Patents-Review.com
ClassID:

206497 ⎘

H01J2237/2448 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means Secondary particle detectors

Recent Application in this class:
#1
20260135061
2026-05-14

Charged Particle Beam Device and Method for Estimating Sample Characteristics

 #2
20260058088
2026-02-26

CHARGED PARTICLE BEAM DEVICE AND CONTROL METHOD THEREOF

 #3
20260045442
2026-02-12

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

 #4
20260018376
2026-01-15

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #5
20250372341
2025-12-04

METHOD OF VIRTUAL SECTIONING OF STEM SAMPLE USING COMBINATION OF SE

 #6
20250357068
2025-11-20

ELECTRON BEAM INSPECTIONS WITH HIGH SENSITIVITY AND THROUGHPUT

 #7
20250349504
2025-11-13

CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS

 #8
20250336636
2025-10-30

METHOD AND SYSTEM FOR FINE FOCUSING SECONDARY BEAM SPOTS ON DETECTOR FOR MULTI-BEAM INSPECTION APPARATUS

 #9
20250336635
2025-10-30

CHARGED-PARTICLE BEAM APPARATUS WITH FAST FOCUS CORRECTION AND METHODS THEREOF

 #10
20250316446
2025-10-09

METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE, PARTICLE BEAM MICROSCOPE AND COMPUTER PROGRAM PRODUCT

 #11
20250316444
2025-10-09

RADIATION TOLERANT DETECTOR ARCHITECTURE FOR CHARGED PARTICLE DETECTION

 #12
20250285833
2025-09-11

Charged Particle Beam Device

 #13
20250285830
2025-09-11

MULTI-BEAM IMAGE ACQUISITION APPARATUS AND DRIFT CORRECTION METHOD FOR MULTIPLE SECONDARY ELECTRON BEAMS

 #14
20250273426
2025-08-28

SAMPLE TIP

 #15
20250246399
2025-07-31

ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCATTERED CHARGED PARTICLE IMAGE RESOLUTION

 #16
20250232946
2025-07-17

CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD

 #17
20250174426
2025-05-29

OBJECTIVE LENS COVER AND CHARGED PARTICLE BEAM APPARATUS INCLUDING THE SAME

 #18
20250157782
2025-05-15

METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD

 #19
20250149290
2025-05-08

MULTIPLE-BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE-BEAM IMAGE ACQUISITION METHOD

 #20
20250140515
2025-05-01

X-RAY IMAGING SYSTEM FOR RADIATION THERAPY

 #21
20250104966
2025-03-27

MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF SECONDARY ELECTRON BEAMLETS ON A DETECTOR

 #22
20250087449
2025-03-13

Electron Filter

 #23
20250069845
2025-02-27

TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELECTRON MICROSCOPE

 #24
20250062098
2025-02-20

SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION

 #25
20250062096
2025-02-20

Charged Particle Beam Device, and Beam Deflection Method in Charged Particle Beam Device

 #26
20250046568
2025-02-06

SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE STAGE

 #27
20250046562
2025-02-06

OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME

 #28
20250037967
2025-01-30

CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS FOR IMAGING

 #29
20250006459
2025-01-02

METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE IN AN IMAGE IMAGED WITH A MULTI-BEAM CHARGED PARTICLE MICROSCOPE, CORRESPONDING COMPUTER PROGRAM PRODUCT AND MULTI-BEAM CHARGED PARTICLE MICROSCOPE

 #30
20250006456
2025-01-02

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

 #31
20250006454
2025-01-02

CHARGED PARTICLE BEAM DEVICE

 #32
20240379324
2024-11-14

METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASURED EELS SPECTRUM

 #33
20240371601
2024-11-07

Charged Particle Beam System

 #34
20240371598
2024-11-07

FOCUSED ION BEAM SYSTEM

 #35
20240282547
2024-08-22

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD

 #36
20240212973
2024-06-27

Processor System Capable of Communicating with Multicharged Particle Beam Device and Method Thereof

