GRID STRUCTURES OF ION BEAM ETCHING (IBE) SYSTEMS

METHOD TO FABRICATE BLAZED GRATING USING SPACER AND ION BEAM ETCHING

WAFER TOTAL THICKNESS VARIATION USING MASKLESS IMPLANT

ELECTRON BEAM-INDUCED AND REMOTE PLASMA-ASSISTED SIMULTANEOUS MATERIAL-SELECTIVE ETCHING AND GROWTH

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CLEANING ELECTRODE ASSEMBLY

Grid Structures Of Ion Beam Etching (IBE) Systems

CLEANING METHOD OF FILM LAYER IN THE PLASMA PROCESSING APPARATUS

Angle control for neutral reactive species generated in a plasma

MEMS PLATFORM FOR THIN FILM NANOMECHANICS CHARACTERIZATION

ETCHING APPARATUS

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USING ANGLED BEAMS

Grid structures of ion beam etching (IBE) systems

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Temperature controlled/electrically biased wafer surround

Substrate processing apparatus

Material recovery systems for optical components

Controlling etch angles by substrate rotation in angled etch tools

Ribbon beam plasma enhanced chemical vapor deposition system for anisotropic deposition of thin films

Method for real time monitoring semiconductor fabrication process

Method and device for the surface treatment of substrates

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Etching apparatus and etching method

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Method of determining plasma abnormality, method of manufacturing semiconductor device, and substrate processing apparatus

Methods and apparatus for electron beam etching process

ETCHING APPARATUS

Vertical transistor with trench gate insulator having varying thickness

METHOD OF PROCESSING A SURFACE BY MEANS OF A PARTICLE BEAM

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Planarization, densification, and exfoliation of porous materials by high-energy ion beams

Workpiece processing technique

Sample holder unit and sample observation apparatus

Enhanced FIB-SEM systems for large-volume 3D imaging

Method for the Fabrication of a Reduced Reflectance Metal Mesh

Method and device for the surface treatment of substrates

Low Electron Temperature Etch Chamber with Independent Control Over Plasma Density, Radical Composition Ion Energy for Atomic Precision Etching

Negative ribbon ion beams from pulsed plasmas

Ion milling device and ion milling method

Method of extracting and accelerating ions

Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching

Method and device for the surface treatment of substrates

Use of ion beam etching to generate gate-all-around structure

Ion milling apparatus and sample processing method

DYNAMIC APERTURE FOR THREE-DIMENSIONAL CONTROL OF THIN-FILM DEPOSITION AND ION-BEAM EROSION

Method for preparing cross-sections by ion beam milling

Device manufacturing apparatus and manufacturing method of magnetic device using structure to pass ion beam

Specimen preparation device

Methods and apparatus for determining, using, and indicating ion beam working properties

Method of reducing the thickness of a target sample

Etching apparatus and etching method

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Ion beam sample preparation and coating apparatus and methods

Wafer stage for symmetric wafer processing

Gas injection system with precursor for planar deprocessing of semiconductor devices using a focused ion beam

Precursor for planar deprocessing of semiconductor devices using a focused ion beam

Charged particle beam irradiation apparatus

Methods and apparatus for employing an accelerated neutral beam for improved surface analysis

Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements

ION BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

Processing system

METHOD AND SYSTEM FOR PREPARING A LAMELA

ION BEAM DISTRIBUTION

METHOD AND SYSTEM FOR PREPARING A SAMPLE

Gas cluster ion beam system with cleaning apparatus

Protective enclosure for an ion gun, device for depositing materials through vacuum evaporation comprising such a protective enclosure and method for depositing materials

SHUTTER DEVICE AND VACUUM PROCESSING APPARATUS

Method for modifying an etch rate of a material layer using energetic charged particles

Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDMENT APPARATUS

Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus

METHOD FOR REMOVING FOREIGN MATTER FROM GLASS SUBSTRATE SURFACE AND METHOD FOR PROCESSING GLASS SUBSTRATE SURFACE

Solid surface smoothing apparatus

Processing system

APPARATUS

Frequency adjusting apparatus

PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD

Method and apparatus for film thickness adjustment

Apparatus and method for processing a wafer

Method and system for coating a surface of a medical device with a therapeutic agent and drug eluting medical devices made thereby

UNIFORMITY CONTROL FOR ION BEAM ASSISTED ETCHING

Method and system for increasing throughput during location specific processing of a plurality of substrates

Method and apparatus for flattening solid surface

Method and system for treating an interior surface of a workpiece using a charged particle beam

Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements

RF Coil Plasma Generation

Methods and apparatuses for directing an ion beam source

Electron Beam Etching Apparatus and Method for the same

Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipment

Ion source including magnet and magnet yoke assembly

Plasma and electron beam etching device and method

Apparatus and method for controlling ion beam

Ion source and polishing system using the same

Ion source

Method for smoothing a solid surface

Charged particle beam extraction and formation apparatus

Sample holder and ion-beam processing system

Apparatus and method for polishing gemstones and the like

Iron beam irradiation device and insulating spacer for the device

Ion beam irradiation apparatus and insulating spacer for the same

Method and apparatus for improved processing with a gas-cluster ion beam

Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system