H01J2237/2511 - CPC Classification Index

ClassID:

206521 ⎘

H01J2237/2511 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Tubes for localised analysis using electron or ion beams characterised by their application Auger spectrometers

Recent Application in this class:

20230402252

2023-12-14

Charged Particle Beam Device and Image Acquisition Method

20230307206

2023-09-28

Charged Particle Beam Apparatus

20210255124

2021-08-19

Auger electron microscope and analysis method

20130001417

2013-01-03

Background reduction system including louver

20110024622

2011-02-03

System and method for material analysis of a microscopic element

20100001202

2010-01-07

SPHERICAL ABERRATION CORRECTION DECELERATING LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROMETER, AND PHOTOELECTRON MICROSCOPE

20090278044

2009-11-12

In-situ differential spectroscopy

20070210249

2007-09-13

Electron Spectroscope With Emission Induced By A Monochromatic Electron Beam

20060243904

2006-11-02

Determining layer thickness using photoelectron spectroscopy

#10

20050049836

2005-03-03

METHOD OF DEFECT ROOT CAUSE ANALYSIS