206486 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means; Semiconductor detectors, e.g. diodes; X-ray Wavelength-dispersive spectrometer
Electron probe microanalyzer and storage medium
#2Automated mineral classification
#3X-ray detection system
#4Wavelength-dispersive X-ray spectrometer
#5Method and apparatus for analyzing sample
#6X-ray analyzer using electron beam