 #37
20240194440
2024-06-13

SYSTEM AND METHOD FOR MULTI-BEAM ELECTRON MICROSCOPY USING A DETECTOR ARRAY

 #38
20240177964
2024-05-30

Charged Particle Beam System

 #39
20240153736
2024-05-09

ELECTRON MICROSCOPE, DEVICE FOR MEASURING ELECTRON-PHOTON CORRELATION, AND METHOD FOR MEASURING ELECTRON-PHOTON CORRELATION

 #40
20240128047
2024-04-18

Sample Inspection Apparatus, Inspection System, Thin Piece Sample Fabrication Apparatus, and Method for Inspecting Sample

 #41
20240128043
2024-04-18

CHARGED PARTICLE APPARATUS AND METHOD

 #42
20240096587
2024-03-21

DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM

 #43
20240096586
2024-03-21

Method and system of image-forming multi-electron beams

 #44
20240029994
2024-01-25

Inspection System

 #45
20240014003
2024-01-11

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #46
20240014002
2024-01-11

CHARGED PARTICLE BEAM APPARATUS

 #47
20230420215
2023-12-28

CHARGED PARTICLE BEAM DEVICE AND IMAGING METHOD

 #48
20230395349
2023-12-07

Creating multiple electron beams with a photocathode film

 #49
20230386781
2023-11-30

Charged Particle Beam Device, Charged Particle Beam System, and Adjustment Method

 #50
20230377837
2023-11-23

CHARGED PARTICLE BEAM APPARATUS

 #51
20230377836
2023-11-23

Analysis System

 #52
20230335373
2023-10-19

CHARGED PARTICLE BEAM APPARATUS AND PROCESSOR SYSTEM

 #53
20230326713
2023-10-12

Hybrid scanning electron microscopy and acousto-optic based metrology

 #54
20230326706
2023-10-12

APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A SAMPLE

 #55
20230324318
2023-10-12

CHARGED PARTICLE TOOL, CALIBRATION METHOD, INSPECTION METHOD

 #56
20230317406
2023-10-05

Charged Particle Beam System

 #57
20230304949
2023-09-28

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD AND IMAGE

 #58
20230274910
2023-08-31

Charged Particle Beam Apparatus

 #59
20230241650
2023-08-03

GAS SUPPLY DEVICE, SYSTEM HAVING A GAS SUPPLY DEVICE, AND PARTICLE BEAM APPARATUS HAVING A GAS DELIVERY DEVICE OR THE SYSTEM

 #60
20230230801
2023-07-20

Focused Ion Beam System and Method of Correcting Deviation of Field of View of Ion Beam

 #61
20230230800
2023-07-20

SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS

 #62
20230215685
2023-07-06

ENHANCED ARCHITECTURE FOR HIGH-PERFORMANCE DETECTION DEVICE TECHNICAL FIELD

 #63
20230154722
2023-05-18

Pulsed charged-particle beam system

 #64
20230139482
2023-05-04

Ion implanter and ion implantation method

 #65
20230136198
2023-05-04

WIEN FILTER AND MULTIPLE ELECTRON BEAM INSPECTION APPARATUS

 #66
20230127466
2023-04-27

Device for observing permeation and diffusion path of observation target gas, observation target gas measuring method, point-defect location detecting device, point-defect location detecting method, and observation samples

 #67
20230113759
2023-04-13

CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE

 #68
20230113062
2023-04-13

Electron beam inspection apparatus

 #69
20230112447
2023-04-13

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION

 #70
20230109853
2023-04-13

SCANNING ELECTRON MICROSCOPE

 #71
20230109695
2023-04-13

ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCATTERED CHARGED PARTICLE IMAGE RESOLUTION

 #72
20230104558
2023-04-06

Bandpass charged particle energy filtering detector for charged particle tools

 #73
20230102715
2023-03-30

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEAM INSPECTION APPARATUS, AND MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD

