Patents-Review.com
ClassID:

206399 ⎘

H01J2237/12 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Lenses electrostatic

Sub-classes:
Recent Application in this class:
#1
20260112572
2026-04-23

MULTI-BEAM CHARGED PARTICLE MICROSCOPE FOR INSPECTION WITH IMPROVED IMAGE CONTRAST

 #2
20260094784
2026-04-02

FOIL LENS CORRECTORS, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS

 #3
20230245849
2023-08-03

OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OPTICAL SYSTEM ARRAY, METHOD OF FOCUSING, OBJECTIVE LENS ARRANGEMENT

 #4
20210020399
2021-01-21

High-current ion implanter and method for controlling ion beam using high-current ion implanter

 #5
20200243296
2020-07-30

Objective lens arrangement usable in particle-optical systems

 #6
20190371565
2019-12-05

Charged particle beam writing apparatus and charged particle beam writing method

 #7
20190172675
2019-06-06

Method and system for focus adjustment of a multi-beam scanning electron microscopy system

 #8
20190122856
2019-04-25

Multi-charged-particle beam writing apparatus

 #9
20180114672
2018-04-26

Monochromator and charged particle beam apparatus comprising the same

 #10
20170345613
2017-11-30

Charged particle beam device

 #11
20170294287
2017-10-12

Objective lens arrangement usable in particle-optical systems

 #12
20170207058
2017-07-20

Electron energy loss spectrometer

 #13
20170084424
2017-03-23

Method and system for focus adjustment of a multi-beam scanning electron microscopy system

 #14
20160351373
2016-12-01

High-speed hotspot or defect imaging with a charged particle beam system

 #15
20160322190
2016-11-03

System and method for imaging a sample with an electron beam with a filtered energy spread

 #16
20160240347
2016-08-18

Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam

 #17
20160181055
2016-06-23

Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system

 #18
20160181054
2016-06-23

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

 #19
20160172150
2016-06-16

Swing objective lens

 #20
20160111244
2016-04-21

Electrostatic lens having a dielectric semiconducting membrane

 #21
20160035533
2016-02-04

Energy filter for charged particle beam apparatus

 #22
20160020062
2016-01-21

Charged-particle lens that transmits emissions from sample

 #23
20150303025
2015-10-22

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE

 #24
20150270103
2015-09-24

Ion beam dimension control for ion implantation process and apparatus, and advanced process control

 #25
20150255249
2015-09-10

Multi charged particle beam writing apparatus

 #26
20150248990
2015-09-03

Energy-discrimination detection device

 #27
20150221468
2015-08-06

Scanning electron microscope

 #28
20150170876
2015-06-18

Method of investigating the wavefront of a charged-particle beam

 #29
20150123005
2015-05-07

Particle beam transport apparatus

 #30
20150090896
2015-04-02

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

 #31
20150034836
2015-02-05

Electron beam equipment

 #32
20140366801
2014-12-18

High-energy ion implanter

 #33
20140361165
2014-12-11

Method for imaging a sample in a charged particle apparatus

 #34
20130327952
2013-12-12

Focused charged particle column for operation at different beam energies at a target

 #35
20130295753
2013-11-07

Ion beam dimension control for ion implantation process and apparatus, and advanced process control

 #36
20110210263
2011-09-01

Particle beam transport apparatus and method of transporting a particle beam with small beam spot size

 #37
20110155921
2011-06-30

System and method for controlling deflection of a charged particle beam within a graded electrostatic lens

 #38
20110001056
2011-01-06

COMPONENT FOR MANIPULATING A STREAM OF CHARGED PARTICLES

 #39
20100270468
2010-10-28

System and method for a charged particle beam

 #40
20100065761
2010-03-18

ADJUSTABLE DEFLECTION OPTICS FOR ION IMPLANTATION

 #41
20090159810
2009-06-25

Particle-Optical Component

 #42
20090065694
2009-03-12

Scanning electron microscope

 #43
20090008572
2009-01-08

Charged-particle beam apparatus

 #44
20080135777
2008-06-12

Ion implanter

 #45
20080121810
2008-05-29

System and method for a charged particle beam

 #46
20070187598
2007-08-16

Scanning electron microscope and apparatus for detecting defect

 #47
20070057183
2007-03-15

Scanning electron microscope

 #48
20060108543
2006-05-25

Weakening focusing effect of acceleration-deceleration column of ion implanter

 #49
20060097197
2006-05-11

Focused ion beam system

 #50
20050139773
2005-06-30

Scanning electron microscope

 #51
14828181
2016-10-18

Beam separator device, charged particle beam device and methods of operating thereof