Patents-Review.com
ClassID:

206401 ⎘

H01J2237/1205 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Lenses electrostatic Microlenses

Recent Application in this class:
#1
20260045437
2026-02-12

FIELD CURVATURE CORRECTOR FOR USE IN MULTI-ELECTRON-BEAM OPTICAL SYSTEM

 #2
20260018376
2026-01-15

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #3
20250299906
2025-09-25

OPTICAL SYSTEM FOR A PLURALITY OF PRIMARY BEAMLETS, CHARGED PARTICLE MULTI-BEAM APPARATUS AND METHOD OF FOCUSING A PLURALITY OF PRIMARY BEAMLETS

 #4
20250232945
2025-07-17

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #5
20250125120
2025-04-17

LENS DESIGNS

 #6
20250112023
2025-04-03

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #7
20250079111
2025-03-06

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED ALIGNMENT AND METHOD FOR ALIGNING THE MULTI-BEAM PARTICLE MICROSCOPE, AND COMPUTER PROGRAM PRODUCT

 #8
20240379322
2024-11-14

MULTI-BEAM SYSTEM AND MULTI-BEAM GENERATING UNIT WITH REDUCED SENSITIVITY TO DRIFT AND DAMAGES

 #9
20240170252
2024-05-23

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

 #10
20240128044
2024-04-18

Apparatus of plural charged-particle beams

 #11
20240079205
2024-03-07

ASSESSMENT SYSTEM, METHOD OF ASSESSING

 #12
20240014003
2024-01-11

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #13
20230411110
2023-12-21

Apparatus using charged particle beams

 #14
20230282441
2023-09-07

Apparatus of plural charged-particle beams

 #15
20230086984
2023-03-23

BEAM ARRAY GEOMETRY OPTIMIZER FOR MULTI-BEAM INSPECTION SYSTEM

 #16
20230071331
2023-03-09

Electrostatic devices to influence beams of charged particles

 #17
20220406563
2022-12-22

Lens designs

 #18
20220148851
2022-05-12

Apparatus of plural charged-particle beams

 #19
20220068587
2022-03-03

Apparatus for multiple charged-particle beams

 #20
20210384008
2021-12-09

Apparatus of plural charged-particle beams

 #21
20210343497
2021-11-04

Multi-beam inspection methods and systems

 #22
20210233736
2021-07-29

Apparatus of plural charged-particle beams

 #23
20210090844
2021-03-25

MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM

 #24
20200388464
2020-12-10

Apparatus of plural charged-particle beams

 #25
20200303155
2020-09-24

Apparatus using charged particle beams

 #26
20200161085
2020-05-21

Nano vacuum tube

 #27
20200152421
2020-05-14

Apparatus of plural charged-particle beams

 #28
20200152412
2020-05-14

Apparatus of plural charged-particle beams

 #29
20200118784
2020-04-16

Deflection array apparatus for multi-electron beam system

 #30
20190279842
2019-09-12

Apparatus of plural charged-particle beams

 #31
20190259573
2019-08-22

Apparatus of plural charged-particle beams

 #32
20190172675
2019-06-06

Method and system for focus adjustment of a multi-beam scanning electron microscopy system

 #33
20190057837
2019-02-21

Apparatus of plural charged-particle beams

 #34
20190035598
2019-01-31

Nano vacuum tube

 #35
20180350555
2018-12-06

Apparatus of plural charged-particle beams

 #36
20180330911
2018-11-15

Method and apparatus for an imaging system

 #37
20180226219
2018-08-09

Multi-column scanning electron microscopy system

 #38
20180037993
2018-02-08

Digital pattern generator having charge drain coating

 #39
20170309449
2017-10-26

Apparatus of plural charged-particle beams

 #40
20170025243
2017-01-26

Apparatus of plural charged-particle beams

 #41
20170025241
2017-01-26

Apparatus of plural charged-particle beams

 #42
20160358742
2016-12-08

Charge drain coating for electron-optical MEMS

 #43
20160322199
2016-11-03

Apparatus for charged particle lithography system

 #44
20160284505
2016-09-29

Apparatus of plural charged-particle beams

 #45
20160268096
2016-09-15

Apparatus of plural charged-particle beams

 #46
20160155603
2016-06-02

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

 #47
20160013017
2016-01-14

Method and apparatus for a high resolution imaging system

 #48
20150348749
2015-12-03

Multi-beam particle microscope and method for operating same

 #49
20150340195
2015-11-26

Pillar-supported array of micro electron lenses

 #50
20150213995
2015-07-30

High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope

 #51
20140239190
2014-08-28

Micro-column with double aligner

 #52
20140224999
2014-08-14

Electrostatic lens and charged particle beam apparatus using the same

 #53
20140212815
2014-07-31

Charged particle lithography system with a long shape illumination beam

 #54
20140151570
2014-06-05

Charged particle beam lens and exposure apparatus using the same

 #55
20140103223
2014-04-17

Charged particle beam lens having a particular support electrically insulating first and second electrodes from each other