 #74
20230040558
2023-02-09

System and method for reducing the charging effect in a transmission electron microscope system

 #75
20230020194
2023-01-19

Multiple charged-particle beam apparatus with low crosstalk

 #76
20230005706
2023-01-05

CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS

 #77
20230005704
2023-01-05

Scanning electron microscope device and electron beam inspection apparatus

 #78
20220392741
2022-12-08

Systems and methods of profiling charged-particle beams

 #79
20220392738
2022-12-08

Charged particle beam apparatus and image acquiring method

 #80
20220359150
2022-11-10

Charged particle beam device

 #81
20220351938
2022-11-03

Charged particle beam system

 #82
20220351937
2022-11-03

Back-scatter electrons (BSE) imaging with a SEM in tilted mode using cap bias voltage

 #83
20220351936
2022-11-03

MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION

 #84
20220336183
2022-10-20

Multiple electron beam image acquisition method, multiple electron beam image acquisition apparatus, and multiple electron beam inspection apparatus

 #85
20220328279
2022-10-13

Charged particle beam device and inspection method

 #86
20220319808
2022-10-06

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #87
20220319804
2022-10-06

Overlay Measurement System and Overlay Measurement Device

 #88
20220301815
2022-09-22

Charged particle beam system and overlay misalignment measurement method

 #89
20220301813
2022-09-22

Charged particle beam device

 #90
20220301812
2022-09-22

Ion beam device

 #91
20220301811
2022-09-22

Cross-talk cancellation in multiple charged-particle beam inspection

 #92
20220299456
2022-09-22

Inspection apparatus

 #93
20220262594
2022-08-18

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

 #94
20220260509
2022-08-18

Verification plates with automated evaluation of melt performance

 #95
20220254597
2022-08-11

Charged particle beam device

 #96
20220246393
2022-08-04

Scanning electron microscope

 #97
20220244412
2022-08-04

Scintillator for charged particle beam apparatus and charged particle beam apparatus

 #98
20220230845
2022-07-21

Charged particle beam device

 #99
20220208509
2022-06-30

Primary charged particle beam current measurement

 #100
20220199361
2022-06-23

Secondary electron probe and secondary electron detector

 #101
20220189729
2022-06-16

Charged particle beam device and operation method therefor

 #102
20220157558
2022-05-19

Charged particle beam device and analysis method

 #103
20220139667
2022-05-05

Charged particle beam device

 #104
20220115203
2022-04-14

Charged particle beam apparatus and control method

 #105
20220108866
2022-04-07

Device defect detection method using a charged particle beam

 #106
20220102108
2022-03-31

Charged particle beam apparatus

 #107
20220059315
2022-02-24

Charged particle beam device

 #108
20220013327
2022-01-13

Pattern inspection apparatus and pattern outline position acquisition method

 #109
20220013326
2022-01-13

Charged particle beam device

 #110
20210391142
2021-12-16

Scanning electron microscope

 #111
20210384008
2021-12-09

Apparatus of plural charged-particle beams

 #112
20210384007
2021-12-09

Scanning electron microscope

 #113
20210384003
2021-12-09

Charged particle beam device

 #114
20210366683
2021-11-25

Charged particle beam device and method for inspecting and/or imaging a sample

 #115
20210335569
2021-10-28

Scanning electron microscope and a method for overlay monitoring

 #116
20210327674
2021-10-21

Electron source, method for manufacturing the same, and electron beam device using the same

