206484 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means; Semiconductor detectors, e.g. diodes X-ray
Sub-classes:High Resolution Light Valve Detector for Detecting X-Ray
#2SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS
#3Charged particle beam device
#4High resolution light valve detector for detecting x-ray
#5Sensor module for scanning electron microscopy applications
#6Scanning electron microscope with composite detection system and specimen detection method
#7Scanning electron microscope and method for determining crystal orientations
#8X-ray analysis in air
#9Radiolucent window, radiation detector and radiation detection apparatus
#10X-ray analysis in air
#11Source for selectively providing positively or negatively charged particles for a focusing column
#12Charged-particle lens that transmits emissions from sample
#13Radiolucent window, radiation detector and radiation detection apparatus
#14Back scattered electron detector
#15Source for selectively providing positively or negatively charged particles for a focusing column
#16X-ray detector including integrated electron detector
#17Electron microscope with integrated detector(s)
#18Inductively coupled plasma source as an electron beam source for spectroscopic analysis
#19Silicon drift diode detector configured to switch between pulse height measurement mode and current measurement mode
#20Electron microscope
#21Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same
#22Electron microscope with integrated detector(s)
#23Charged particle filter
#24Silicon drift X-ray detector
#25Charged particle analyser and method using electrostatic filter grids to filter charged particles
#26Methods for detecting and analyzing piled-up X-rays in an X-ray spectrometry system
#27Charged particle beam apparatus
#28Charged particle beam apparatus
#29Charged particle beam apparatus
#30Optical axis adjusting mechanism for X-ray lens, X-ray analytical instrument, and method of adjusting optical axis of X-ray lens
#31Scanning electron microscope
#32Charged particle beam apparatus