TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAGE CONTRAST DEFECT SIGNAL

ELECTRON GUN CHAMBER FOR SCANNING ELECTRON MICROSCOPE, ELECTRON GUN CONTAINING SAME, AND SCANNING ELECTRON MICROSCOPE

Simple Spherical Aberration Corrector for SEM

Automated ion-beam alignment for dual-beam instrument

Charged Particle Beam Device and Sample Observation Method

Adjustable attenuation optical unit

CHARGED-PARTICLE DETECTOR PACKAGE FOR HIGH SPEED APPLICATIONS

Aberration corrector and method of aligning aberration corrector

Testing assembly including a multiple degree of freedom stage

Method, apparatus and computer program for analyzing and/or processing of a mask for lithography

Grid sample production apparatus for electron microscope

Sixth-order and above corrected STEM multipole correctors

Navigation for electron microscopy

Systems and methods for charged particle flooding to enhance voltage contrast defect signal

Method and apparatus for examining a beam of charged particles

MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM

System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

Testing assembly including a multiple degree of freedom stage

Angled slit design for computed tomographic imaging of electron beams

Screening method and apparatus for detecting an object of interest

Metal encapsulated photocathode electron emitter

Beam bender

Substrate processing apparatus

Method for operating a particle beam generator for a particle beam device and particle beam device comprising a particle beam generator

Aberration corrector and electron microscope

Charged particle beam device

Load lock system for charged particle beam imaging

Electron beam detection element, electron microscope, and transmission electron microscope

Image processing system and method of processing images

Specimen preparation and inspection in a dual-beam charged particle microscope

Field emission electron source, method for manufacturing same, and electron beam device

Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus

Systems and methods for charged particle flooding to enhance voltage contrast defect signal

Systems and methods for high energy X-ray detection in electron microscopes

Method and system for generating a synthetic image of a region of an object

Charged particle detector including a light-emitting section having lamination structure, charged particle beam device, and mass spectrometer

Method for the in situ preparation of microscopic specimens

Probe with solid beveled tip and method for using same for specimen extraction

Charged particle beam apparatus and control method thereof

Gun lens design in a charged particle microscope

Charged particle beam apparatus

Vacuum apparatus

Multi-column scanning electron microscopy system

Charged particle beam apparatus

Method and system for aberration correction in an electron beam system

Detecting method and detecting equipment therefor

Beam blanker and method for blanking a charged particle beam

Electron microscope and image acquisition method

Cryogenic specimen processing in a charged particle microscope

Defect inspection method and defect inspection apparatus

Particle beam system and method for operating a particle optical unit

Pattern matching device and computer program for pattern matching

Composite charged particle beam apparatus and control method thereof

Substrate processing apparatus

Scanning electron microscope and method for controlling same

System and method for providing real-time visual feedback to control multiple autonomous nano-robots

Vacuum tube electron microscope

CAD-assisted TEM prep recipe creation

Charged particle beam device and detection method using said device

Testing assembly including a multiple degree of freedom stage

Method and system for optimizing configurable parameters of inspection tools

Nano-patterned system and magnetic-field applying device thereof

Imaging low electron yield regions with a charged beam imager

System and method for controlling specimen outgassing

Method and system for aberration correction in an electron beam system

Array of carbon nanotube micro-tip structures

Inspection of regions of interest using an electron beam system

Adaptive scanning for particle size using directed beam signal analysis

Structure for achieving dimensional stability during temperature changes

Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam

Ion beam device and emitter tip adjustment method

Method for calibration of a CD-SEM characterisation technique

Charged particle beam apparatus and sample image acquiring method

APPARATUS AND METHOD

Microscopy support structures

Contactless temperature measurement in a charged particle microscope

Method for coincident alignment of a laser beam and a charged particle beam

Method and device for line pattern shape evaluation

SUBSTRATE TRANSFER SYSTEM HAVING IONIZER

Chicane blanker assemblies for charged particle beam systems and methods of using the same

Charged particle beam apparatus and image generation method

Apparatus of plural charged particle beams with multi-axis magnetic lenses

Aberration correction apparatus, device having the same, and method for correcting aberration of charged particles

Method of calibrating a scanning transmission charged-particle microscope

Device for dust emitting of foreign matter and dust emission cause analysis device

Mathematical image assembly in a scanning-type microscope

Particle beam system and method for operating a particle optical unit

Charged particle beam apparatus

Apparatus and method for processing sample, and charged particle radiation apparatus

Focused ion beam low kV enhancement

Method for detecting an electrical defect of contact/via plugs

Charged particle beam device, sample stage unit, and sample observation method

Cross-section processing and observation method and cross-section processing and observation apparatus

Sample storage container, charged particle beam apparatus, and image acquiring method