 #117
20210319977
2021-10-14

Charged particle beam apparatus with multiple detectors and methods for imaging

 #118
20210319974
2021-10-14

Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus

 #119
20210313140
2021-10-07

Charged particle beam device

 #120
20210296086
2021-09-23

Method and system for plasma assisted low vacuum charged-particle microscopy

 #121
20210296079
2021-09-23

Particle beam apparatus and composite beam apparatus

 #122
20210280387
2021-09-09

Charged particle detection system

 #123
20210272770
2021-09-02

Scanning electron microscope

 #124
20210249221
2021-08-12

Charged particle beam apparatus

 #125
20210202206
2021-07-01

Charged particle beam inspection apparatus and charged particle beam inspection method

 #126
20210193437
2021-06-24

Multiple charged-particle beam apparatus with low crosstalk

 #127
20210193431
2021-06-24

Method and system for testing an integrated circuit

 #128
20210172891
2021-06-10

Method and system for inspecting an EUV mask

 #129
20210151291
2021-05-20

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #130
20210151284
2021-05-20

Secondary charged particle imaging system

 #131
20210140901
2021-05-13

Electron microscope, and method for observing measurement sample

 #132
20210134558
2021-05-06

Device for measuring emission angle of particle beam

 #133
20210134557
2021-05-06

ARCHITECTURE FOR LARGE ACTIVE AREA HIGH SPEED DETECTOR

 #134
20210134556
2021-05-06

Wafer inspection based on electron beam induced current

 #135
20210131801
2021-05-06

Calibration sample, electron beam adjustment method and electron beam apparatus using same

 #136
20210090852
2021-03-25

Use of electron beam scanning electron microscopy for characterization of a sidewall occluded from line-of-sight of the electron beam

 #137
20210082660
2021-03-18

Charged particle beam device and analysis method

 #138
20210082659
2021-03-18

Light guide assembly for an electron microscope

 #139
20210066035
2021-03-04

Sensor module for scanning electron microscopy applications

 #140
20210066033
2021-03-04

Charged particle beam control device

 #141
20210066028
2021-03-04

Charged particle beam device

 #142
20210066021
2021-03-04

Multi-pole deflector for charged particle beam and charged particle beam imaging apparatus

 #143
20210050178
2021-02-18

Charged particle optical apparatus for through-the-lens detection of particles

 #144
20210043420
2021-02-11

Scanning electron microscope and method for measuring pattern

 #145
20210043412
2021-02-11

Charged particle beam apparatus

 #146
20210035773
2021-02-04

System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

 #147
20210035770
2021-02-04

Charged particle beam apparatus

 #148
20210027977
2021-01-28

Charged particle beam device

 #149
20200411278
2020-12-31

Electron microscope and beam irradiation method

 #150
20200381207
2020-12-03

Multiple charged-particle beam apparatus with low crosstalk

 #151
20200365365
2020-11-19

Charged particle beam device

 #152
20200365364
2020-11-19

Inspection device

 #153
20200312609
2020-10-01

Charged particle detection system

 #154
20200312608
2020-10-01

Secondary electron detection efficiency

 #155
20200312606
2020-10-01

Charged particle beam device

 #156
20200303161
2020-09-24

Ion implanter and ion implantation method

 #157
20200286709
2020-09-10

Multiple electron beam inspection apparatus and multiple electron beam inspection method

 #158
20200286704
2020-09-10

Multiple electron beams irradiation apparatus

 #159
20200273664
2020-08-27

Charged particle detector with gain element

 #160
20200243299
2020-07-30

Detection of buried features by backscattered particles

 #161
20200234914
2020-07-23

Low voltage scanning electron microscope and method for specimen observation

 #162
20200234913
2020-07-23

Method of operating a particle beam system, particle beam system and computer program product

 #163
20200227232
2020-07-16

Method and system for charged particle microscopy with improved image beam stabilization and interrogation

 #164
20200203121
2020-06-25

OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS

 #165
20200185191
2020-06-11

Particle beam system and method for operating a particle beam system

 #166
20200183024
2020-06-11

Radiation detector and radiation detection apparatus

 #167
20200168430
2020-05-28

ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND ELECTRON BEAM IMAGE ACQUISITION METHOD

 #168
20200161085
2020-05-21

Nano vacuum tube

 #169
20200161082
2020-05-21

Multiple electron beam inspection apparatus and multiple electron beam inspection method

