Angular scanning using angular energy filter

High capacity TEM grid

Raman microscope and electron microscope analytical system

Ion beam uniformity control using ion beam blockers

Plasma etching of diamond surfaces

MAGNETIC SCANNING SYSTEM FOR ION IMPLANTERS

Charged particle beam device and sample preparation method

Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation

Bulk deposition for tilted mill protection

Apparatus and methods for implementing predicted systematic error correction in location specific processing

Alignment marking for rock sample analysis

Charged particle beam apparatus having improved needle movement control

Ion implantation apparatus and method of controlling ion implantation apparatus

Ion sources, systems and methods

Charged particle beam apparatus and processing method

Mass spectrometer and mass image analyzing system

Focused ion beam system and method of making focal adjustment of ion beam

Differential imaging with pattern recognition for process automation of cross sectioning applications

Arc chamber with multiple cathodes for an ion source

Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions

Techniques for processing a substrate

Charged particle beam apparatus

Workpiece carrier

Insulation structure and insulation method

Supply source and method for enriched selenium ion implantation

Extended lifetime ion source

Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source

Source bushing shielding

Insulation structure of high voltage electrodes for ion implantation apparatus

Ion beam generator and ion beam plasma processing apparatus

Isotopically-enriched boron-containing compounds, and methods of making and using same

Method and system for ion-assisted processing

Bonding-substrate fabrication method, bonding substrate, substrate bonding method, bonding-substrate fabrication apparatus, and substrate assembly

Three dimensional metal deposition technique

Cluster ion implantation of arsenic and phosphorus

Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions

Target for generating carbon ions and treatment apparatus using the same

Titanium diboride coating for plasma processing apparatus

Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source

Electronic field effect devices and methods for their manufacture

Method for rapid switching between a high current mode and a low current mode in a charged particle beam system

Method of ionization

Ion sources, systems and methods

Variable energy charged particle systems

Sub-Nanosecond Beam Pulse Radio Frequency Quadrupole (RFQ) Linear Accelerator System

Hydrogen COGas for carbon implant

Isotopically-enriched boron-containing compounds, and methods of making and using same

Fault tolerant ion source power system

VAPORIZER

Surface analyzer of object to be measured and analyzing method

Hall-current ion source with improved ion beam energy distribution

Charged particle source with integrated energy filter

Isotopically-enriched boron-containing compounds, and methods of making and using same

Ion beam source

Isotopically-enriched boron-containing compounds, and methods of making and using same

Techniques for processing a substrate

Manufacturing method of semiconductor device

ELECTRIC FIELD MODIFICATION ABOUT A CONDUCTIVE STRUCTURE

CARBON MATERIALS FOR CARBON IMPLANTATION

METHOD AND APPARATUS FOR ETCHING A STRUCTURE IN A PLASMA CHAMBER

High mass resolution low aberration analyzer magnet for ribbon beams and the system for ribbon beam ion implanter

Apparatus

IONIC EMISSION MICRONIC SOURCE

Dual beam apparatus with tilting sample stage

DIAMOND ELECTRONIC DEVICES INCLUDING A SURFACE AND METHODS FOR THEIR MANUFACTURE

Electronic field effect devices

Extraction electrode manipulator

Plasma etching of diamond surfaces

APPARATUS

DIAMOND ELECTRONIC DEVICES AND METHODS FOR THEIR MANUFACTURE

Vapor delivery system useful with ion sources and vaporizer for use in such system

High uniformity boron doped diamond material

Method and apparatus for controlling beam current uniformity in an ion implanter

Electron spectroscopy

Ion implanting apparatus and method of correcting beam orbit

Charged particle source with integrated energy filter

Ion implanting apparatus

Ion source and plasma processing apparatus

VAPOR DELIVERY SYSTEM USEFUL WITH ION SOURCES AND VAPORIZERS FOR USE IN SUCH SYSTEM

Neutral beam-assisted atomic layer chemical vapor deposition apparatus and method of processing substrate using the same

Method and device of ion source generation

Ion sources, systems and methods

Vapor delivery to devices under vacuum

High resolution gas field ion column with reduced sample load

Focused ion beam field source

Atomically sharp iridium tip

Terminal structures of an ion implanter having insulated conductors with dielectric fins

DETACHABLE INNER SHIELD

Focused negative ion beam field source

Arrangement and method for compensating emitter tip vibrations

ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF IONS DERIVED FROM CARBORANE MOLECULAR SPECIES

Symmetrical shaper for an ion beam deposition and etching apparatus

Method of reducing particle contamination for ion implanters

Ion beam processing apparatus

Terminal structure of an ion implanter

Charged particle generator and accelerator

Film Forming Apparatus and Film Forming Method

Thermal control plate for ion source

Method and apparatus for etching a structure in a plasma chamber

Hall-current ion source for ion beams of low and high energy for technological applications

Guard ring applied to ion implantation equipment

Thermal transfer sheet for ion source

Manufacturing method of semiconductor device

Scanning transmission ion microscope

Transmission ion microscope

Ion-implanting apparatus, ion-implanting method, and device manufactured thereby

Fluid-cooled ion source

Titanium nitride thin film formation on metal substrate by chemical vapor deposition in a magnetized sheet plasma source

Source of liquid metal ions and a method for controlling the source

Modular uniform gas distribution system in an ion source

Sputtered contamination shielding for an ion source

High output ion source, ion implanter, and method of operation

System, apparatus and method for variable length electrode in linear accelerator

Tetrode extraction apparatus for ion source

Extraction electrode arms