206545 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Non-scanning techniques Field-emission microscopes
Sub-classes:Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturing tip having single-atom termination structure
#2Ion sources, systems and methods
#3Ion sources, systems and methods
#4Particle sources and methods for manufacturing the same
#5Ion sources, systems and methods
#6Ultra high precision measurement tool
#7Ion sources, systems and methods
#8Ion sources, systems and methods
#9Ion sources, systems and methods
#10Ion sources, systems and methods
#11Ion sources, systems and methods
#12Ion sources, systems and methods
#13Ion sources, systems and methods
#14Ion sources, systems and methods
#15Ion sources, systems and methods
#16Ion sources, systems and methods
#17Ion sources, systems and methods
#18Ion sources, systems and methods
#19Ion sources, systems and methods
#20Ion sources, systems and methods
#21Ion sources, systems and methods
#22Ion sources, systems and methods
#23Nano-tip fabrication by spatially controlled etching