 #170
20200161081
2020-05-21

Using deep learning based defect detection and classification schemes for pixel level image quantification

 #171
20200152421
2020-05-14

Apparatus of plural charged-particle beams

 #172
20200152418
2020-05-14

Screening method and apparatus for detecting an object of interest

 #173
20200135425
2020-04-30

Charged particle optical apparatus for through-the-lens detection of particles

 #174
20200066483
2020-02-27

Method for processing an object

 #175
20200051777
2020-02-13

Method for evaluating a region of an object

 #176
20200027687
2020-01-23

Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device

 #177
20200013583
2020-01-09

Charged particle beam apparatus, observation method using charged particle beam apparatus, and program

 #178
20200006031
2020-01-02

Charged particle beam image acquisition apparatus

 #179
20190393014
2019-12-26

Charged-particle beam device

 #180
20190378683
2019-12-12

Measuring a height profile of a hole formed in non-conductive region

 #181
20190362931
2019-11-28

Charged particle beam device

 #182
20190362929
2019-11-28

Scanning electron microscope

 #183
20190362928
2019-11-28

Multiple electron beam image acquisition apparatus, and alignment method of multiple electron beam optical system

 #184
20190355547
2019-11-21

Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method

 #185
20190355546
2019-11-21

MULTIPLE ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE ELECTRON BEAM IMAGE ACQUISITION METHOD

 #186
20190348255
2019-11-14

Scanning electron microscope and sample observation method using scanning electron microscope

 #187
20190333733
2019-10-31

Laser-assisted electron-beam inspection for semiconductor devices

 #188
20190323835
2019-10-24

Height detection apparatus and charged particle beam apparatus

 #189
20190311881
2019-10-10

Nondestructive sample imaging

 #190
20190311877
2019-10-10

Sample manipulation for nondestructive sample imaging

 #191
20190311875
2019-10-10

Charged particle beam device

 #192
20190304742
2019-10-03

Electron beam microscope

 #193
20190304737
2019-10-03

Charged particle beam irradiation apparatus, charged particle beam image acquisition apparatus, and charged particle beam inspection apparatus

 #194
20190295815
2019-09-26

Charged particle beam apparatus

 #195
20190280042
2019-09-12

Monolithic silicon pixel detector, and systems and methods for particle detection

 #196
20190279844
2019-09-12

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #197
20190279843
2019-09-12

Apparatus, method, and program for processing and observing cross section, and method of measuring shape

 #198
20190259568
2019-08-22

Charged particle beam apparatus, and method and program for limiting stage driving range thereof

 #199
20190259564
2019-08-22

Signal separator for a multi-beam charged particle inspection apparatus

 #200
20190237296
2019-08-01

Defect observation device

 #201
20190214222
2019-07-11

Charged particle beam device and aberration correction method for charged particle beam device

 #202
20190214221
2019-07-11

Multiple beam inspection apparatus and sensitivity correction method for multi-detector

 #203
20190198284
2019-06-27

ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE

 #204
20190195621
2019-06-27

Displacement measuring apparatus, electron beam inspection apparatus, and displacement measuring method

 #205
20190170671
2019-06-06

Method and system for inspecting an EUV mask

 #206
20190164722
2019-05-30

Cross section processing observation method and charged particle beam apparatus

 #207
20190088441
2019-03-21

ELECTRON EMISSION TUBE, ELECTRON IRRADIATION DEVICE, AND METHOD OF MANUFACTURING ELECTRON EMISSION TUBE

 #208
20190051487
2019-02-14

Optical system adjustment method of image acquisition apparatus

 #209
20190035598
2019-01-31

Nano vacuum tube

 #210
20190035595
2019-01-31

Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus

 #211
20190019651
2019-01-17

Imaging system and imaging method

 #212
20190019649
2019-01-17

Charged particle beam device, charged particle beam influencing device, and method of operating a charged particle beam device