Electron microscope and electron beam detector

Charged particle beam device with dynamic focus and method of operating thereof

Method for reducing or removing organic and inorganic contamination from a vacuum system of imaging and analytical devices and a device for carrying it out

Inspection of regions of interest using an electron beam system

Microscopy support structures

Vacuum chamber with a thick aluminum base plate

Nano-patterned system and magnetic-field applying device thereof

Electron emitter device with integrated multi-pole electrode structure

Asymmetrical detector design and methodology

Charged particle beam device

Method for coincident alignment of a laser beam and a charged particle beam

Charged particle beam device and arithmetic device

Automated slice milling for viewing a feature

Pattern sensing device and semiconductor sensing system

Electron beam diagnostic system using computed tomography and an annular sensor

Methods for observing samples and preprocessing thereof

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

Charged particle beam irradiation apparatus

Substrate processing apparatus

Charged particle beam apparatus permitting high-resolution and high-contrast observation

Mounting structures for multi-detector electron microscopes

Testing assembly including a multiple degree of freedom stage

Sample block holder

Cross-section processing and observation method and cross-section processing and observation apparatus

Stage device and control method for stage device

Octopole device and method for spot size improvement

Composite charged particle beam apparatus and thin sample processing method

Measuring/inspecting apparatus and measuring/inspecting method enabling blanking control of electron beam

Image-enhancing spotlight mode for digital microscopy

Carbon nanotube based micro-tip structure and method for making the same

CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERATING THEREOF

Systems and methods for investigating a characteristic of a material using electron microscopy

Aberration correction device and charged particle beam device employing same

Sample block holder

Method of studying a sample in an ETEM

Shielding member having a charge control electrode, and a charged particle beam apparatus

Electrostatic lens for charged particle radiation

Specimen supporting member for X-ray microscope image observation, specimen containing cell for X-ray microscope image observation, and X-ray microscope

Ion beam device

Charged particle beam apparatus

X-ray detection system

Methods of using temperature control devices in electron microscopy

Charged particle beam apparatus permitting high resolution and high-contrast observation

Scanning electron microscope

Electron microscope

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

Corrector

Crossover point regulation method for electro-static focusing systems

Microscope system, method for operating a charged-particle microscope

X-ray detector for electron microscope

High resolution energy-selecting electron beam apparatus

Charged particle beam column and method of operating same

Particle beam system

Method of use of reusable sample holding device permitting ready loading of very small wet samples

Dual beam system

Scanning electron microscope

Ion beam device

Stage drive device

Indenter assembly

Automated slice milling for viewing a feature

Sample processing and observing method

Composite charged particle beam apparatus and sample processing and observing method

Apparatus and method for investigating and/or modifying a sample

Pattern measurement apparatus and pattern measurement method

Focused ion beam apparatus

ALIGNING CHARGED PARTICLE BEAMS

Electron beam diagnostic system using computed tomography and an annular sensor

Corrector for axial aberrations of a particle-optical lens

Microscopy support structures

Multiple device shaping uniform distribution of current density in electro-static focusing systems

Probe and method for obtaining three-dimensional compositional maps of a biological sample

Gas field ion source with coated tip

Charged particle beam column and method of operating same

Device and method for generating a stable high voltage

Methods and systems for removing a material from a sample

Multiple device shaping uniform distribution of current density in electro-static focusing systems

Charged particle beam application apparatus

Tip-sharpened carbon nanotubes and electron source using thereof

Particle-beam microscope

Pattern inspection method and apparatus

Electron source and electron beam apparatus

DEVICE AND METHOD FOR CRYSTAL ORIENTATION MEASUREMENT BY MEANS OF AN ION BLOCKING PATTERN AND A FOCUSED ION PROBE

Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope

Layered scanning charged particle apparatus package having an embedded heater

ELECTRON EMITTER HAVING NANO-STRUCTURE TIP AND ELECTRON COLUMN USING THE SAME

Reusable sample holding device permitting ready loading of very small wet samples

High resolution gas field ion column

Defect inspection and charged particle beam apparatus

Dual beam apparatus with tilting sample stage

X-ray detector for electron microscope

Sample support structure and methods

NANOROBOT MODULE, AUTOMATION AND EXCHANGE

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

Field emission electron source having carbon nanotube and manufacturing method thereof

Dual beam system

Electron source

Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same

Section processing method and its apparatus

Stable emission gas ion source and method for operation thereof

Charged particle beam apparatus permitting high-resolution and high-contrast observation

Aberration correction apparatus that corrects spherical aberration of charged particle apparatus

Dual mode gas field ion source

CHARGED PARTICLE RADIATION APPARATUS

Radiation window with coated silicon support structure

Sample holder, method for observation and inspection, and apparatus for observation and inspection

