206539 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Details operating at elevated pressures, e.g. atmosphere
Sub-classes:Diffraction pattern detection in a transmission charged particle microscope
#2Vacuum condition controlling apparatus, system and method for specimen observation
#3Wide field atmospheric scanning electron microscope
#4Electron scanning microscope and image generation method
#5Electron scanning microscope and image generation method
#6Electron beam microscope with improved imaging gas and method of use
#7Diaphragm mounting member and charged particle beam device
#8Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member
#9Scanning electron microscope
#10Charged particle optical apparatus having a selectively positionable differential pressure module
#11Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
#12Charged particle beam device and sample observation method
#13Observation apparatus and optical axis adjustment method
#14Charged particle beam device and sample observation method
#15Charged particle beam apparatus and sample observation method
#16Charged particle beam instrument
#17Charged particle beam device
#18Method of using an environmental transmission electron microscope
#19Detection method for use in charged-particle microscopy
#20Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#21Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
#22Inspection system using scanning electron microscope
#23Holder assembly for cooperating with an environmental cell and an electron microscope
#24Charged particle radiation device
#25Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#26Detector for use in charged-particle microscopy
#27Particle beam system
#28Charged particle radiation device
#29Electron microscope
#30High pressure charged particle beam system
#31Electron beam apparatus
#32Electron microscope with an emitter operating in medium vacuum
#33Layered scanning charged particle apparatus package having an embedded heater
#34Layered scanning charged particle microscope with differential pumping aperture
#35Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#36Scanning transmission electron microscope using gas amplification
#37SCANNING ELECTRON MICROSCOPE
#38PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD
#39Multistage gas cascade amplifier
#40Scanning electron microscope
#41Transmission electron microscope
#42Charged-particle beam instrument
#43Plasma and electron beam etching device and method
#44Scanning electron microscope
#45Apparatus for evacuating a sample
#46Method and system for the directional detection of electrons in a scanning electron microscope
#47Scanning electron microscope
#48Scanning electron microscope
#49Secondary electron detector unit for a scanning electron microscope
#50Method of identification and quantification of biological molecules and apparatus therefore
#51Absorption current image apparatus in electron microscope