ClassID:

206689

H01J2237/336 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Processing objects by plasma generation characterised by the type of processing Changing physical properties of treated surfaces

Sub-classes:
Recent Application in this class:
#1
20260144083
2026-05-21

METHOD OF MANUFACTURING PACKAGING SUBSTRATE

#2
20260058106
2026-02-26

SUBSTRATE PROCESSING APPARATUS

#3
20260038769
2026-02-05

Electrical Discharge Machining Processing for Semiconductor Workpiece

#4
20260018395
2026-01-15

Atmospheric Plasma Activation for Hybrid Bonding

#5
20250349517
2025-11-13

Electrical Discharge Machining Processing for Semiconductor Workpiece

#6
20250316476
2025-10-09

DENSIFICATION OF CARBON GAPFILL USING LOW FREQUENCY RADIO FREQUENCY (LFRF) TREATMENT

#7
20250285841
2025-09-11

SYSTEMS, METHODS, AND APPARATUSES FOR ATMOSPHERIC PRESSURE PLASMA JET NOZZLES

#8
20250239446
2025-07-24

SUBSTRATE-TREATMENT METHOD AND SUBSTRATE-TREATMENT SYSTEM

#9
20250149314
2025-05-08

SCRUBBER, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

#10
20240420996
2024-12-19

SELECTIVE SELF-ASSEMBLED MONOLAYER (SAM) REMOVAL

#11
20240332028
2024-10-03

COMPRESSIVE FILMS FOR LARGE AREA GAPFILL

#12
20240331975
2024-10-03

DENSIFIED SEAM-FREE SILICON GAP FILL PROCESSES

#13
20240290585
2024-08-29

HIGHER PRESSURE PURGE FOR IMPURITY REDUCTION IN RADICAL TREATMENT CHAMBER

#14
20240258082
2024-08-01

Substrate holding method and substrate processing apparatus

#15
20240222089
2024-07-04

ENHANCED DRY DESMEAR EQUIPMENT WITH PROTECTIVE FILM PEELING CAPABILITY FOR INTEGRATED CIRCUITS

#16
20240170256
2024-05-23

VHF Broadband Coaxial Adapter

#17
20240096596
2024-03-21

PLASMA ETCHING METHOD AND PLASMA ETCHING DEVICE

#18
20240079222
2024-03-07

SURFACE MODIFYING APPARATUS AND BONDING STRENGTH DETERMINATION METHOD

#19
20240079214
2024-03-07

SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS

#20
20240071727
2024-02-29

SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

#21
20240062998
2024-02-22

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#22
20240030043
2024-01-25

NEUTRAL BEAM ANNEALING APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS USING THE SAME

#23
20240027911
2024-01-25

METHOD, APPARATUS AND SYSTEM FOR PROCESSING SEMICONDUCTOR STRUCTURE

#24
20240021402
2024-01-18

SURFACE PREPARATION

#25
20230420232
2023-12-28

INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRIDE DEPOSITION

#26
20230369031
2023-11-16

INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRIDE DEPOSITION

#27
20230365769
2023-11-16

RESIN SURFACE HYDROPHILIZATION METHOD, PLASMA PROCESSING DEVICE, LAMINATE BODY, AND LAMINATE BODY MANUFACTURING METHODRESIN SURFACE HYDROPHILIZATION METHOD, PLASMA PROCESSING DEVICE, LAMINATE BODY, AN LAMINATE BODY MANUFACTURING METHOD

#28
20230360888
2023-11-09

MULTICELL OR MULTIARRAY PLASMA AND METHOD FOR SURFACE TREATMENT USING THE SAME

#29
20230329117
2023-10-12

DEEP SMOOTH ETCHING TO REALIZE SCALABLE DEVICES HAVING PIEZOELECTRIC CRYSTALS

#30
20230108117
2023-04-06

Method for Etching of Metal

#31
20230046192
2023-02-16

Device For Generating A Dielectric Barrier Discharge And Method For Treating An Object To Be Activated

#32
20220315721
2022-10-06

RESIN SURFACE HYDROPHILIZATION METHOD, PLASMA PROCESSING DEVICE, LAMINATE BODY, AND LAMINATE BODY MANUFACTURING METHOD

#33
20210376223
2021-12-02

Method and apparatus for poling polymer thin films

#34
20210175075
2021-06-10

OXYGEN RADICAL ASSISTED DIELECTRIC FILM DENSIFICATION

#35
20200266332
2020-08-20

Method and apparatus for poling polymer thin films

#36
20200155266
2020-05-21

Apparatus for sterilising an instrument channel of a surgical scoping device

#37
20200105530
2020-04-02

System and method for precision formation of a lattice on a substrate

#38
20190080909
2019-03-14

System and method for precision formation of a lattice on a substrate

#39
20180318459
2018-11-08

Apparatus for sterilizing an instrument channel of a surgical scoping device

#40
20180257416
2018-09-13

Drop-on-demand identification document printing with surface pre-treatment

#41
20180090700
2018-03-29

Display device and method of manufacturing display device

#42
20170032982
2017-02-02

Gas delivery system

#43
20170001918
2017-01-05

Selective area coating sintering

#44
20170001453
2017-01-05

Treatment-target modification device, treatment-target modification system, image forming system, and image forming method

#45
20160348247
2016-12-01

Flame-Assisted Flash Sintering

#46
20160289401
2016-10-06

ARTICLE INCLUDING POLYMER HAVING SURFACE WITH LOW COEFFICIENT OF FRICTION AND MANUFACTURING METHOD OF SUCH

#47
20160233061
2016-08-11

Heated air plasma treatment

#48
20160203958
2016-07-14

Plasma processing apparatus and plasma processing method

#49
20160141152
2016-05-19

METHOD AND SYSTEM FOR MODIFYING A SUBSTRATE USING A PLASMA

#50
20160118230
2016-04-28

Apparatus for the plasma treatment of surfaces and a method for treating surfaces with plasma

#51
20160111254
2016-04-21

Workpiece Processing Method And Apparatus

#52
20160071698
2016-03-10

Plasma treatment method, plasma treatment apparatus, and plasma-treated long object

#53
20160056020
2016-02-25

SYSTEMS AND METHODS FOR TREATING MATERIAL SURFACES

#54
20150251453
2015-09-10

Plasma processing device, printing apparatus, printing system, computer program product, and method for manufacturing printed material

#55
20150228518
2015-08-13

FUME REMOVAL DEVICE AND SUBSTRATE TREATMENT DEVICE

#56
20150056381
2015-02-26

METHOD FOR FORMING CONDUCTIVE FILM

#57
20120329287
2012-12-27

Low k porous SiCOH dielectric and integration with post film formation treatment

#58
20120097528
2012-04-26

Deposition of Material to Form a Coating

#59
20090061649
2009-03-05

LOW k POROUS SiCOH DIELECTRIC AND INTEGRATION WITH POST FILM FORMATION TREATMENT

#60
20080044257
2008-02-21

Techniques for temperature-controlled ion implantation

#61
20080042078
2008-02-21

Techniques for temperature-controlled ion implantation

#62
20070164680
2007-07-19

Plasma generation and processing with multiple radiation sources

#63
20060249367
2006-11-09

Plasma catalyst

#64
20060166183
2006-07-27

Preparation of coatings through plasma polymerization

#65
20050127843
2005-06-16

Device for treating surfaces of containers with plasma

#66
20050061446
2005-03-24

Plasma-assisted joining

#67
18662033
2025-11-11

Electrical discharge machining processing for semiconductor workpiece