Motorized manipulator for positioning a TEM specimen

Electric charged particle beam microscope and microscopy

Inspection method for semiconductor wafer and apparatus for reviewing defects

Method of determination of resolution of scanning electron microscope

Energy filter for cold field emission electron beam apparatus

Corrector

Apparatus and Methods for Growing Nanofibres and Nanotips

Inspection method for semiconductor wafer and apparatus for reviewing defects

Aberration corrector and charged particle beam apparatus using the same

Scanning electron microscope

Digital pulse processor slope correction

Electrostatic lens assembly

Electron source manufacturing method

ELECTRON BEAM APPARATUS

Objective lens, electron beam system and method of inspecting defect

Charged particle beam application apparatus

METHOD AND APPARATUS OF WAFER SURFACE POTENTIAL REGULATION

SOLID SAMPLE, SOLID SAMPLE FABRICATING METHOD, AND SOLID SAMPLE FABRICATING APPARATUS

Charged particle beam apparatus

In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques

Autofocus method for scanning charged-particle beam instrument

Method for Changing Energy of Electron Beam in Electron Column

Charged particle beam apparatus

Charged particle beam apparatus

Electron Microscope And Electron Beam Inspection System

Scanning electron microscope

Systems and methods for a gas field ionization source

Method and apparatus for setting sample observation condition, and method and apparatus for sample observation

Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope

Changed particle beam emitting device and method for adjusting the optical axis

Ultra-bright pulsed electron beam with low longitudinal emittance

Field emission electron gun and method of operating the same

Charged particle beam device probe operation

Charged-particle beam system

Defect inspection and charged particle beam apparatus

Method of observing and method of working diamond stylus for working of atomic force microscope

Charged-particle beam system

Electric charged particle beam microscopy and electric charged particle beam microscope

Mesh and method of observing rubber slice technical field

Ion beam processing apparatus

Semiconductor wafer inspection tool and semiconductor wafer inspection method

Electron beam apparatus and an aberration correction optical apparatus

Electron microscope and scanning probe microscope calibration device

Pattern inspection method and apparatus

Pattern inspection method and apparatus

Method of aberration correction and electron beam system

Electron beam apparatus and method for production of its specimen chamber

Charged particle beam apparatus and charged particle beam irradiation method

Dual beam system

Scanning electron microscope

Electron gun assembly

Multipole lens and method of fabricating same

Pattern inspection method and apparatus

Adjusting device of an apparatus for generating a beam of charged particles

Focus adjustment method and focus adjustment apparatus

Charged particle beam device

Particle optical apparatus with a predetermined final vacuum pressure

Method and device for distance measurement

Charged-particle beam instrument

Sample enclosure for a scanning electron microscope and methods of use thereof

Charged particle beam apparatus

Charged-particle beam system

DC only tool cell with a charged particle beam system

Electrostatic deflection system with low aberrations and vertical beam incidence

Electrostatic deflection system with impedance matching for high positioning accuracy

Method for SEM measurement of features using magnetically filtered low loss electron microscopy

Charged particle beam application system

Defect inspection and charged particle beam apparatus

Method, apparatus and system for specimen fabrication by using an ion beam

Electron beam apparatus and method for production of its specimen chamber

Sample milling/observing apparatus and method of observing sample

Charged particle beam device for high spatial resolution and multiple perspective imaging

Electron beam apparatus and method for production of its specimen chamber

Charged particle beam device probe operation

Method of forming images in a scanning electron microscope

Electron gun

Method and apparatus for the automated process of in-situ lift-out

Apparatus and method of detecting probe tip contact with a surface

Electron source, and charged-particle apparatus comprising such an electron source

Moving vacuum chamber stage with air bearing and differentially pumped grooves

Method and system for enhancing image resolution using a modification vector

Electron microscope array for inspection and lithography

Device for controlling an apparatus generating a charged particle beam

Electron microscope and electron beam inspection system

Sample observing apparatus and sample observing method

Charged particle beam emitting device and method for adjusting the optical axis

Objective lens, electron beam system and method of inspecting defect

Defect inspection and charged particle beam apparatus

Charged particle beam apparatus and charged particle beam irradiation method

Charged particle beam apparatus, charged particle beam control method, substrate inspection method and method of manufacturing semiconductor device

Image noise removing method in FIB/SEM complex apparatus

Probe current imaging

Probe tip processing

Method and apparatus for the characterization of a depth structure in a substrate

Particle beam apparatus

ETCHANT COMPOSITION FOR SEM IMAGE ENHANCEMENT OF P-N JUNCTION CONTRAST

Structure determination of materials using electron microscopy

Dual beam system

Charged-particle beam microscope with differential vacuum pressures

High performance inspection scanning electron microscope device and method of operating the same