H01J2237/2444 - CPC Classification Index

ClassID:

206489 ⎘

H01J2237/2444 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means Electron Multiplier

Sub-classes:

H01J2237/24445 » using avalanche in a gas 13

Recent Application in this class:

20160322193

2016-11-03

Inspection device and measurement device

20140361167

2014-12-11

Scanning electron microscope

20130327953

2013-12-12

Particle detection system

20120261574

2012-10-18

Electron beam apparatus and electron beam inspection method

20120145898

2012-06-14

Particle detection system

20120132801

2012-05-31

Method and an apparatus of an inspection system using an electron beam

20120068068

2012-03-22

Charged particle detectors

20110260069

2011-10-27

Particle detection system

20110121176

2011-05-26

Sample inspection methods, systems and components

#10

20110101223

2011-05-05

Electron beam apparatus and electron beam inspection method

#11

20110095178

2011-04-28

Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectrometer

#12

20110095177

2011-04-28

Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectrometer

#13

20100108881

2010-05-06

Scanning transmission electron microscope using gas amplification

#14

20100090109

2010-04-15

SCANNING ELECTRON MICROSCOPE

#15

20090101817

2009-04-23

CHARGED PARTICLE APPLICATION APPARATUS

#16

20090057556

2009-03-05

Method and apparatus of an inspection system using an electron beam

#17

20090014650

2009-01-15

Detector for electron column and method for detecting electrons for electron column

#18

20080099673

2008-05-01

Electron beam apparatus and electron beam inspection method

#19

20080078934

2008-04-03

Charged particle beam instrument and method of detecting charged particles

#20

20080073534

2008-03-27

Scanning electron microscope

#21

20080056746

2008-03-06

Surface-potential distribution measuring apparatus, image carrier, and image forming apparatus

#22

20080035843

2008-02-14

Scanning electron microscope

#23

20070263223

2007-11-15

Time-resolved measurement apparatus and position-sensitive election multiplier tube

#24

20070215803

2007-09-20

Method and an apparatus of an inspection system using an electron beam

#25

20060255283

2006-11-16

Apparatus for amplifying a stream of charged particles

#26

20060186337

2006-08-24

Scanning electron microscope

#27

20060151699

2006-07-13

Method and an apparatus of an inspection system using an electron beam

#28

20060151695

2006-07-13

Process and device for measuring ions

#29

20060033035

2006-02-16

Electron microscope array for inspection and lithography

#30

20050205782

2005-09-22

Method and an apparatus of an inspection system using an electron beam