Hall current plasma source having a center-mounted cathode or a surface-mounted cathode

Ion throughput pump and method

External discharge hall thruster

Ion source apparatus and methods of using the same

CLOSED DRIFT ION SOURCE WITH SYMMETRIC MAGNETIC FIELD

Hall effect plasma thruster with insulated layered ring assembly

Closed drift magnetic field ion source apparatus containing self-cleaning anode and a process for substrate modification therewith

Closed drift ion source

Focused anode layer ion source with converging and charge compensated beam (falcon)

Methods and apparatuses for directing an ion beam source

Ion source and metals used in making components thereof and method of making same

Ion source including magnet and magnet yoke assembly

Ion source with recess in electrode

Plasma accelerating apparatus and plasma processing system having the same

Combined radio frequency and hall effect ion source and plasma accelerator system

Ion source with multi-piece outer cathode

Anode layer particle beam device

Ion source with substantially planar design

Closed drift ion source

High-efficient ion source with improved magnetic field

Ion source with electrode kept at potential(s) other than ground by zener diode(s), thyristor(s) and/or the like

Floating mode ion source

Modular ion source

Longitudinal cathode expansion in an ion source

Modular uniform gas distribution system in an ion source