H01J2237/14 - CPC Classification Index

#1

20260045442

2026-02-12

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

#2

20240162058

2024-05-16

TOOLS AND METHODS FOR SUBTRACTIVE METAL PATTERNING

#3

20230056463

2023-02-23

Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method

#4

20220262594

2022-08-18

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

#5

20210110996

2021-04-15

Method and apparatus for examining a beam of charged particles

#6

20200243296

2020-07-30

Objective lens arrangement usable in particle-optical systems

#7

20200176216

2020-06-04

Multiple electron beam inspection apparatus with through-hole with spiral shape

#8

20200135428

2020-04-30

Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method

#9

20200058463

2020-02-20

Methods and systems for plasma deposition and treatment

#10

20200035449

2020-01-30

Charged particle beam device and capturing condition adjusting method in charged particle beam device

#11

20190122856

2019-04-25

Multi-charged-particle beam writing apparatus

#12

20190035595

2019-01-31

Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus

#13

20180374670

2018-12-27

Methods and systems for plasma deposition and treatment

#14

20180261422

2018-09-13

Scanning electron microscope

#15

20180138008

2018-05-17

Ion source

#16

20180138007

2018-05-17

Ion Implanter

#17

20170294287

2017-10-12

Objective lens arrangement usable in particle-optical systems

#18

20170287674

2017-10-05

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#19

20170281980

2017-10-05

Adaptive pencil beam scanning

#20

20170062179

2017-03-02

Vacuum tube electron microscope

#21

20170040139

2017-02-09

Electron beam device

#22

20160322190

2016-11-03

System and method for imaging a sample with an electron beam with a filtered energy spread

#23

20160314929

2016-10-27

Beam Guidance System, Particle Beam Therapy System and Method

#24

20160172150

2016-06-16

Swing objective lens

#25

20160111251

2016-04-21

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#26

20160056011

2016-02-25

Aberration correction apparatus, device having the same, and method for correcting aberration of charged particles

#27

20160035533

2016-02-04

Energy filter for charged particle beam apparatus

#28

20160020063

2016-01-21

Charged particle beam writing apparatus and charged particle beam writing method

#29

20150364290

2015-12-17

Charged particle beam application device

#30

20150311037

2015-10-29

Ion implanter and ion implantation method

#31

20150279609

2015-10-01

Method for removing foreign substances in charged particle beam device, and charged particle beam device

#32

20150248990

2015-09-03

Energy-discrimination detection device

#33

20150228450

2015-08-13

Charged particle beam apparatus having needle probe that tracks target position changes

#34

20150214001

2015-07-30

Correlative optical and charged particle microscope

#35

20150170876

2015-06-18

Method of investigating the wavefront of a charged-particle beam

#36

20150123005

2015-05-07

Particle beam transport apparatus

#37

20150034836

2015-02-05

Electron beam equipment

#38

20140366801

2014-12-18

High-energy ion implanter

#39

20140158902

2014-06-12

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#40

20120138791

2012-06-07

Electron beam column and methods of using same

#41

20120104252

2012-05-03

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#42

20110210263

2011-09-01

Particle beam transport apparatus and method of transporting a particle beam with small beam spot size

#43

20110148297

2011-06-23

Multi-column electron beam exposure apparatus and magnetic field generation device

#44

20110089321

2011-04-21

Ion beam apparatus and method employing magnetic scanning

#45

20110049361

2011-03-03

Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus

#46

20100270468

2010-10-28

System and method for a charged particle beam

#47

20100181479

2010-07-22

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#48

20090289193

2009-11-26

Ion implantation apparatus and method of correcting deviation angle of ion beam

#49

20090266984

2009-10-29

Plasma ion source mass spectrometer

#50

20090261248

2009-10-22

Ion beam apparatus and method employing magnetic scanning

#51

20090206270

2009-08-20

Ion beam apparatus and method for ion implantation

#52

20090206258

2009-08-20

Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method

#53

20090159810

2009-06-25

Particle-Optical Component

#54

20090108199

2009-04-30

System and method to determine focus parameters during an electron beam inspection

#55

20080185519

2008-08-07

Charged particle beam apparatus

#56

20080121810

2008-05-29

System and method for a charged particle beam

#57

20080054184

2008-03-06

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#58

20070096620

2007-05-03

Electron gun

#59

20060289804

2006-12-28

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#60

20060060782

2006-03-23

Scanning electron microscope

#61

20060016989

2006-01-26

Electron beam apparatus and a device manufacturing method using the same apparatus

#62

20050139773

2005-06-30

Scanning electron microscope

#63

16522415

2020-11-03

Corrector transfer optics for Lorentz EM

#64

15856211

2018-12-25

Probe assembly with high bandwidth beam