206577 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Controlling tubes; Details using digital signal processors [DSP]
Charged particle beam drawing device and method of controlling charged particle beam drawing device
#2Operating a particle beam device
#3Ion beam irradiation apparatus and program therefor
#4Device processing method and device processing apparatus
#5Charged particle beam drawing apparatus and charged particle beam drawing method
#6Processing method and processing device of conditioning electron gun
#7Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase
#8Method for fabricatiing three-dimensional microstructure by fib-cvd and drawing system for three-dimensional microstruture
#9Implanting a substrate using an ion beam
#10Technique for tuning an ion implanter system
#11Optimization of a utilization of an ion beam in a two-dimensional mechanical scan ion implantation system
#12Method of measuring ion beam position
#13Technique for ion beam angle spread control for advanced applications
#14Semiconductor manufacturing apparatus
#15Optimization of beam utilization
#16Method and apparatus for the automated process of in-situ lift-out
#17Multiple gas injection system for charged particle beam instruments
#18Ion implantation apparatus for use in manufacturing of semiconductor device
#19Semiconductor manufacturing apparatus
#20Ion implantation apparatus and method
#21Apparatus, method and program for ion implantation simulation, and computer readable storage medium having stored therein the program
#22Electron microscope observation system and observation method