H01J2237/1405 - CPC Classification Index

ClassID:

206406 ⎘

H01J2237/1405 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Lenses magnetic Constructional details

Sub-classes:

H01J2237/141 » Coils 67
H01J2237/1415 » Bores or yokes, i.e. magnetic circuit in general 43

Recent Application in this class:

20250285830

2025-09-11

MULTI-BEAM IMAGE ACQUISITION APPARATUS AND DRIFT CORRECTION METHOD FOR MULTIPLE SECONDARY ELECTRON BEAMS

20250182997

2025-06-05

TRANSMISSION ELECTRON MICROSCOPE WITH VARIABLE EFFECTIVE FOCAL LENGTH

20250079111

2025-03-06

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED ALIGNMENT AND METHOD FOR ALIGNING THE MULTI-BEAM PARTICLE MICROSCOPE, AND COMPUTER PROGRAM PRODUCT

20230326704

2023-10-12

MINIATURE HYBRID ELECTRON BEAM COLUMN

20230113759

2023-04-13

CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE

20220148844

2022-05-12

COMPOSITE SOLENOID MAGNETIC LENS

20210249218

2021-08-12

MULTIPOLE LENS, ABERRATION CORRECTOR USING SAME, AND CHARGED PARTICLE BEAM DEVICE

20210027976

2021-01-28

Beam irradiation device

20200251305

2020-08-06

CHARGED PARTICLE BEAM APPARATUS

#10

20200243296

2020-07-30

Objective lens arrangement usable in particle-optical systems

#11

20200194223

2020-06-18

Joint electron-optical columns for flood-charging and image-forming in voltage contrast wafer inspections

#12

20190304737

2019-10-03

Charged particle beam irradiation apparatus, charged particle beam image acquisition apparatus, and charged particle beam inspection apparatus

#13

20190287754

2019-09-19

Beam irradiation device

#14

20190228945

2019-07-25

Aberration corrector and electron microscope

#15

20190189388

2019-06-20

Composite beam apparatus

#16

20180190469

2018-07-05

Aberration correction method, aberration correction system, and charged particle beam apparatus

#17

20180130633

2018-05-10

Objective lens and transmission electron microscope

#18

20180076001

2018-03-15

Composite beam apparatus

#19

20170294287

2017-10-12

Objective lens arrangement usable in particle-optical systems

#20

20160268098

2016-09-15

SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND MEASUREMENT METHOD USING THE SAME

#21

20160189914

2016-06-30

Device and method for optimizing diffusion section of electron beam

#22

20150371820

2015-12-24

Charged particle beam apparatus

#23

20150332891

2015-11-19

User interface for an electron microscope

#24

20150279610

2015-10-01

Notched magnetic lens for improved sample access in an SEM

#25

20150155133

2015-06-04

Charged particle beam apparatus

#26

20150083926

2015-03-26

Notched magnetic lens for improved sample access in an SEM

#27

20150083912

2015-03-26

Charged particle beam apparatus

#28

20150076362

2015-03-19

Charged particle beam apparatus

#29

20150060670

2015-03-05

System and method for controlling charge-up in an electron beam apparatus

#30

20140326895

2014-11-06

Permanent magnet based high performance multi-axis immersion electron lens array with low axial leakage field

#31

20140291510

2014-10-02

Charged particle beam apparatus

#32

20140252245

2014-09-11

Tubular permanent magnet used in a multi-electron beam device

#33

20140166893

2014-06-19

Electromagnetic lens for electron beam exposure apparatus

#34

20140145089

2014-05-29

Apparatus having a magnetic lens configured to diverge an electron beam

#35

20110309263

2011-12-22

Dual beam system

#36

20110139996

2011-06-16

Multi-axis magnetic lens

#37

20110133083

2011-06-09

Compact scanning electron microscope

#38

20110114851

2011-05-19

Method and apparatus for modifying a ribbon-shaped ion beam

#39

20110114850

2011-05-19

Method and apparatus for modifying a ribbon-shaped ion beam

#40

20110018470

2011-01-27

Electron gun with magnetic immersion double condenser lenses

#41

20110012018

2011-01-20

Magnetic lens, method for focusing charged particles and charged particle energy analyzer

#42

20100294932

2010-11-25

Magnetic domain imaging system

#43

20100230590

2010-09-16

Compact Scanning Electron Microscope

#44

20100194874

2010-08-05

User interface for an electron microscope

#45

20100171037

2010-07-08

Compact scanning electron microscope

#46

20100084566

2010-04-08

Electron Column Using A Magnetic Lens Layer Having Permanent Magnets

#47

20100025578

2010-02-04

Dual beam system

#48

20090321630

2009-12-31

Post-decel magnetic energy filter for ion implantation systems

#49

20090261266

2009-10-22

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

#50

20090159810

2009-06-25

Particle-Optical Component

#51

20090108200

2009-04-30

Method and system of performing three-dimensional imaging using an electron microscope

#52

20090039280

2009-02-12

Magnetic lens assembly

#53

20090026384

2009-01-29

Electrostatic lens assembly

#54

20080224062

2008-09-18

Lens coil cooling of a magnetic lens

#55

20080135755

2008-06-12

Scanning electron microscope

#56

20080073532

2008-03-27

Observational liquid/gas environment combined with specimen chamber of electron microscope

#57

20080067396

2008-03-20

Electron lens and charged particle beam apparatus

#58

20080048118

2008-02-28

Electron beam apparatus and method for production of its specimen chamber

#59

20080035860

2008-02-14

Dual beam system

#60

20080035853

2008-02-14

Illumination condenser for a particle optical projection system

#61

20070278416

2007-12-06

Multipole lens and method of fabricating same

#62

20070215812

2007-09-20

Correction lens system for a particle beam projection device

#63

20060232445

2006-10-19

Electron beam apparatus and method for production of its specimen chamber

#64

20060219946

2006-10-05

Electron beam apparatus and method for production of its specimen chamber

#65

20060163488

2006-07-27

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

#66

20060151713

2006-07-13

Multiple lens assembly and charged particle beam device comprising the same

#67

20060016988

2006-01-26

Beam directing system and method for use in a charged particle beam column

#68

20050040137

2005-02-24

Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors

#69

20050035291

2005-02-17

Dual beam system

#70

16033987

2019-12-10

High performance inspection scanning electron microscope device and method of operating the same