 #56
20140014852
2014-01-16

Projection lens arrangement

 #57
20130306878
2013-11-21

Electrode of electrostatic lens and method of manufacturing the same

 #58
20130297061
2013-11-07

METHOD AND COMPUTER-AIDED DESIGN SYSTEM OF MANUFACTURING AN OPTICAL SYSTEM

 #59
20130234034
2013-09-12

Apparatus and method for controllably implanting workpieces

 #60
20130187046
2013-07-25

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

 #61
20130161511
2013-06-27

Sample observing device and sample observing method

 #62
20130087717
2013-04-11

Electrostatic lens

 #63
20130040240
2013-02-14

Charged particle beam drawing apparatus, and method of manufacturing article

 #64
20120319001
2012-12-20

CHARGED PARTICLE BEAM LENS

 #65
20120305798
2012-12-06

Charged particle multi-beam apparatus including a manipulator device for manipulation of one or more charged particle beams

 #66
20120288799
2012-11-15

In situ cleaning device for lithographic apparatus

 #67
20120273690
2012-11-01

Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams

 #68
20120241606
2012-09-27

Multiple-beam system for high-speed electron-beam inspection

 #69
20120211677
2012-08-23

Multiple beam charged particle optical system

 #70
20120061583
2012-03-15

Projection lens arrangement

 #71
20110268252
2011-11-03

X-ray apparatus, method of using the same and X-ray irradiation method

 #72
20110168910
2011-07-14

Multiple beam charged particle optical system

 #73
20110163244
2011-07-07

Multiple beam charged particle optical system

 #74
20110147605
2011-06-23

Electrostatic corrector

 #75
20110124186
2011-05-26

Apparatus and method for controllably implanting workpieces

 #76
20110084220
2011-04-14

Enhanced integrity projection lens assembly

 #77
20110079731
2011-04-07

MULTIPOLE LENS FOR ELECTRON COLUMN

 #78
20110068276
2011-03-24

Multiple beam charged particle optical system

 #79
20100200766
2010-08-12

ELECTRON EMITTER HAVING NANO-STRUCTURE TIP AND ELECTRON COLUMN USING THE SAME

 #80
20100187433
2010-07-29

IMPROVED PARTICLE BEAM GENERATOR

 #81
20100148086
2010-06-17

Magnetic deflector for an electron column

 #82
20100084566
2010-04-08

Electron Column Using A Magnetic Lens Layer Having Permanent Magnets

 #83
20100019166
2010-01-28

Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same

 #84
20090261267
2009-10-22

PROJECTION LENS ARRANGEMENT

 #85
20090261266
2009-10-22

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

 #86
20090224650
2009-09-10

Device for sustaining differential vacuum degrees for electron column

 #87
20090212229
2009-08-27

Projection lens arrangement

 #88
20090026389
2009-01-29

Multi-beam source

 #89
20080315096
2008-12-25

Portable electron microscope using micro-column

 #90
20080277584
2008-11-13

Method for Changing Energy of Electron Beam in Electron Column

 #91
20080210866
2008-09-04

Motioning Equipment for Electron Column

 #92
20080203881
2008-08-28

Micro-column with simple structure

 #93
20080073547
2008-03-27

Apparatus for generating a plurality of beamlets

 #94
20080067376
2008-03-20

CHARGED PARTICLE BEAM APPARATUS

 #95
20080023643
2008-01-31

Multiple beam charged particle optical system

 #96
20070029509
2007-02-08

Apparatus for generating a plurality of beamlets

 #97
20070029499
2007-02-08

Apparatus for generating a plurality of beamlets

 #98
20070018112
2007-01-25

Apparatus for generating a plurality of beamlets

 #99
20060255286
2006-11-16

Method for manufacturing a lens assembly of microcolumn and lens assembly of microcolumn manufactured by the same

 #100
20060192141
2006-08-31

Method and devices for producing corpuscular radiation systems

 #101
20060163488
2006-07-27

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

 #102
20060151716
2006-07-13

Micro-column electron beam apparatus

 #103
20060151713
2006-07-13

Multiple lens assembly and charged particle beam device comprising the same

 #104
20060131752
2006-06-22

Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate

 #105
20060131698
2006-06-22

Wafer-scale microcolumn array using low temperature co-fired ceramic substrate

 #106
20060076489
2006-04-13

Charged particle beam apparatus

 #107
20060071175
2006-04-06

Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof

 #108
20060006342
2006-01-12

Mechanism for sealing

 #109
20050266322
2005-12-01

Electron beam lens for micro-column electron beam apparatus and method of fabricating the same

 #110
20050263712
2005-12-01

Electron beam lens for micro-column electron beam apparatus and method of fabricating the same

 #111
20050253082
2005-11-17

Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method

 #112
20050244821
2005-11-03

Method of identification and quantification of biological molecules and apparatus therefore

 #113
20050199822
2005-09-15

MEMS based charged particle deflector design

 #114
20050199821
2005-09-15

Compact microcolumn for automated assembly

 #115
20050092929
2005-05-05

Integrated sub-nanometer-scale electron beam systems

 #116
20050087696
2005-04-28

Electron beam lens for micro-column electron beam apparatus and method of fabricating the same