H01J2237/30 - CPC Classification Index

ClassID:

206573 ⎘

H01J2237/30 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Electron or ion beam tubes for processing objects

Sub-classes:

H01J2237/303 » Electron or ion optical systems 57
H01J2237/304 » Controlling tubes 73
H01J2237/31 » Processing objects on a macro-scale 61
H01J2237/317 » Processing objects on a micro-scale 59

Recent Application in this class:

20250259818

SYSTEM AND METHOD FOR SURFACE TREATMENT OF MATERIALS

20200395190

Operating a particle beam device

20200055092

Vacuum apparatus and recovery support method

20160293503

Apparatus and method for endpoint detection

20160086766

Charged particle beam device

20150360065

Method for soil treatment

20150200073

Ion implantation system and method with variable energy control

20150194285

Ion source and method for making same

20150123005

Particle beam transport apparatus

20110210263

Particle beam transport apparatus and method of transporting a particle beam with small beam spot size

20110068265

Electrode unit and charged particle beam device

20100193687

Field emission type electron gun comprising single fibrous carbon electron emitter and operating method for the same

20090206282

Method for manufacturing semiconductor device or photomask

20090194711

Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium

20080038908

Method and system for continuous large-area scanning implantation process