ClassID:

206607

H01J2237/3165 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a macro-scale Changing chemical properties

Recent Application in this class:
#1
20200156039
2020-05-21

UPGRADING PROCESS STREAMS

#2
20200086273
2020-03-19

PROCESSING MATERIALS

#3
20200075288
2020-03-05

TREATING BIOMASS

#4
20200038811
2020-02-06

ENCLOSURES FOR TREATING MATERIALS

#5
20190316294
2019-10-17

RECONFIGURABLE PROCESSING ENCLOSURES

#6
20190232228
2019-08-01

CONTROLLING PROCESS GASES

#7
20190153662
2019-05-23

Textiles and methods and systems for producing textiles

#8
20190039023
2019-02-07

Processing materials

#9
20190010662
2019-01-10

Array for processing materials

#10
20180339270
2018-11-29

Processing materials

#11
20180193801
2018-07-12

Upgrading process streams

#12
20180038048
2018-02-08

Processing materials

#13
20180016745
2018-01-18

Reconfigurable processing enclosures

#14
20170268169
2017-09-21

Array for processing materials

#15
20170221679
2017-08-03

Treating biomass

#16
20170183795
2017-06-29

METHODS FOR ATOM INCORPORATION INTO MATERIALS USING A PLASMA AFTERGLOW

#17
20170165628
2017-06-15

Controlling process gases

#18
20170044713
2017-02-16

Array for processing materials

#19
20170036186
2017-02-09

Processing materials

#20
20170036185
2017-02-09

Reconfigurable processing enclosures

#21
20160222476
2016-08-04

Array for processing materials

#22
20160052821
2016-02-25

Ion beam treatment method for producing superhydrophilic glass materials

#23
20140318969
2014-10-30

Upgrading process streams

#24
20140284501
2014-09-25

Processing materials

#25
20140284495
2014-09-25

Array for processing materials

#26
20140284494
2014-09-25

Reconfigureable processing enclosures

#27
20140284205
2014-09-25

Enclosures for treating materials

#28
20140284203
2014-09-25

Controlling process gases

#29
20140048805
2014-02-20

Bonding-substrate fabrication method, bonding substrate, substrate bonding method, bonding-substrate fabrication apparatus, and substrate assembly

#30
20140037945
2014-02-06

Bonding-substrate fabrication method, bonding substrate, substrate bonding method, bonding-substrate fabrication apparatus, and substrate assembly

#31
20120238092
2012-09-20

Method to alter silicide properties using GCIB treatment

#32
20120135157
2012-05-31

Coating and ion beam mixing apparatus and method to enhance the corrosion resistance of the materials at the elevated temperature using the same

#33
20120104274
2012-05-03

ION BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

#34
20110266466
2011-11-03

Method for modifying a material layer using gas cluster ion beam processing

#35
20110174770
2011-07-21

Method for modifying an etch rate of a material layer using energetic charged particles

#36
20110117738
2011-05-19

Method to alter silicide properties using GCIB treatment

#37
20100261040
2010-10-14

Modification of magnetic properties of films using ion and neutral beam implantation

#38
20100243919
2010-09-30

Method for modifying a material layer using gas cluster ion beam processing

#39
20100066402
2010-03-18

METALLIC PROBE, AND METHOD AND APPARATUS FOR FABRICATING THE SAME

#40
20100032288
2010-02-11

COATING AND ION BEAM MIXING APPARATUS AND METHOD TO ENHANCE THE CORROSION RESISTANCE OF THE MATERIALS AT THE ELEVATED TEMPERATURE USING THE SAME

#41
20090110895
2009-04-30

Method for making soft pellicles

#42
20090081567
2009-03-26

Soft pellicle and method of making same

#43
20060272772
2006-12-07

Vacuum reaction chamber with x-lamp heater

#44
20060124869
2006-06-15

Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object

#45
20050214655
2005-09-29

Soft pellicle for 157 and 193 nm and method of making same

#46
20050194548
2005-09-08

Electron beam treatment apparatus

#47
20050161599
2005-07-28

Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object