 #213
20180366296
2018-12-20

High voltage power supply device and charged particle beam device

 #214
20180358199
2018-12-13

Charged particle beam device and scanning electron microscope

 #215
20180350555
2018-12-06

Apparatus of plural charged-particle beams

 #216
20180342368
2018-11-29

Charged particle optical apparatus for through-the-lens detection of particles

 #217
20180261425
2018-09-13

Charged particle detector and charged particle beam device using the same

 #218
20180261424
2018-09-13

Electron beam inspection apparatus and electron beam inspection method

 #219
20180261422
2018-09-13

Scanning electron microscope

 #220
20180247790
2018-08-30

Charged particle beam device and image forming method using same

 #221
20180233319
2018-08-16

Focused ion beam apparatus

 #222
20180233318
2018-08-16

Multi-column spacing for photomask and reticle inspection and wafer print check verification

 #223
20180218877
2018-08-02

Imaging device for imaging an object and for imaging a structural unit in a particle beam apparatus

 #224
20180204706
2018-07-19

Charged particle beam device

 #225
20180197713
2018-07-12

Integrated circuit analysis systems and methods with localized evacuated volume for e-beam operation

 #226
20180158648
2018-06-07

Charged particle beam device provided with ion pump

 #227
20180158645
2018-06-07

Sample chamber device for electron microscope, and electron microscope comprising same

 #228
20180145000
2018-05-24

Ion implantation method and ion implantation apparatus

 #229
20180090296
2018-03-29

Measurement of overlay and edge placement errors with an electron beam column array

 #230
20180033589
2018-02-01

Electron microscope with multiple types of integrated x-ray detectors arranged in an array

 #231
20170345614
2017-11-30

Charged particle bean device and information-processing device

 #232
20170345613
2017-11-30

Charged particle beam device

 #233
20170316915
2017-11-02

Charged particle beam apparatus

 #234
20170309445
2017-10-26

Quantitative secondary electron detection

 #235
20170301512
2017-10-19

Energy discriminating electron detector and scanning electron microscope using the same

 #236
20170294288
2017-10-12

Method and device for characterizing an electron beam

 #237
20170271124
2017-09-21

Secondary particle detection system of scanning electron microscope

 #238
20170263413
2017-09-14

Multi-beam lens device, charged particle beam device, and method of operating a multi-beam lens device

 #239
20170243716
2017-08-24

Inspection apparatus and inspection method

 #240
20170229284
2017-08-10

Ion beam device and sample observation method

 #241
20170213696
2017-07-27

Multi mode systems with retractable detectors

 #242
20170207061
2017-07-20

Charged particle beam apparatus and image forming method of charged particle beam apparatus

 #243
20170169993
2017-06-15

Multi charged particle beam apparatus, and shape adjustment method of multi charged particle beam image

 #244
20170125208
2017-05-04

Pattern inspection apparatus and pattern inspection method

 #245
20170092459
2017-03-30

Charged-particle-beam device

 #246
20170084423
2017-03-23

Method and system for noise mitigation in a multi-beam scanning electron microscopy system

 #247
20170084421
2017-03-23

Backscattered electrons (BSE) imaging using multi-beam tools

 #248
20170076910
2017-03-16

System for imaging a secondary charged particle beam with adaptive secondary charged particle optics

 #249
20170053774
2017-02-23

Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask

 #250
20170052129
2017-02-23

Method and system for inspecting an EUV mask

 #251
20170032925
2017-02-02

Charged particle detecting device and charged particle beam system with same

 #252
20170025241
2017-01-26

Apparatus of plural charged-particle beams

 #253
20170003235
2017-01-05

System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics

 #254
20160379798
2016-12-29

Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope

 #255
20160379795
2016-12-29

Charged particle beam apparatus

 #256
20160372304
2016-12-22

Method and system for charged particle microscopy with improved image beam stabilization and interrogation

