ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELECTRON BEAM

PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTICLE MICROSCOPE

Ion source and ion implantation apparatus

Systems for controlling a high power ion beam

Device and method for optimizing diffusion section of electron beam

Lower dose rate ion implantation using a wider ion beam

WRITING DATA CORRECTING METHOD, WRITING METHOD, AND MANUFACTURING METHOD OF MASK OR TEMPLATE FOR LITHOGRAPHY

Charged particle beam applied apparatus, and irradiation method

Ion implanter

High-vacuum variable aperture mechanism and method of using same

PLUME STEERING

ION Beam System and Machining Method

ELECTRON BEAM GENERATOR HAVING ADJUSTABLE BEAM WIDTH

Ion source

External cathode ion source

Ion implantation ion source, system and method

Method of acquiring offset deflection amount for shaped beam and lithography apparatus

Method and apparatus for controlling beam current uniformity in an ion implanter

Ion source with adjustable aperture

Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method

TECHNIQUES FOR SHAPING AN ION BEAM

SCANNING ELECTRON MICROSCOPE

External cathode ion source

Ion beam system and machining method

Charged-particle exposure apparatus

Variable shaped electron beam lithography system and method for manufacturing substrate

Ion implantation ion source, system and method

Ion source and polishing system using the same

Dual mode ion source for ion implantation

Ion implantation ion source, system and method

Irradiation system ion beam and method to enhance accuracy of irradiation

Irradiation system with ion beam

Method to increase low-energy beam current in irradiation system with ion beam

Ion beam system and machining method

Ion implantation ion source, system and method

Ion implantation ion source, system and method