206490 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means; Electron Multiplier using avalanche in a gas
Method for detector equalization during the imaging of objects with a multi-beam particle microscope
#2Charged particle optical apparatus for through-the-lens detection of particles
#3Charged particle optical apparatus for through-the-lens detection of particles
#4Charged particle optical apparatus for through-the-lens detection of particles
#5Charged particle beam processing using process gas and cooled surface
#6Electron beam-induced etching
#7Scanning electron microscope
#8Electron beam-induced etching
#9Charged particle detector system comprising a conversion electrode
#10Scanning transmission electron microscope using gas amplification
#11Multistage gas cascade amplifier
#12Scanning electron microscope
#13Scanning electron microscope