 #257
20160343537
2016-11-24

Electron beam microscope with improved imaging gas and method of use

 #258
20160343532
2016-11-24

Photocathode including field emitter array on a silicon substrate with boron layer

 #259
20160329188
2016-11-10

Charged particle beam device, image generation method, observation system

 #260
20160322192
2016-11-03

Inspection apparatus

 #261
20160307726
2016-10-20

Inspection device

 #262
20160284507
2016-09-29

Method of generating a zoom sequence and microscope system configured to perform the method

 #263
20160276128
2016-09-22

Charged particle beam apparatus, image forming method using a charged particle beam apparatus, and image processing apparatus

 #264
20160240344
2016-08-18

Charged particle inspection method and charged particle system

 #265
20160217967
2016-07-28

Charged particle beam device

 #266
20160172156
2016-06-16

Source for selectively providing positively or negatively charged particles for a focusing column

 #267
20160148782
2016-05-26

Scanning electron microscope

 #268
20160133435
2016-05-12

Dome detection for charged particle beam device

 #269
20160086765
2016-03-24

Electron detection system

 #270
20160064183
2016-03-03

Electron microscope and sample observation method

 #271
20160020062
2016-01-21

Charged-particle lens that transmits emissions from sample

 #272
20150371819
2015-12-24

Measurement and inspection device

 #273
20150371811
2015-12-24

Monochromator and charged particle apparatus including the same

 #274
20150369737
2015-12-24

System and method for simultaneous detection of secondary electrons and light in a charged particle beam system

 #275
20150362446
2015-12-17

Phase analyzer, phase analysis method, and surface analyzer

 #276
20150348749
2015-12-03

Multi-beam particle microscope and method for operating same

 #277
20150348747
2015-12-03

Charged-particle beam device

 #278
20150287570
2015-10-08

Inspection apparatus

 #279
20150279616
2015-10-01

Raman microscope and electron microscope analytical system

 #280
20150279615
2015-10-01

Imaging a Sample with Multiple Beams and Multiple Detectors

 #281
20150270102
2015-09-24

Focused ion beam apparatus

 #282
20150262786
2015-09-17

Marking apparatus and marking method

 #283
20150241767
2015-08-27

Mask manufacturing method, mask substrate, and charged beam drawing method

 #284
20150228451
2015-08-13

Charged particle beam apparatus having improved needle movement control

 #285
20150228450
2015-08-13

Charged particle beam apparatus having needle probe that tracks target position changes

 #286
20150221471
2015-08-06

Charged particle beam apparatus and image forming method

 #287
20150221470
2015-08-06

Charged particle beam apparatus and sample observation method

 #288
20150219547
2015-08-06

Particle analysis instrument and computer program

 #289
20150214000
2015-07-30

Defect observation system and defect observation method

 #290
20150206702
2015-07-23

Charged particle beam device, control method for charged particle beam device, and cross-section processing observation apparatus

 #291
20150179399
2015-06-25

Apparatus and method for inspecting a surface of a sample

 #292
20150179396
2015-06-25

Electron microscope and electron microscope sample retaining device

 #293
20150170875
2015-06-18

Charged particle beam apparatus

 #294
20150155134
2015-06-04

Multi-beam system for high throughput EBI

 #295
20150155132
2015-06-04

Mass spectrometer and mass image analyzing system

 #296
20150144785
2015-05-28

Asymmetric electrostatic quadrupole deflector for improved field uniformity

 #297
20150136978
2015-05-21

Focused ion beam system and method of making focal adjustment of ion beam

 #298
20150136960
2015-05-21

Three-dimensional mapping using scanning electron microscope images

 #299
20150129763
2015-05-14

Charged particle beam device

 #300
20150115154
2015-04-30

Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof