H01J2237/285 - CPC Classification Index

ClassID:

206569 ⎘

H01J2237/285 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes Emission microscopes

Sub-classes:

SHIELDING PLASMA ETCHING DATA COLLECTION WINDOWS USING POSITIVELY CHARGED CONDUCTIVE FILMS

Method for analyzing the 3D structure of biomolecules

SCANNING ELECTRON MICROSCOPE

Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system

Radiation Sensor, and its Application in a Charged-Particle Microscope

SMS probe and SEM imaging system and methods of use