206400 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Lenses electrostatic Associated circuits
MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED MULTI-BEAM GENERATOR FOR FIELD CURVATURE CORRECTION AND MULTI-BEAM GENERATOR
#2MULTIPOLE LENS AND CHARGED PARTICLE BEAM DEVICE
#3CHARGED PARTICLE APPARATUS AND METHOD
#4CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS DEVICE
#5Particle beam system for adjusting the current of individual particle beams
#6Conductive beam optic containing internal heating element
#7Scanning electron microscope
#8Multi-beam charged particle system
#9Multi-beam charged particle system
#10Circuits for edge ring control in shaped DC pulsed plasma process device
#11Deflection array apparatus for multi-electron beam system
#12Electron beam device
#13Particle beam system
#14Planarization, densification, and exfoliation of porous materials by high-energy ion beams
#15Particle beam system
#16System for imaging a secondary charged particle beam with adaptive secondary charged particle optics
#17System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics
#18Charged particle beam apparatus and sample processing method
#19CHARGED PARTICLE BEAM APPARATUS
#20Electron microscope and a method of imaging objects