206607 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a macro-scale Changing chemical properties
UPGRADING PROCESS STREAMS
#2PROCESSING MATERIALS
#3TREATING BIOMASS
#4ENCLOSURES FOR TREATING MATERIALS
#5RECONFIGURABLE PROCESSING ENCLOSURES
#6CONTROLLING PROCESS GASES
#7Textiles and methods and systems for producing textiles
#8Processing materials
#9Array for processing materials
#10Processing materials
#11Upgrading process streams
#12Processing materials
#13Reconfigurable processing enclosures
#14Array for processing materials
#15Treating biomass
#16METHODS FOR ATOM INCORPORATION INTO MATERIALS USING A PLASMA AFTERGLOW
#17Controlling process gases
#18Array for processing materials
#19Processing materials
#20Reconfigurable processing enclosures
#21Array for processing materials
#22Ion beam treatment method for producing superhydrophilic glass materials
#23Upgrading process streams
#24Processing materials
#25Array for processing materials
#26Reconfigureable processing enclosures
#27Enclosures for treating materials
#28Controlling process gases
#29Bonding-substrate fabrication method, bonding substrate, substrate bonding method, bonding-substrate fabrication apparatus, and substrate assembly
#30Bonding-substrate fabrication method, bonding substrate, substrate bonding method, bonding-substrate fabrication apparatus, and substrate assembly
#31Method to alter silicide properties using GCIB treatment
#32Coating and ion beam mixing apparatus and method to enhance the corrosion resistance of the materials at the elevated temperature using the same
#33ION BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
#34Method for modifying a material layer using gas cluster ion beam processing
#35Method for modifying an etch rate of a material layer using energetic charged particles
#36Method to alter silicide properties using GCIB treatment
#37Modification of magnetic properties of films using ion and neutral beam implantation
#38Method for modifying a material layer using gas cluster ion beam processing
#39METALLIC PROBE, AND METHOD AND APPARATUS FOR FABRICATING THE SAME
#40COATING AND ION BEAM MIXING APPARATUS AND METHOD TO ENHANCE THE CORROSION RESISTANCE OF THE MATERIALS AT THE ELEVATED TEMPERATURE USING THE SAME
#41Method for making soft pellicles
#42Soft pellicle and method of making same
#43Vacuum reaction chamber with x-lamp heater
#44Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object
#45Soft pellicle for 157 and 193 nm and method of making same
#46Electron beam treatment apparatus
#47Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object