206534 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Tubes for localised analysis using electron or ion beams characterised by their application using tunnel effects, e.g. STM, AFM
IN-LINE DEPTH MEASUREMENTS BY AFM
#2Method for SEM-guided AFM scan with dynamically varied scan speed
#3Apparatus and method for correlating images of a photolithographic mask
#4METHOD AND APPARATUS FOR PRODUCING THREE DIMENSIONAL NANO AND MICRO SCALE STRUCTURES
#5METHOD FOR IDENTIFYING INDIVIDUAL VIRUSES IN A SAMPLE
#6Method of observing and method of working diamond stylus for working of atomic force microscope
#7Inspection system and inspection method
#8Measurement device for electron microscope