206511 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterised by the variable being measured Measurements of non-electric or non-magnetic variables
Sub-classes:ELECTROSTATIC WAFER CLAMPING AND SENSING SYSTEM
#2NON-INVASIVE MEASURING/DIAGNOSIS/TREATMENT APPARATUS AND METHOD
#3Ultra-precision timing clock method
#4SURFACE MODIFYING APPARATUS AND BONDING STRENGTH DETERMINATION METHOD
#5Control method and plasma processing apparatus
#6Scanning electron microscopy system and pattern depth measurement method
#7Pattern measurement device and non-transitory computer readable medium having stored therein program for executing measurement
#8Non-contact angle measuring apparatus
#9Plasma processing apparatus and method for measuring thickness of ring member
#10Electron-Beam Inspection Systems with optimized throughput
#11Multi-Stage/Multi-Chamber Electron-Beam Inspection System
#12Multi-stage/multi-chamber electron-beam inspection system
#13NON-CONTACT ANGLE MEASURING APPARATUS, MISSION CRITICAL INSPECTION APPARATUS, NON-INVASIVE DIAGNOSIS/TREATMENT APPARATUS, METHOD FOR FILTERING MATTER WAVE FROM A COMPOSITE PARTICLE BEAM, NON-INVASIVE MEASURING APPARATUS, APPARATUS FOR GENERATING A VIRTUAL SPACE-TIME LATTICE, AND FINE ATOMIC CLOCK
#14Range-based real-time scanning electron microscope non-visual binner
#15METHOD FOR CHARACTERISING PARTICLES BY IMAGE ANALYSIS
#16Systems and Methods for Material Texture Analysis
#17Charged particle beam device
#18Orientation imaging using wide angle convergent beam diffraction in transmission electron microscopy
#19SYSTEM AND METHOD FOR MEASURING ANGULAR LUMINESCENCE IN A CHARGED PARTICLE MICROSCOPE
#20Scanning electron microscope
#21Charged particle detectors
#22Pattern measurement apparatus
#23Orientation imaging using wide angle convergent beam diffraction in transmission electron microscopy
#24ATOM PROBE DATA AND ASSOCIATED SYSTEMS AND METHODS
#25ATOM PROBE DATA PROCESSES AND ASSOCIATED SYSTEMS
#26Surface contamination analyzer for semiconductor wafers
#27Ion beam monitoring in an ion implanter using an imaging device
#28PATTERN INSPECTION AND MEASUREMENT APPARATUS
#29Electron Spectroscope With Emission Induced By A Monochromatic Electron Beam
#30Electron anti-fogging baffle used as a detector
#31Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
#32Method for focusing an electron beam on a wafer having a transparent substrate