ClassID:

206593

H01J2237/31 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects Processing objects on a macro-scale

Sub-classes:
Recent Application in this class:
#1
20200156039
2020-05-21

UPGRADING PROCESS STREAMS

#2
20200086273
2020-03-19

PROCESSING MATERIALS

#3
20200038811
2020-02-06

ENCLOSURES FOR TREATING MATERIALS

#4
20190316294
2019-10-17

RECONFIGURABLE PROCESSING ENCLOSURES

#5
20190232228
2019-08-01

CONTROLLING PROCESS GASES

#6
20190039023
2019-02-07

Processing materials

#7
20190027367
2019-01-24

Workpiece processing technique

#8
20190010662
2019-01-10

Array for processing materials

#9
20180339270
2018-11-29

Processing materials

#10
20180038048
2018-02-08

Processing materials

#11
20180016745
2018-01-18

Reconfigurable processing enclosures

#12
20170268169
2017-09-21

Array for processing materials

#13
20170213690
2017-07-27

Charged particle system and methods for irradiating a planning target volume

#14
20170178869
2017-06-22

Hollow cathode ion source

#15
20170165628
2017-06-15

Controlling process gases

#16
20170077001
2017-03-16

Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system

#17
20170044713
2017-02-16

Array for processing materials

#18
20170036186
2017-02-09

Processing materials

#19
20170036185
2017-02-09

Reconfigurable processing enclosures

#20
20170011885
2017-01-12

Method for preparing cross-sections by ion beam milling

#21
20160222476
2016-08-04

Array for processing materials

#22
20150318140
2015-11-05

Multi-source plasma focused ion beam system

#23
20150144808
2015-05-28

Plasma source apparatus and methods for generating charged particle beams

#24
20150060416
2015-03-05

Electron-beam-supported production of electrical components

#25
20150041454
2015-02-12

Plasma whirl reactor apparatus and methods of use

#26
20140318969
2014-10-30

Upgrading process streams

#27
20140312245
2014-10-23

Multi-source plasma focused ion beam system

#28
20140284501
2014-09-25

Processing materials

#29
20140284495
2014-09-25

Array for processing materials

#30
20140284494
2014-09-25

Reconfigureable processing enclosures

#31
20140284205
2014-09-25

Enclosures for treating materials

#32
20140284203
2014-09-25

Controlling process gases

#33
20130108504
2013-05-02

Apparatus for the sterilization of plastics material containers by means of medium-controlled electron beams

#34
20130084211
2013-04-04

Apparatus and method of sterilizing containers with a charge carrier source introduced into the containers

#35
20130040055
2013-02-14

Surface processing method

#36
20120167962
2012-07-05

SYSTEM AND METHOD FOR GENERATING A BEAM OF PARTICLES

#37
20120125889
2012-05-24

CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATING METHOD, AND SUBSTRATE PROCESSING METHOD

#38
20120091633
2012-04-19

Method to minimize chain scission and monomer generation in processing of poly(L-lactide) stent

#39
20120080407
2012-04-05

Multi-source plasma focused ion beam system

#40
20120068058
2012-03-22

Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support

#41
20120025710
2012-02-02

Hall-current ion source with improved ion beam energy distribution

#42
20110155897
2011-06-30

Gas-cluster-jet generator and gas-cluster ion-beam apparatus utilizing an improved gas-cluster-jet generator

#43
20110006037
2011-01-13

Surface processing method

#44
20100207529
2010-08-19

Closed drift ion source

#45
20100187970
2010-07-29

Apparatus for producing a charged particle beam

#46
20090309018
2009-12-17

Multi-source plasma focused ion beam system

#47
20090272228
2009-11-05

Apparatus and method for clean, rapidly solidified alloys

#48
20090140176
2009-06-04

Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams

#49
20090140132
2009-06-04

Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support

#50
20080293832
2008-11-27

SOLID SAMPLE, SOLID SAMPLE FABRICATING METHOD, AND SOLID SAMPLE FABRICATING APPARATUS

#51
20080136309
2008-06-12

Ion source with upstream inner magnetic pole piece

#52
20080129209
2008-06-05

Adaptive controller for ion source

#53
20080067430
2008-03-20

Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams

#54
20080067406
2008-03-20

Irradiating device and method for controlling the same

#55
20080038908
2008-02-14

Method and system for continuous large-area scanning implantation process

#56
20080017112
2008-01-24

Ion source with recess in electrode

#57
20070062332
2007-03-22

Apparatus and method for clean, rapidly solidified alloys

#58
20060219953
2006-10-05

Subsurface imaging using an electron beam

#59
20060022136
2006-02-02

Multiple gas injection system for charged particle beam instruments

#60
20050285047
2005-12-29

Electron beam diagnostic for profiling high power beams

#61
20050082493
2005-04-21

Floating mode ion source