H01J2237/2857 - CPC Classification Index

ClassID:

206572 ⎘

H01J2237/2857 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Emission microscopes Particle bombardment induced emission

Recent Application in this class:

20210351001

2021-11-11

Method of imaging a 2D sample with a multi-beam particle microscope

20210313137

2021-10-07

Particle beam system and method for the particle-optical examination of an object

20200243300

2020-07-30

Method of imaging a 3D sample with a multi-beam particle microscope

20200098541

2020-03-26

Particle beam system and method for the particle-optical examination of an object

20190122852

2019-04-25

Particle beam system and method for the particle-optical examination of an object

20170316912

2017-11-02

Particle beam system and method for the particle-optical examination of an object

20160307726

2016-10-20

Inspection device

20160093464

2016-03-31

Composite charged particle beam apparatus

20150369737

2015-12-24

System and method for simultaneous detection of secondary electrons and light in a charged particle beam system

#10

20150083911

2015-03-26

Method of detecting electrons, an electron-detector and an inspection system

#11

20120235036

2012-09-20

Inspection device

#12

20120193530

2012-08-02

System and method for localization of large numbers of fluorescent markers in biological samples

#13

20120049063

2012-03-01

Sample surface inspection apparatus and method

#14

20080265159

2008-10-30

Sample surface inspection apparatus and method

#15

20060192145

2006-08-31

Charged particle beam apparatus and method for operating the same

#16

20050158653

2005-07-21

Sample surface inspection apparatus and method