206497 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means Secondary particle detectors
Charged particle beam device having an energy filter
#302INSPECTION APPARATUS
#303Adjustable cathodoluminescence detection system and microscope employing such a system
#304System and process for measuring strain in materials at high spatial resolution
#305Hot spot identification, inspection, and review
#306Pattern critical dimension measurement equipment and method for measuring pattern critical dimension
#307Scanning charged particle microscope, image acquisition method, and electron detection method
#308Scanning electron microscope
#309Semiconductor drift detector and corresponding operating method
#310Charged particle beam device and measuring method using the same
#311Scanning electron microscope and scanning transmission electron microscope
#312Charged particle beam device having an energy filter
#313Three-dimensional mapping using scanning electron microscope images
#314On-axis detector for charged particle beam system
#315High efficiency secondary and back scattered electron detector
#316Three-dimensional mapping using scanning electron microscope images
#317Dose measurement device for plasma-immersion ion implantation
#318Inductively coupled plasma source as an electron beam source for spectroscopic analysis
#319HOLLOW CYLINDRICAL ANALYZER
#320Silicon drift diode detector configured to switch between pulse height measurement mode and current measurement mode
#321Adjustable cathodoluminescence detection system and microscope employing such a system
#322Charged particle detector system comprising a conversion electrode
#323Charged particle radiation device with bandpass detection
#324Composite charged-particle-beam apparatus
#325Charged particle beam apparatus, and sample processing and observation method
#326Charged particle beam apparatus
#327Charged-particle microscopy with occlusion detection
#328Electron beam apparatus and electron beam inspection method
#329Electron beam drift detection device and method for detecting electron beam drift
#330Inspection device
#331Particle beam system
#332IN-CHAMBER ELECTRON DETECTOR
#333System and method for localization of large numbers of fluorescent markers in biological samples
#334Secondary-electron detector and charged particle beam apparatus
#335Charged particle detectors
#336Surface analyzer of object to be measured and analyzing method
#337Movable detector for charged particle beam inspection or review
#338Particle detection system
#339Charged corpuscular particle beam irradiating method, and charged corpuscular particle beam apparatus
#340ELECTRON DETECTION SYSTEMS AND METHODS
#341Electron beam apparatus and electron beam inspection method
#342Particle beam systems and methods
#343Scanning electron microscope
#344Charged particle analyser and method using electrostatic filter grids to filter charged particles
#345Electron beam apparatus and method of operating the same
#346Electron beam apparatus
#347Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
#348SCANNING ELECTRON MICROSCOPE
#349Electron-beam device and detector system
#350Three modes particle detector
#351Scanning electron microscope and similar apparatus
#352Charged Particle Inspection Method and Charged Particle System
#353Multistage gas cascade amplifier
#354Apparatus and method for inspection and measurement
#355Inspection method for semiconductor wafer and apparatus for reviewing defects
#356Charged particle-optical systems, methods and components
#357Inspection method for semiconductor wafer and apparatus for reviewing defects
#358Scanning electron microscope for determining quality of a semiconductor pattern
#359CHARGED PARTICLE BEAM APPARATUS, AND SAMPLE PROCESSING AND OBSERVATION METHOD
#360In-chamber electron detector
#361Non-destructive, below-surface defect rendering using image intensity analysis
#362Charged particle beam apparatus and method for operating a charged particle beam apparatus
#363Scanning electron microscope
#364Apparatus for detecting backscattered electrons in a beam apparatus
#365Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system
#366Scanning electron microscope
#367Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same
#368Determining dopant information
#369Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
#370Electron beam apparatus and electron beam inspection method
#371Charged particle beam instrument and method of detecting charged particles
#372Scanning electron microscope
#373CHARGED PARTICLE BEAM APPARATUS
#374Scanning electron microscope
#375Scanning electron microscope
#376Electron anti-fogging baffle used as a detector
#377Electron-beam device and detector system
#378Scanning electron microscope and image signal processing method
#379Particle detector for secondary ions and direct and or indirect secondary electrons
#380Detector system of secondary and backscattered electrons for a scanning electron microscope
#381Analyzing system and charged particle beam device
#382Charged particle beam device for high spatial resolution and multiple perspective imaging
#383Scanning electron microscope
#384Apparatus and method for inspection and testing of flat panel display substrates
#385Scanning electron microscope
#386Ion detector for ion beam applications
#387Scanning electron microscope
#388Dual detector optics for simultaneous collection of secondary and backscattered electrons
#389System and method for voltage contrast analysis of a wafer
#390Trigger probe for determining the orientation of the power distribution of an electron beam
#391Charged particle guide
#392Scanning electron microscope and similar apparatus
#393Transresistance amplifier for a charged particle detector
#394Scanning electron microscope
#395Scanning electron microscope
#396Non-dispersive charged particle energy analyzer
#397Method of operating a particle beam system, particle beam system, non-transitory storage medium and program
#398Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device
#399Imaging an area that includes an upper surface and a hole
#400Array-based characterization tool
#401Detection unit, scanning charged particle beam device and a method
#402Probe assembly with high bandwidth beam
#403Image generation apparatus
#404Method and system for fast inspecting defects