ULTRA FAST PULSER FOR LOW ENERGY ELECTRON BEAMS

Beam Plasma Source

LINEAR TCP SOURCE, A CHARGED PARTICLE BEAM SOURCE USING THE LINEAR TCP SOURCE AND A GRID FOR THE CHARGED PARTICLE BEAM SOURCE

SYSTEM AND METHOD FOR PLASMA TREATMENT WITH INDEPENDENT CONTROL OF NEUTRAL PARTICLE AND ION FLUXES

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CLEANING ELECTRODE ASSEMBLY

OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM APPARATUS AND COMPUTER READABLE RECORDING MEDIUM

Apparatus and Method for Milling Sample

SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE

Ion extraction assembly having variable electrode thickness for beam uniformity control

Charge carrier generation source

Automatic adjustment method and automatic adjustment device of beam of semiconductor apparatus, and training method of parameter adjustment model

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Apparatus for multiple charged-particle beams

Charged particle beam source, surface processing apparatus and surface processing method

Apparatus of plural charged-particle beams

CHARGED PARTICLE SOURCE

Apparatus of plural charged-particle beams

Apparatus and system including extraction optics having movable blockers

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Apparatus of plural charged-particle beams

Ion implantation system and source bushing thereof

Particle-optical apparatus and particle beam system

Apparatus of plural charged-particle beams

Multi-electron beam device

CHARGED PARTICLE BEAM SOURCE, SURFACE PROCESSING APPARATUS AND SURFACE PROCESSING METHOD

Charged particle source

Ion implantation system and source bushing thereof

Extraction apparatus and system for high throughput ion beam processing

Apparatus for multiple charged-particle beams

Charged particle beam system and method

METHOD OF PROCESSING A SUBSTRATE USING AN ION BEAM AND APPARATUS FOR PERFORMING THE SAME

Apparatus of plural charged-particle beams

Ion beam apparatus including slit structure for extracting ion beam

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

SYSTEMS AND METHODS FOR PROVIDING AN ION BEAM

CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND METHOD FOR REDUCING ELECTRIFICATION OF SUBSTRATE

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Charged particle source

Electron beam generation for transmission electron microscope

Device for the Extraction of Electrical Charge Carriers from a Charge Carrier Generation Space and Method for Operating Such a Device

Particle-optical apparatus and particle beam system

Method of processing a substrate using an ion beam and apparatus for performing the same

Ion beam apparatus including slit structure for extracting ion beam, etching method using the same, and method for manufacturing magnetic memory device using the ion beam apparatus

Apparatus of plural charged-particle beams

Electron-beam spot optimization

Beam position monitors for medical radiation machines

Ion beam apparatus generating ion beams of bilateral symmetry

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Radical generator and molecular beam epitaxy apparatus

Apparatus of plural charged-particle beams

SiC coating in an ion implanter

Apparatus of plural charged-particle beams

Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip

Device manufacturing apparatus and manufacturing method of magnetic device using structure to pass ion beam

Method of forming a pattern using ion beams of bilateral symmetry, a method of forming a magnetic memory device using the same, and an ion beam apparatus generating ion beams of bilateral symmetry

Beam extraction slit structure and ion source

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Plasma-based material modification using a plasma source with magnetic confinement

Plasma source apparatus and methods for generating charged particle beams

SiC coating in an ion implanter

Charged particle beam applied apparatus, and irradiation method

Plasma potential modulated ion implantation system

Double ended electrode manipulator

Inductive modulation of focusing voltage in charged beam system

Ion sources and methods for generating an ion beam with controllable ion current density distribution

Charged particle source with multiple selectable particle emitters

Ion beam irradiation device and method for suppressing ion beam divergence

ION BEAM DISTRIBUTION

UNIFORMITY CONTROL USING ION BEAM BLOCKERS

Ion beam extraction by discrete ion focusing

Distributed ion source acceleration column

Focused ion beam apparatus

Ion source

Gas-cluster-jet generator and gas-cluster ion-beam apparatus utilizing an improved gas-cluster-jet generator

Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator

Charged particle extraction device and method of design there for

Electron gun with magnetic immersion double condenser lenses

Ion source assembly for ion implantation apparatus and a method of generating ions therein

Front plate for an ion source

Techniques for improving extracted ion beam quality using high-transparency electrodes

Ion implantation ion source, system and method

Mass analysis magnet for a ribbon beam

Method and apparatus for extracting ions from an ion source for use in ion implantation

Extraction electrode manipulator

Charged particle extraction device and method of design there for

PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS

Method and apparatus for controlling beam current uniformity in an ion implanter

Ion source including separate support systems for accelerator grids

Ion implanting apparatus

PLASMA GENERATING APPARATUS, DEPOSITION APPARATUS, AND DEPOSITION METHOD

Extraction electrode system for high current ion implanter

Apparatus and methods for ion beam implantation using ribbon and spot beams

TECHNIQUES FOR SHAPING AN ION BEAM

PLASMA TREATMENT APPARATUS

Method and device for adjusting a beam property in a gas cluster ion beam system

Ion source, ion implantation apparatus, and ion implantation method

Ion implanting apparatus

Symmetrical shaper for an ion beam deposition and etching apparatus

Methods of operating an electromagnet of an ion source

Methods and apparatuses for directing an ion beam source

Electron beam apparatus and an aberration correction optical apparatus

Front plate for an ion source

Apparatus and method for ion beam implantation using ribbon and spot beams

Ion implantation ion source, system and method

Ion sources and methods for generating an ion beam with a controllable ion current density distribution

Method and apparatus for extracting ions from an ion source for use in ion implantation

Dual mode ion source for ion implantation

Technique for shaping a ribbon-shaped ion beam

Ion source element, ion implanter having the same and method of modifying the same

Method and apparatus for extracting ions from an ion source for use in ion implantation

Method and apparatus for extracting ions from an ion source for use in ion implantation

Ion source with multi-piece outer cathode

Ion source section for ion implantation equipment

Ion implanter and method of manufacturing semiconductor device

Ion implantation ion source, system and method

System and method for performing SIMOX implants using an ion shower

Ion implantation ion source, system and method

Charged particle beam exposure method, charged particle beam exposure apparatus, and device manufacturing method

High performance inspection scanning electron microscope device and method of operating the same